ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D H11 FB TG 0.2 E R MF TF UF L4 Screw size L4 32 F5032 30 7 32.5 50 32 10 64 79 5 M6 x 20L 40 F5040 35 9 38 55 36 10 72 90 5 M6 x 20L 50 F5050 40 9 46.5 70 45 12 90 110 6.5 M8 x 20L 63 F5063 45 9 56.5 80 50 12 100 120 6.5 M8 x 20L 80 F5080 45 12 72 100 63 16 126 153 9 M10 x 25L 100 F5100 55 14 89 120 75 16 150 178 9 M10 x 25L 125 F5125 60 16 110 Max. 157 90 20 180 Max. 224 10.5 M12 x 25L

mlu

side) to unlock. 2) Screw a manual unlocking bolt (a conventional bolt of 25, 32: M3 x 0.5 x 25l or more, 40, 50: M4 x 0.7 x 35l or more) into the lock ring threads as shown above, and lightly push the bolt in the direction of the arrow (head side) to unlock.

Compact Cylinder

D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5SZ -10SZ CQ2B40-5SZ -10SZ CQ2B50-10SZ -20SZ CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5TZ -10TZ CQ2B40-5TZ -10TZ CQ2B50-10TZ -20TZ CQ-M3 x 25L x 30L CQ-M3 x 25L x 30L CQ-M5 x 25L x 30L CQ-M5 x 30L x 35L CQ-M5 x 30L x 35L CQ-M5 x 35L x 40L CQ-M6 x 45L x 55L

Air Cylinder Series CA2

-5A 80 18 0.050 0.093 76.5 5 Polished round 18 66.5 4 4 x 25l CDP-6A 80 100 20 0.065 0.117 83 5 Polished round 20 73 4 4 x 30l CDP-7A 100 25 0.065 0.117 88 5 Polished round 24 78 4 4 x 36l Cotter pin and flat washer are included.

Air Cylinder

71 61 5 4 16 2 CDP-5A 80 4 x 25L Polished round 18 1 76.5 66.5 5 4 18 CDP-6A 80 100 4 x 30L Polished round 20 83 73 5 4 20 CDP-7A 100 4 x 36L Polished round 24 88 78 5 4 25 Split pins and flat washers are included.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

D H11 FB TG 0.2 E R MF TF UF L4 Screw size L4 32 F5032 30 7 32.5 50 32 10 64 79 5 M6 x 20L 40 F5040 35 9 38 55 36 10 72 90 5 M6 x 20L 50 F5050 40 9 46.5 70 45 12 90 110 6.5 M8 x 20L 63 F5063 45 9 56.5 80 50 12 100 120 6.5 M8 x 20L 80 F5080 45 12 72 100 63 16 126 153 9 M10 x 25L 100 F5100 55 14 89 120 75 16 150 178 9 M10 x 25L D TG R E FB * Supplied with 4 mounting screws.

Cylinder with Lock Series MNB

Note 1) l (Drill through) Cotter pin d D m Dd9 L H B C 3 x 18l 4 x 25l 4 x 35l M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 16.5 21 26 31 39 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 36 51 72 4 4.5 5 3 4 4 44 60 82 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 -0.040 -0.076 -0.050 -0.093 -0.065 -0.117 Note 1) A cotter

2

Inverter Type Circulating Fluid Temperature Controller Thermo-chiller Small Basic Type Peltier-Type Chiller Thermo-con/ Rack Mount Type Air-cooled Series HRSH Series HRSE Series HECR P .934 P .970 P .990 High Vacuum Equipment Pneumatic Instrumentation Equipment Aluminum High Vacuum Angle Valve Normal Close High Vacuum Solenoid Valve Pneumatic Instrumentation Equipment Series XSA P .1034 Series XLA

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

T Note1) EB LL Concentrated piping on right (CY1F10 to 25R--) KA KB HW EW GD GC 2-P (Hexagon socket head plug) Hexagon socket head bolt For adjustment bolt fixing ES 2-P (Piping port) EY HA EH KC GB KH H GB GA GA G HB KW N N Adjustment bolt A Z + Stroke Concentrated piping on left (CY1F10 to 25L--) KA KB EW 2-P Hexagon socket head bolt For adjustment bolt fixing HW ES (Piping port) 2-P (Hexagon

