PSxx-OMU0005CN

=1.1000.01=0.011[MPa]) R.D. 1.000[MPa]5R.D.1.000[MPa]50.05[MPa] 0.800[MPa]5R.D.0.800[MPa]50.04[MPa] ON/OFF () (34 ) ON OFF 34 75 75 ON OFF Hysteresis / () () 25[]ON-OFF () -11No.PS-OMU0005CN-C NPN () () ()()( ) () ON ON 0 (1k1MA/D 5V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005V ) 34 ON-OFF ON ( )(P1L~P1H) ON (34 ) () "digit" () 0 -12No.PS-OMU0005CN-C () SI ON/OFF ON-OFF 90

PSxx-OMU0008CN

TSJ Tube Swage Joint Swagelok URJ Union Ring Joint VCR ONOFF () (35 ) ON OFF 35 76 76 ON OFF Hysteresis / () () 25[]ON-OFF () -12No.PS-OMU0008CN-D NPN () () ()()() () ON ON 0 (1k1MA/D 5 V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005 V ) 35 ON-OFF ON () (P1LP1H)ON (35 ) () digit () 0 -13No.PS-OMU0008CN-D () SI ONOFF ON-OFF / ON/OFF 90% () () () () ON -14No.PS-OMU0008CN-D

PSxx-OMS0006CN

ONOFF (31 ) ON OFF 31 61 61 ON OFF Hysteresis / () () 25[]ON-OFF -11No.PS-OMS0006CN-G NPN () () ON ON 0 31 ON-OFF ON ( )(P1L~P1H) ON (31 ) () "digit" () 0 () SI ON/OFF ON-OFF / ON/OFF 90 ON -12No.PS-OMS0006CN-G ON ( )(n1L~n1H) ON (31 ) 31 (0FF)(ON)(OFF)(ON) () 5%R.D.(5%) (0~1MPa 0.001MPa 1/1000 () () F () ripple -13No.PS-OMS0006CN-G (3X8L(2 ) 0.50.05 Nm ,, A

Digital Gap Checker ( compatible)

(Refer to page 90 for the Endian type of the upper level communication.) Check that the Endian type on the master upper level communication transmission format is Big Endian type or Little Endian type.

PSxx-OMF0005CN

90 () () 1 OPEN OPEN (15), 2 2 0.2MPa 0.16MPa 3 OPEN (A ) A (OPEN ) -19No.PS-OMF0005CN-E 0.01 mm 0.01 mm ISA2-G ISA2-H 1.5 64 5 m 2.0 64 5 m 50kPa 30kPa [mm] [mm] [mm] [mm] -20No.PS-OMF0005CN-E ISA2-G ISA2-H 1.5 64 5 m 100 kPa 2.0 64 5 m 100 kPa 0.05mm 0.05mm [s] [s] [mm] [mm] 1.5 64 100 kPa 0.15 mm 2.0 64 100 kPa 0.3 mm [s] [s] [mm] [mm] -21No.PS-OMF0005CN-E ISA2-G

ISA2.eng

Terminal board box (See the concentrated wiring method) Manual operation Slotted locking type (Tool required) Manual lock part Valve opening: Turn the screw 90 clockwise using a slotted screwdriver. The valve remains open even when the screwdriver is removed. Valve closing: Turn the screw 90 anticlockwise from a valve open position to its original position.

JSY1000/3000/5000 Series (Non Plug-in)

Used as a 3-Port Valve Manual Override Push-turn locking lever type [E type] Push down on the manual override by finger until it stops, and then turn it 90 clockwise. The manual override is then locked. To release it, turn it counterclockwise. If it is not turned, it can be operated the same way as the nonlocking push type.

