Table of Contents

MIN. 1 2 Note 1) d Note 2) L3 Note 3) L4 ASR430F-02-06S,-F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 25.7 23.3 25.7 23.3 25.7 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2

AS-FG/ASD-FG

25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23 19.8 46.9 41.9 48.8 43.8 19 R(PT) 3/8 40 14 35 32.6 54.1 10 21 18.5 ASD530FG-03-10S 23.1 34.4 55.9 12 22 20.9 ASD530FG-03-12S 32.6 64.3 10 21 18.5 ASD630FG-04-10S 28.6 26.5 64.8 57.3 57.6 50.1 24 R(PT) 1/2 25.9 49.6 18.6 42.1 34.4 66.1 12 22 20.9 ASD630FG-04-12S Reference dimensions for M5 x 0.8 and R(PT)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9

ASP

Model D3 T2 L5 11.6 15.2 12.8 15.2 15.2 18.5 18.5 20.9 14 15.8 18 19.7 20.3 23.1 13.7 18.7 16.8 18.7 18.7 20.8 20.8 21.8 38.4 44.7 43.4 46.4 51.3 54.1 64.2 66 32 35 65 68 107 110 212 215 22.9 28.2 25.2 28.2 28.2 32.6 32.6 34.4 34.6 33.9 11.8 39.6 38.9 6 8 6 8 8 10 10 12 ASP330F-01-06S ASP330F-01-08S ASP430F-02-06S ASP430F-02-08S ASP530F-03-08S ASP530F-03-10S ASP630F-04-10S ASP630F-04-12S

ZQ-OM01401

(6) 05 0.5 07 0.7 W (2m) 10 1.0 (7) (V ) (8) (P ) (2) 1U 0 (M5x0.8) 3M 1 3.2 () 0 (M5x0.8) 2 4 () 2 4 () (3) 3 6 () 3 6 () 4 3.2 () 5 4 () B 5 4 () 1) (9) (4) ( [kPa] VA -100 to 100 NPN1 + VB PNP1 + N 1) ZFC (5) 2) M SI (kPa) 2) (99 10 ) ZZQ108A-B S C-A (1) (2) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S

IBV-OMY0015

Designated nozzle: IBG1-12-10: Nozzle length (50, 100, 150, 300) Silencing nozzle: IBG1-12S Set including the designated nozzle and silencing nozzle: IBG1-12-10-S : Nozzle length (50, 100, 150, 300) 4. Impact resistance of the product is 150[m/s2]. Vibration resistance is 30[m/s2]. Avoid applying vibration exceeding the allowable value to the product. Mounting Warning 1.

High Vacuum Slit Valve

Application Remarks Receptacle plug XGT0402-9-12S (For XGT31-50336-C) C016 30D006 100 12 (AMP) 11 - 6Maintenance Please refer to valve maintenance procedure in the attached documents. 7Troubleshooting Condition Assumed cause Countermeasure Gate Internal leakage Operating pressure is low Pressure should be 0.45MPa or more.

Parallel Seal Type Slit Valve

XGT300-9-11S XGTP31 -50336-2 O-ring(Bonnet assembly) FKM XGT300-9-7S XGTP31 -50336AS568-177 Gate Bolt XGT300-2-5S How to order for Bonnet ASSY XGTP311 50336A1 1 Connected connector of Auto witch (female type) End lock Without Gate Nil : OPEN/CLOSE end lock N : None Auto switch and the connector (See Table 1) Description Orderable Part No Applicable Part No Note Straight plug XGT0402-9-12S

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9

Parallel Style Air Gripper Series MHZ

MHF Clearance MHL With clearance Without clearance MHR Guide to Built-in Needle Adjustment 3) When turning over MHK Model Number of needle rotations from fully closed state () MHC2-10 MHC2-16 MHC2-20 MHC2-25 MHK2-12D MHK2-16D MHK2-20D MHK2-25D MHKL2-12D MHKL2-16D MHKL2-20D MHKL2-25D Turning over 1/4 to 1/2 1/2 to 1 1 to 1 1/2 1 1/2 to 2 3/4 to 1 1 to 1 1/4 1 1/2 to 1 3/4 1 3/4 to 2 1 to 1