Low Profile Guide Type

T EA EB LL Concentrated piping on right (CY1F10 to 25R--) KA KB EW HW GD GC For adjustment bolt fixing Hexagon socket head bolt 2 x P ES (Piping port) 2 x P (Hexagon socket head plug) EY HA EH KC H GB KH GB GA GA N G N A HB KW Adjustment bolt Z + Stroke Concentrated piping on left (CY1F10 to 25L--) KA KB EW For adjustment bolt fixing HW 2 x P 2 x P Hexagon socket head bolt ES (Hexagon socket

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com EB LL Concentrated piping on right (CY1F10 to 25R--) KA KB HW EW GD GC 2-P (Hexagon socket head plug) Hexagon socket head bolt For adjustment bolt fixing ES 2-P (Piping port) EY HA EH KC GB KH H GB GA GA G HB KW N N Adjustment bolt A Z + Stroke Concentrated piping on left (CY1F10 to 25L

CV/MVGQ

Dd9 Knuckle 40, 50, 63 80 100 3 x 18l 3 x 18l 4 x 25l 4 x 25l 4 x 30l 4 x 36l CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 10 0.046 0.076 12 0.050 0.093 16 0.050 0.093 18 0.050 0.093 20 0.065 0.117 25 0.065 0.117 46 55.5 71 76.5 83 88 4 4 5 5 5 6 3 3 4 4 4 4 38 47.5 61 66.5 73 78 Material: Rolled steel Applicable bore size (mm) 40 50, 63 80 100 d D H B C Part no.

NCQ2/CQ2

D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 x 55L (N)CQ2B12-5S (N)CQ2B12-5T CQ-M3 x 25L 6.5 6.5 -10S (N)CQ2B16-5S (N)CQ2B16-5T CQ-M3 x 25L 5 5 -10S (N)CQ2B20-5S (N)CQ2B20-5T CQ-M5 x 25L 7.5 7.5 -10S (N)CQ2B25-5S (N)CQ2B25-5T CQ-M5 x 30L 9.5 9.5 -10S (N)CQ2B32-5SZ (N)CQ2B32-5TZ CQ-M5 x 30L 9 9 -10SZ (N)CQ2B40-5SZ (N)CQ2B40-5TZ CQ-M5 x 35L 7.5 7.5 -10SZ (N)CQ2B50-10SZ (N)CQ2B50-10TZ CQ-M6 x

Flow Sensor Series PFMV

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series

3

Description Material Note 1 2 3 4 5 6 Arm Clamp bolt Hexagon nut Rolled steel Chromium molybdenum steel Rolled steel Hexagon socket head cap screw Spring washer DChromium molybdenum steel Hard steel M12 x 25L Hexagon socket head set screw Chromium molybdenum steel Flat point M8 x 8L -X The arm assembly consists of the parts No.1 to 6. 401 MK Series Made to Order: Individual Specifications

CV/MVGQ

Dd9 Knuckle 40, 50, 63 80 100 3 x 18l 3 x 18l 4 x 25l 4 x 25l 4 x 30l 4 x 36l CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 10 0.046 0.076 12 0.050 0.093 16 0.050 0.093 18 0.050 0.093 20 0.065 0.117 25 0.065 0.117 46 55.5 71 76.5 83 88 4 4 5 5 5 6 3 3 4 4 4 4 38 47.5 61 66.5 73 78 Material: Rolled steel Applicable bore size (mm) 40 50, 63 80 100 d D H B C Part no.

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Part No. d Cotter pin l d H B Dd9 L C D m (Cut through) Note 1) 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32, 40 50, 63 80, 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 36 51 72 4 4.5 5 44 60 82 3 4

CUJ

mounting For axial mounting Without Auto Switch For side mounting Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 A B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 C D Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 M2.5 x 21L M2.5 x 23L M2.5 x 25L

70astamb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When

Table of Contents

www.stevenengineering.com Without Auto Switch For Axial Mounting For Lateral Mounting B 21 23 25 27 22 24 26 28 33 22 24 26 28 33 38 22 24 26 28 33 38 Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 C D A M2.5 x 21l M2.5 x 23l M2.5 x 25l