VQ1000V-OMV0001

B A, B A VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 3.2 4.2 A B VQ1000 VQ2000 90 3.2 4.2 VQ1000 VQ2000 90 VQ1000 VQ2000 No.VQ1000V-OMV0001 8 - VQ1000 Series VQ1000 Series VQ1000 Series VQ1000 Series/ / / / 3,4,5 3,4,5 3,4,5 3,4,5 / / / / M M M M-03 03 03 03-3 3 3 3 IP65 IP65 IP65 IP65 IP65 IP65 Assy )O )M5 Assy (0.81.2Nm) )10 Assy VQ1000 VQ2000 Assy VVQ1000-82A-1 VVQ2000-82A-1 10

VQC5000Series

Locking type (Tool required) Push down the manual override button with a small flat head screwdriver until it stops, and turn it clockwise 90 to lock it. Turn it counterclockwise to release it. Locking type (Manual) Push down the manual override button with a small flat head screwdriver or with your finger until it stops, and turn it clockwise 90 to lock it.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

) RWw(n+90) RWr(n+91) RWw(n+91) IO-Link IO-Link : : Process data Process data Port 4 Port 4 RWr(n+9E) RWw(n+9E) RWr(n+9F) RWw(n+9F) n: Start address -45No.EX-OMW1003-A Details of diagnostic data System diagnosis Input register Bit No.

Air Preparation Equipment

O-ring (New) O-ring (Used) Gasket (New) Gasket (Used) Element (Used) Element (New) Case AMD80, 81, 90, 91, 100 y Replacement Parts e Element r Seal t Seal y Gasket u O-ring (Material: NBR) (Material: NBR) (Material: V#6500) (Material: NBR) IN OUT Model applicable filter Kit no. Kit no. Kit no. Kit no. Kit no. Qty. Qty. Qty. Qty. Qty.

1FluidProof pressure (MPa)Ambient and fluid temperatureOperating pressure range (MPa)Rotation time adjustment range (s/90)Shaft loadBearingPort locationPort sizeDeflection accuracyMSUA1Single vane90 ?

High precision, rotary table, Size 1, 3, 7, 20, Single vane, 90 and 180 available, Auto switch capable, CYL, ROTARY TABLE, SGL VANE, ACTUATOR, MSU ROTARY ACTUATOR W/TABLE, 1S, MSU OTHER SIZE RATING, 1.43000 lb, Model ?2Vane typeRotating angle ?

High precision, rotary table, Size 1, 3, 7, 20, Single vane, 90 and 180 available, Auto switch capable, CYL, ROTARY TABLE, SGL VANE, ACTUATOR, MSU ROTARY ACTUATOR W/TABLE, 1S, MSU OTHER SIZE RATING, .65087 lb, Model ?2Vane typeRotating angle ?

High precision, rotary table, Size 1, 3, 7, 20, Single vane, 90 and 180 available, Auto switch capable, CYL, ROTARY TABLE, SGL VANE, ACTUATOR, MSU ROTARY ACTUATOR W/TABLE, 1S, MSU OTHER SIZE RATING, .62055 lb, Model ?2Vane typeRotating angle ?

High precision, rotary table, Size 1, 3, 7, 20, Single vane, 90 and 180 available, Auto switch capable, CYL, ROTARY TABLE, SGL VANE, ACTUATOR, MSU ROTARY ACTUATOR W/TABLE, 1S, MSU OTHER SIZE RATING, 1.06097 lb, Model ?2Vane typeRotating angle ?

High precision, rotary table, Size 1, 3, 7, 20, Single vane, 90 and 180 available, Auto switch capable, CYL, ROTARY TABLE, SGL VANE, ACTUATOR, MSU ROTARY ACTUATOR W/TABLE, 1S, MSU OTHER SIZE RATING, .94483 lb, Model ?2Vane typeRotating angle ?

Rotary table/vane style, Size 1, 3, 7, 20, Single vane and double vane, 90 and 180 available, Auto switch capable, CYL, ROTARY TABLE, SGL VANE, ACTUATOR, MSU ROTARY ACTUATOR W/TABLE, 1S, MSU OTHER SIZE RATING, .46297 lb, Model ?3Vane typeRotating angle ?

Rotary table/vane style, Size 1, 3, 7, 20, Single vane and double vane, 90 and 180 available, Auto switch capable, CYL, ROTARY TABLE, SGL VANE, ACTUATOR, MSU ROTARY ACTUATOR W/TABLE, 1S, MSU OTHER SIZE RATING, 1.23258 lb, Model ?3Vane typeRotating angle ?

Rotary table/vane style, Size 1, 3, 7, 20, Single vane and double vane, 90 and 180 available, Auto switch capable, CYL, ROTARY TABLE, DBL VANE, ACTUATOR, MSU ROTARY ACTUATOR W/TABLE, 1D, MSU OTHER SIZE RATING, 1.32277 lb, Model ?3Vane typeRotating angle ?