Series VQ Metal Seal/Rubber Seal Body Ported

T1 (Terminal block of 1 row): 1 to 4 stations T2 (Terminal block of 2 rows): 5 to 8 stations T1 and T2 can be optionally chosen by adopting the combinations of single and double wiring (optional spec.), etc. How to connect wires to terminal block Open the terminal block cover to connect the wires to the terminal block.

Mechanical Valves Series NVM, NVFM, NVZNI

F O F z z lbs (1 kS ) P T . 0 125 in (3 2mm) O T 0 09'1 in (2 3mrr) T T 0.216 in (5 5mm) -75 PSIG (5 Kgf/cm2) P T 0 125 in (3.2mm) O T 0 091 in (2.3mm) T T 0 216 in (5 Smm) .75 PS|G (5 A B c D E 2.',t1 :s3.5) 1.89 (48) 1.83 (46.5) 1 . 1 4 (291 0.31 {8) Millimeters in Parentheses A B c D E 1.68 1.46 t37.'

Metal Seal/Rubber Seal Series VQ Body Ported

T1 (Terminal block of 1 row): 1 to 4 station T2 (Terminal block of 2 rows): 5 to 8 stations T1 and T2 can be optionally chosen by adopting the combinations of single and double wiring (optional spec.), etc. The quantity of terminal blocks used depends on the number of manifold stations.

Booster Regulator/Air Tank

VBA40A/42A/43A VBA40A/42A T [s] = ( ) x T2 T1 V 10 VBA20A/22A 38L VBA40A/42A/43A Z 4.6 10 11.5 3.8 1 T = ( ) x = 3.5 [s] Extend stop time Ts up to charge time T or more. Increase number of booster regulators (Z) to decrease T. NO NO Judgement of charge time T Ts YES YES YES When running continuously for longer periods of time, confirm the life expectancy.

IIIIIII

F O F z z lbs (1 kS ) P T . 0 125 in (3 2mm) O T 0 09'1 in (2 3mrr) T T 0.216 in (5 5mm) -75 PSIG (5 Kgf/cm2) P T 0 125 in (3.2mm) O T 0 091 in (2.3mm) T T 0 216 in (5 Smm) .75 PS|G (5 A B c D E 2.',t1 :s3.5) 1.89 (48) 1.83 (46.5) 1 . 1 4 (291 0.31 {8) Millimeters in Parentheses A B c D E 1.68 1.46 t37.'

Step Motor Controller (Servo / 24 VDC)

Caution (1) Do not connect to equipment other than specified (LEC-W1, LEC-W2, LEC-T1, LEC-G).

10

, T1 = 297 5 K, 0.07 bar P 0.14 bar.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Max. 20 stations) Note) Indicate "Nil" for types T, T1, and S.

•

V x 60 T1 ~--(PV) X630f0 a T2 : Necessary second to reach final vacuum preSSure The;etica~ lift force ' ] [,= 760x S 1.033 T2 = 3xTl (PV)X95% Table Of Theoretical Lift Force Unitkgf V : Capacity from ejector upto pad ~2) o : 01 or 02 whichever smaller (Nfimin) * Final vacuum pressure(PV) : steady pressure after adsorption.

ZSM1-115/121

40 mA Current consumption 10 mA or less (24 VDC) ZSM1-121 Supply voltage 100 VAC/DC Max. operating current range 24 V or less: 50 mA, 48 V: 40 mA, 100 V: 20 mA Max. contact capacity AC 2 VA, 2 W DC How to Order ZSM1 1 15 Vacuum switch diaphragm style 0.5 m (Standard) 3 m Lead wire length Nil L Switch/Voltage 15 21 Solid state 4.5 to 28 VDC Contact (Reed switch) 100 VAC/DC Connection 0 1 T1

JXCx-OMX0009

:LEC-T1-3#G# *1 These items are included when ordered using the part number for an Electric actuator set. *2 Latest version of the controller setting software must be used.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

disc in betu/een stations subiected to diflerent presaures lesslP ^ MRBF2000-00-P-1 MffBF2mo-oGP'2 Hequtalron r I @ Series NVFRz000:Base Mounted Tlpe M anifo Id/ O pt ion Par ts Plug in Ta pe / Non P lug in T U pe / D imc rc io ns inch(mm) SUP Relocation spacer NWFS2mO.P.3IT-l (Prug-in Vpe) NwFs2mo.P.3lT2 (Nm prus-in gpe) lspedty'l/8 (o1) ot 1t4 (o2 ) EXH Relocation spacer NWFS2OOGR-8]T1

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Electrical entry Port size F kit Double wiring F kit Single wiring T kit Double wiring T kit Single wiring S kit Double wiring S kit Single wiring L0 kit : Stations (1 to 16) L1 kit : Stations (1 to 16) L2 kit : Stations (1 to 16) C kit (Plug lead type) 02 03 B C8 C10 C12 N7 N9 N11 F1 F2 T1 T2 S1 S2 L0 L1 L2 C Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 With One-touch fitting for 8 With One-touch

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

SY

(Max. 20 stations) Applies to 45T/T1 only. 24VDC only for type S.

LX

-02 Performance/Specifications General specifications LC5-1-T1-02 Part no.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

absolute, T1 = 297 5K, 0.07 bar DP 0.14 bar.

LVQ

LVQ6m only Nil M R N LQ1 integral fitting LQ1 integral fitting Threaded Threaded Connection tubing O.D. 1/8" (3) Connection tubing O.D. 4 Rc 1/8 NP T1/8 P v v Option (1) Valve type 6 7 8 9 24 Nil 1 2 3 4 5 None With flow rate adjustment With bypass High back pressure with flow rate adjustment High back pressure with bypass 0 1 2 N.C. N.O.

Air Pilot Operated Series NVSA

't1 '12 = Mouoled on siacking manilotd block r,, NPT side ports (2) '14 = Mounled on stacking manifold block 7." NPT side & bottom pons (4) '16 = Mounted on stacking moLlnted block 7." NPT side (2) & bottom (5) ports To Order "Faclory Built" Valve/t anifotd Assmbty: EXAITPLE 1 Pce. Four Station Manifotd Ass y comprising:station 1. NVSA 411+12A Slation 2.

-fl Seies

block disc in betu/een stations subiected to diflerent presaures lesslP ^ MRBF2000-00-P-1 MffBF2mo-oGP'2 Hequtalron r I @ Series NVFRz000:Base Mounted Tlpe M anifo Id/ O pt ion Par ts Plug in Ta pe / Non P lug in T U pe / D imc rc io ns inch(mm) SUP Relocation spacer NWFS2mO.P.3IT-l (Prug-in Vpe) NwFs2mo.P.3lT2 (Nm prus-in gpe) lspedty'l/8 (o1) ot 1t4 (o2 ) EXH Relocation spacer NWFS2OOGR-8]T1