Compact Cylinder Double Acting, Single Rod JCQ Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

PF3W7x.eng

Excessive accumulated flow 5% of maximum rated flow [00.05] 00.05 gal/min (4 L type) [00.21] 00.21 gal/min (16 L type) [000.5] 000.5 gal/min (40 L type) [001.3] 001.3 gal/min (100 L type) [000.3] 000.3 gal/min (250 L type) Temperature upper limit exceeded The fluid temperature is above 110 oC. Reduce the fluid temperature.

VFR3000-OMJ0001

) 40) 40) 40) VFR3 VFR3 VFR3 VFR3 00,VFR3 00,VFR3 00,VFR3 00,VFR3 10 10 10 10 VFR3 VFR3 VFR3 VFR3 40 40 40 40 (N.C.)N.O.3 3 B A N.C.

LG1H

Applicable strokes: 150, 250, 350 Example) LG1H2021PA-150-F2-X2 100 5.3 8.3 400 7.7 12.0 5 to 40 (with no condensation) 200 6.1 9.6 300 6.9 10.8 mm kg kg C kg N mm/s mm Standard stroke Aluminum Stainless steel Body weight Operating temperature range Work load Rated thrust Maximum speed Performance 30 180 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 10mm lead High

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

1

Note 3) Refer to the catalog, since the dimensions of standard stroke Series CQ2 and CQS are different from that of long stroke type. 6-18-1 2 SMC Actuators: Copper-free Air Cylinders 6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Air Cylinders 20-series has been added by design modification. (98.6.1) Series Application Bore size (mm) Standard Copper-free 6 8 12 (10

CEx-OML0058

Please read this instruction manual and the instruction manual of the controller CEU2 thoroughly before use. 14 Chapter 4: Product Specifications 4-1 Cylinder specifications Bore size 40 50 63 80 100 Operating fluid Air (Non-lube) Proof pressure 1.5MPa Max. operating pressure Actuation pressure : 1MPa Brake pressure 0.5MPa Min. operating pressure Actuation pressure : 0.1MPa Brake pressure

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

ZU

40 40 40 10 5 27 27 27 27 Suction flow rate Vacuum pressure 13 13 13 13 0 0 0 4 8 12 14 0 0.1 0.2 0.3 0.4 0.5 0.6 0 5 10 15 20 25 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow rate N (l/min(ANR)) Supply pressure (MPa) Supply pressure (MPa) Suction flow rate N (l/min(ANR)) How to Read Flow Characteristics Graph Flow characteristics are expressed in ejector vacuum pressure and suction flow.

VZ3000

-L-01 M plug connector (M) VZ3 40-M-01 3 4 5 3 4 5 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor Built-in speed controllers VZ3 50DIN terminal (D) VZ3 40-D-01 3 4 5 3 4 5 Applicable cable O.D. 3.5 to 7 MAX. 10 3-3-36 Series VZ Made to Order Specifications: Please contact SMC for detailed specifications, dimensions, and delivery. 1.

Digital Flow Switch for Water Series PF3W 3-color display ®

With lead wire with M8 connector (3 m) Without lead wire with M8 connector Note Description ZS-40-K ZS-40-L ZS-40-M ZS-40-A Part no.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Series PF2D Flow Characteristics (Pressure Characteristics) PF2D504 PF2D520 PF2D540 0.040 0.035 0.030 0.035 0.030 Pressure loss [MPa] Pressure loss [MPa] Pressure loss [MPa] 0.025 0.030 0.025 0.020 0.025 0.020 0.020 0.015 0.015 0.015 0.010 0.010 0.010 0.005 0.005 0.005 0 0.5 1.0 1.5 2.0 2.5 3.0 4.0 3.5 0 2 4 6 8 10 12 16 14 18 20 0 5 10 15 20 25 30 40 35 Flow rate (l/min) Flow rate (l/min

ZU

Flow Characteristics 93 93 93 93 Vacuum pressure Air consumption 80 80 80 80 Suction flow rate N (l/min(ANR)) Suction flow rate N (l/min(ANR)) Suction flow rate Air consumption N (l/min(ANR)) Air consumption N (l/min(ANR)) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure kPa 67 67 20 67 10 67 Air consumption 53 53 53 53 40 40 40 40 10 5 27 27 27 27 Suction

XLJ- -*G1 Series 25 40

Tighten the bolts gradually in numerical order (alternately) with bonnet assembly held. 11 XL-OMU0002-A Revision history A 40 size added WU 1st Printing :UX 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Solid State Auto Switch

D-M9NA D-M9NAV D-M9PA D-M9PAV D-M9BA D-M9BAV Lead wire orientation In line Perpendicular In line Perpendicular In line Perpendicular Wiring 3-wire 2-wire Output NPN PNP Applicable load IC circuit/Relay/PLC 24 VDC Relay/PLC Power supply voltage 5/12/24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40

Membrane Air Dryer

Revision history A: Changes to Maintenance and Checks B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

STOPPER CYLINDER

RS(D)Q32/40/50LZ How to Order Lever type RS(D)Q32/40/50BZ RS(D)Q32/40/50CZ RS(D)Q32/40/50DZ RS(D)Q32/40/50EZ Mounting base Table 1. Recommended hole diameter Recommended hole Rod cover boss diameter of the mounting base O.D. Model T D RS(D)Q32 36 38 RS(D)Q40 44 48 RS(D)Q50 56 57 Fig. 3 6 - 7-3.

Digital Flow Switch (Integrated display type)

[January 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2019 SMC Corporation All Rights Reserved No.PF-OMO0012-E

High Vacuum L Type Valve

XLS-16-*D 60 48 96 XLS-16-*T 129 95 62 XLS-25-*G 128.5 28 XLS-25-*C 121.5 43 138.5 48 40 40 26 25.5 50 XLS-25-*D 120.5 63 51 XLS-25-*T 121.5 154.5 97 66 XLS-16-P*G 40 96 113 38 30 35 17 23 87 66.5 XLS-25-P*G 50 121.5 138.5 48 40 40 26 25.5 89.5 69 9 XL*-OMI0013-B 6.Period and Scope of Warranty The waranty period is 0.5 million cycles (under SMCs endurance test conditions), 1 year in service