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0.2 MPa Ambient and fluid temp. 10 to 50C Note 1) Lubrication Not required Pilot valve manual override Push type/Locking type (Tool required) Vibration/Impact resistance Note 2) 30/150 m/s2 Protection structure Dust tight Coil rated voltage 12 VDC, 24 VDC Solenoid specifications Allowable voltage fluctuation 10% of rated voltage Coil insulation type Equivalent to class B 24 VDC 0.4 W DC (17

Clearance for maintenance G 1/4 Drain E CC A AW60-B 1021S N T D J J M U Applicable tubing 6/4 R C Q BB K H IN OUT P2 Pressure gauge (Option) 2 x P1 (Port size) (Pressure gauge port size) B Hexagon width across flats 17 Clearance for maintenance G 1/4 Drain E A CC Metal bowl 10-/21-AW20-B 10-/21-AW30-B to 60-B Semi-standard specifications Applicable model Model With bowl guard Metal bowl

L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

(SCRJ)PROFINET IO 1(XF1) (SCRJ)PROFINET IO 2(XF2) EX245-SPN2A M4FE ( = 0.70.8 Nm) (24 V) (XD1) (24 V) (XD2) (RJ45)PROFINET IO 1(XF1)MDI (RJ45)PROFINET IO 2(XF2)MDI-X . 3-4 FE /(EX245-SPN1A/SPN2A) 16 No.EX-OMW0014CN-A EX245-SPN3A M4FE ( = 0.70.8 Nm) 7/8 (5 ,)(XD1) 7/8 (5 ,)(XD2) M12(4 ,,D code)PROFINET IO 1(XF1)MDI M12(4 ,,D code)PROFINET IO 1(XF2)MDI-X . 3-5 FE /(EX245-SPN3A) 17

For detailed description of the signals, refer to the following pages. 15 (2) Internal circuit (Numbers in brackets indicates the pin numbers) (5) PWR_DC24V LF (6) PWR_GND Output signal GND (9) CTR (10) CYL (11) VAL (16) RF (17) PWR Max.

Tightening torque Bore size Socket Tightening torque[Nm] 40,50 13 (M8) 7.4 63 17 (M10) 20 80,100 19 (M12) 29 2 4 Tie rod tightening order. 18 3-2-2. Removal of seals 1) Rod seal Insert a precision screwdriver from the front of the cover to pull out the seal as shown in Fig. 7.

D-M9/D-A9 D-M9 D-M9W D-M9AVL D-M9V D-M9WV D-M9AL D-A9 D-A9V A B A B A B A B 50 23.5 9.0 23.5 11.0 23.5 7.0 19.5 10.5 (13.0) 63 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 80 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) ( )D-A96 -15 D-P3DW D-P3DW A B Hs Ht 50 14.5 6.5 41 35 63 16.5 10 47 44 80 30.5 17 55 54 D-P3DW BQ6-032S -16 18 - 7-3. 7-3-1.D-M9D-A9 (-) -17 5~6mm D-A9(V)

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Do not remove this cover until immediately before installing the auto switch on the rotary table. -17- Outline This operation manual explains Rack and Pinion Type Rotary table. When using the product, load (moment of inertia), rotation time and other factors have to be considered. So, confirm the specification of the product prior to use.

. /2 . 17 1 *1) (ISO/IEC) (JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2.

LEFS16A-100 NPN (2) Check Parallel I/O configuration matches (NPN or PNP). (2) 17 - 2.4 Construction In-line mouting type A-A LEFS16, 25, 32 A B A LEFS40 A-A A B A Roller type seal band stpper Parts list Description Material Note Description Material Note 1 1 13 Motor cover Aluminum alloy Anodized Body Aluminum alloy Anodized 14 End cover Aluminum alloy

AW20(K) AW30(K) AW40(K) AW20(K) AW30(K) AW40(K) 7 17 21 427 Series AW10 to 60/AW20K to 60K Replacement Procedure of Diaphragm 3 Procedure Tools Check item Process Applicable model Disassembly 2) Remove the valve spring. 3) Remove the valve assembly. Assembly 4) Mount the valve assembly. Mate the stem convex and the valve center hole.

Description Material Note No. 1 2 3 4 5 6 7 8 9 Description Material Note 20, 25: Resin Body Aluminum alloy Hard anodized MHY 10 Cap 32 to 50: Aluminum alloy Piston Hard anodized Aluminum alloy Hard anodized 11 12 13 14 15 16 17 Piston bolt Stainless steel Pinion gear Carbon steel Heat treated MHW MHW Ball bearing Carbon steel Seal cover Schield type Brass Key Carbon steel Bumper Urethane

Reed switch D-X 20Data 10-13-17

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 12.7 12.5 33.7 30.7 56.3 52.1 92.9 87.6 153.8 145.5 21 21.5 25.5 26 16 17 17 18.5 17 18.5 18.5 21 21 22 M5 x 0.8 11.2 28.3 8 13 9 25.5 25 22.2 R 1/8 14.7 33.9 36.4 12 15.5 14.6 26.6 31.4 32.4 27.4 R 1/4 17.7 38.5 40.8 17 15.5 19.5 28.7 35.8 34.8 29.8 32.7

31.3 33.6 35.5 52.5 54.9 56.8 58.4 52.5 54.9 56.8 58.4 93.7 95.0 20.8 21.1 22.5 25.3 33.1 23.3 23.9 27.2 33.9 26.4 29.5 31.8 32.8 26.4 29.5 31.8 32.8 33.6 34.6 7.8 8.9 11.0 15.2 18.5 8.9 11.0 15.2 18.5 11.0 15.2 18.5 20.9 11.0 15.2 18.5 20.9 18.5 20.9 14.5 14.3 1 8 14.2 36.1 31.1 30.5 25.5 15.5 18.5 21.0 14.5 15.5 18.5 21.0 15.5 18.5 21.0 22.0 15.5 18.5 21.0 22.0 21.0 22.0 12 15.0 17.2 17

-11-16 17 Rotary Gripper Series MRHQ Construction MHZ MHF MHL MHR MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MHS MHC MHT MHY MHW MRHQ Misc.