Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3-wire (NPN) S99V IC circuit 5 V,12 V S9P 3-wire (NPN) S9PV R73 Grommet 100 V R73C Connector R80 Grommet IC circuit 48 V, 100 V 24 V, 48 V, 100 V 2-wire Relay, Heavy-duty cord R80C For 20, Connector 24 V PLC 30 and 40 T79 Grommet 12 V T79C Connector S79 3-wire (NPN) IC circuit Grommet 5 V,12 V S7P 3-wire (PNP) Lead wire length symbols: 0.5 m 3 m 5 m None Nil L Z N (Example)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3-wire (NPN) S99V IC circuit 5 V,12 V S9P 3-wire (NPN) S9PV R73 Grommet 100 V R73C Connector R80 Grommet IC circuit 48 V, 100 V 24 V, 48 V, 100 V 2-wire Relay, Heavy-duty cord R80C For 20, Connector 24 V PLC 30 and 40 T79 Grommet 12 V T79C Connector S79 3-wire (NPN) IC circuit Grommet 5 V,12 V S7P 3-wire (PNP) Lead wire length symbols: 0.5 m 3 m 5 m None Nil L Z N (Example)

Air Cylinder Series MB

Lead wire length (m) Pre-wired connector Applicable load Load voltage Auto switch model Tie-rod mounting Band mounting Indicator light Wiring (Output) Type Special function Electrical entry DC AC 3 (L) 5 (Z) 1 (M) 0.5 (Nil) M9N M9P M9B J51 M9NW M9PW M9BW M9NA M9PA M9BA F59F P4DW 3-wire (NPN) 3-wire (PNP) G39 K39 IC circuit 5 V, 12 V 12 V 5 V, 12 V 12 V 24 V Grommet 2-wire 100 V, 200 V

CV/MVGQ

(M) Electrical entry MI W S DC 24, 12, 6, 5, 3 Coil rated voltage (V) (1) AC 50/60 Hz 100, 110, 200, 220 CEP1 Allowable voltage 10% of the rated voltage Power consumption (W) DC (2) 0.5 (With indicator light: 0.55) CE1 0.9 (With indicator light: 1.0) 100 V 110 V [115 V] 1.0 (With indicator light: 1.1) [1.1 (With indicator light: 1.2)] CE2 200 V AC Apparent power (VA) 1.8 (With indicator

CV/MVGQ

plug connector (M) Electrical entry MI W S DC 24, 12, 6, 5, 3 Coil rated voltage (V) (1) AC 50/60 Hz 100, 110, 200, 220 CEP1 Allowable voltage 10% of the rated voltage Power consumption (W) DC (2) 0.5 (With indicator light: 0.55) CE1 0.9 (With indicator light: 1.0) 100 V 110 V [115 V] 1.0 (With indicator light: 1.1) [1.1 (With indicator light: 1.2)] CE2 200 V AC Apparent power (VA) 1.8 (With

Basic type / Direct mount type Series CY3B/CY3R

, PLC Yes Yes Grommet 5 V, 12 V 24 V 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indication) 2-wire 3-wire (NPN equivalent) 12 V IC circuit Z76 5 V Grommet 100 V Z73 Z80 12 V 5 V, 12 V 2-wire 24 V Relay, PLC 100 V or less IC circuit Lead wire length symbols: 0.5 m Nil 3 m L 5 m Z (Example) Y7BW (Example) Y7BWL (Example) Y7BWZ Solid state auto switches marked

LJ1H

NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals, with nothing connected

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals, with nothing connected

Aluminum High Vacuum Angle Valve

V M A C U U M type plug connector (AC power supply) not attached for M of sizes 16 and 25.

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, v i t h 6 p c s ' o f s c r e t v s . p r o p e r t Y @ N o t e : E n s u r e t h e p r o t r u s i o n a t b o d v f i x a t s L o t o f M e m b r a n e m o d u l e ' l n s t a I L n e w o r i n s a t b e l o w o f m o d u l e ' T h e n , i n s e r t c o v e r a n d f a s t e n i t w i t n 4 @ S C T E W S f r o m t h e b e t o w o f c o v e [ . @ u n s c r e w t n e c o v e r .