CG5-S

(mm) Connection threads Connection threads Universal type Universal type ASD230FG-M5-04 ASD230FG-M5-06 ASD330FG-01-06S ASD430FG-02-06S ASD530FG-02-06S -03-06S ASD330FG-01-08S ASD430FG-02-08S ASD530FG-02-08S -03-08S ASD430FG-02-10S ASD530FG-02-10S -03-10S ASD630FG-04-10S ASD530FG-02-12S -03-12S ASD630FG-04-12S M5 x 0.8 R 1/4 M5 x 0.8 JIS symbol 10 R 3/8 R 1/8 R 1/2 6 R 1/4 R 1/4 12 R 3/8 R

CG5-S

(mm) Connection threads Connection threads Universal type Universal type ASD230FG-M5-04 ASD230FG-M5-06 ASD330FG-01-06S ASD430FG-02-06S ASD530FG-02-06S -03-06S ASD330FG-01-08S ASD430FG-02-08S ASD530FG-02-08S -03-08S ASD430FG-02-10S ASD530FG-02-10S -03-10S ASD630FG-04-10S ASD530FG-02-12S -03-12S ASD630FG-04-12S M5 x 0.8 R 1/4 M5 x 0.8 JIS symbol 10 R 3/8 R 1/8 R 1/2 6 R 1/4 R 1/4 12 R 3/8 R

•

Se' nes CS2 (mm) Z + 1/2 stroke 152.5 + Stroke 150 + Stroke 160 + Stroke ~ Bore ~iie :: :-<; .For -XC14A " i i " ~;:,'. " For -XC14 Reference for standard Minimum Strok-e :: (ce~t~r trunnion) For -XC14B Minimum 166 168.5 186.5 Maximum 12S , 165.5 .. 140 168 159 + 1/2 stroke 25 159 + 1/2 stroke 30 173 + 1/2 stroke 35 152 + Stroke 149.5 + Stroke 159.5 + Stroke "' 160 '!'

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

. = 16V = 1mA x 2 pcs. x 3k = 6V Example: Power supply is 24V DC Switch internal voltage drop is 4V Example: Load impendence is 3k Leakage current from switch is 1mA 2.11-7 Series MHZ2, MHZJ2, MHK2, MHKL2, MHC2, MHT2 Installation and Setting of Auto Switch Auto switches can be used in various ways depending on the number installed and the required detecting position. 1) External Holding Confirmation

V

12 R(PT)1/4 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 39.8 33.8 22 24 74 ASV510F-03-10S 10 R(PT)3/8 17 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 41.8 35.5 21 23 73 M3, M5 S 18 12 ASV510F-03-12S 12 R(PT)3/8 17 25.7 20.9 30 91.8 85.8 89.8 83.8 55.6 49.6 41.8 35.5 22 24 78 ASV510F-04-10S 10 R(PT)1/2 22 23.3 18.5 30 90.2 84.2 88.2 82.2 55.6 49.6 45.8 37.6 21 23 95 ASV510F-04-12S 12 R(PT

IMPACT BLOW GUN

Part number S coupler 11 KK4P-03MS for ordering a silencer alone is IBG1-12S. H06 6 KQ2H06-03AS H08 8 KQ2H08-03AS H10 10 KQ2H10-03AS H07 1/4" KQ2H07-36AS H09 5/16" KQ2H09-36AS H11 3/8" KQ2H11-36AS One-touch fitting * The S coupler or fitting is shipped together with the product. 3.

Fieldbus System

SS5Y5 12S NA 05 N M U Refer to page 23 for Type 12/ Top ported dimensions. q w e r y t u Mixed Mounting Type It is possible to mount SY3000 size valves on all stations.

5-Port Solenoid Valve

SY Type 12/Top Ported Plug-in Connector Connecting Base: EX500 Gateway Decentralized System 2 (128 Points) p. 109 SS5Y-12S SY Type 12/Top Ported Plug-in Connector Connecting Base: EX500 Gateway Decentralized System (64 Points) p. 111 SS5Y-12S SY Type 12/Top Ported Plug-in Connector Connecting Base: EX250 p. 131 SS5Y-12S SY Type 12/Top Ported Plug-in Connector Connecting Base: EX260 p. 139

Vacuum

sggT 3 Lr 33 51 75 96 117 138 159 180 La ,15 6 al 1(F 12S r50 171 IQ 44 suction filter and silencer valve retease vatve vacuum switch (solid-state or diaphragm) Pnessune to-21iFllg (-030 mmllD. nozzle diameters for efficient aoolication. floul Incnemed by 40%. ) nozzle suction flow is 40% higher than nal designs. &Lig[tweignt. 15.5mm) width; 0.881bs. (4009f) weight.