MY1

Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.

Integrated Controller

Weight [g] Auto switch model D-M9NE(V) D-M9PE(V) D-M9BE(V) 0.5 m (Nil) 8 7 1 m (M)1 14 13 Lead wire length 3 m (L) 41 38 5 m (Z)1 68 63 1 The 1 m and 5 m options are produced upon receipt of order.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

JXC-C2-m V Controller/JXC73/83 To I/O To ENC V Actuator cable Page 606-6 Robotic cable Standard cable LE-CP-m LE-CP-m-S To USB To MOT To CI To C PWR V Motor control power supply connector (Accessory) AWG20 (0.5 mm2) Page 606-7 V Cable with main control power supply connector Cable length: 1.5 m (Accessory) Page 606-8 Part no. Provided by customer.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

(PNP) 2-wire IC circuit 5 V, 12 V 12 V Reed switch Solid state switch IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC 24 V Grommet Yes 12 V IC circuit Water resistance (2-color display) 5 V, 12 V 12 V IC circuit 3-wire (NPN equiv) Z76 No 5 V Yes Grommet Z73 Z80 100 V 100 V or less Relay, PLC 2-wire 24 V 12 V Lead wire length symbols: 0.5 m Nil (Example

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Lead wire length symbols: 0.5 m Nil(Example) Y59B 3 m L (Example) Y59BL 5 m Z (Example) Y59BZ Z76 5 V IC circuit Reed switch Solid state switch Yes 100 V Z73 12 V Grommet Relay, PLC 24 V 2-wire 100 V or less No 5 V, 12 V Z80 IC circuit Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7P 3-wire (PNP) Y59B 2-wire 12 V Relay, PLC Yes Grommet 24 V 3-wire (NPN) Y7NW Diagnostic indication (2-color

Programless Controller Series LECP1

Control circuit power supply (24 V) L11 Control circuit power supply (0 V) L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) Servo motor power (W) Connect to motor cable (U, V , W) U V W V W 60 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAm-m 2 m or less Note 5) PLC FX3U-mmMT/ES (Manufactured by

Step Motor Controller

Control circuit power supply (24 V) L11 Control circuit power supply (0 V) L21 Motor Connector: CNP3 Accessory U Terminal name Function Function details Servo motor power (U) Servo motor power (V) Servo motor power (W) Connect to motor cable (U, V , W) U V W V W 60 Series LECSA Series LECSB Control Signal Wiring Example: LECSA LECSAm-m 2 m or less Note 5) PLC FX3U-mmMT/ES (Manufactured by

ASP

Applicable tubing O.D. d L2 L3 M AQ ASV AK D2 L1 VCHC ASS T2 L4 H1 ASR ASQ (Hexagon width across flats) H2 KE (Hexagon width across flats) TMH D3 A1 L5 D1 A2 T1 Inch Size L4 (1) Mass (g) A1 (2) A2 (2) D3 L3 L2 L1 M d T1 D1 H1 H2 D2 Max. Min.

CRBU

Type Electrical entry Applicable load Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Applicable size Wiring (Output) 5 (Z) DC AC 0.5 (Nil) 3 (L) None (N) 90 Parallel cord 5 V,12 V 5 V,12 V,24 V 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V IC circuit Reed switch No Heavy-duty cord 90A 97 Parallel cord 2-wire 93A 100 V For 10 and 15 T99 Relay, 24 V Grommet

Rotary Actuator

E L L K K D B C G G D B C N N T T 24 (30) 1 M M 25.5 2 x R (34.5: Connector type) Auto switch 2 x R Y Y W Auto switch CDRB2BW20/30-=S/D CDRB2BW40-=S/D W W 60o(69o) 2 8 8 z15 32.5o 1. The length is 24 when any of the following auto switches are used: D-90/90A/S99(V)/T99(V)/S9P(V) 65o The length is 30 when any of the following auto switches are used: 4 R22.5 D-97/93A 2.