Microspeed Cylinder

The chamber is set up on a Class 100 clean bench.

3 Port Solenoid Valve

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

Remodeled

Specifications Model MGP-Z MGP-AZ Basic type With air cushion Action Double acting Fluid Air Proof pressure 1.5MPa Maximum operating pressure 1.0MPa Minimum operating pressure 12, 16 0.12MPa 16 0.15MPa 20 to 100 0.1MPa 20 to 100 0.12MPa Ambient and fluid temperature -10 to 60 (No freezing 12 to 63 50 to 500mm/s 16 to 63 50 to 500mm/s Piston speed 80, 100 50 to 400mm/s 80, 100 50

99

0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-06

EXxx-OMS0026CN

Enable Val165000 4 ON 8 ON/OFF 3 Disable ON/OFF 0 83 9 ON/OFF Auto 10 HDX 10 BUS IN BUS IN 10 FDX 100 HDX 100 FDX Auto 10 HDX 11 BUS OUT BUS OUT 10 FDX 100 HDX 100 FDX 1Hold/Clear Via software 2PLC 330 4x1000 -44No.EX-OMS0026CN No.

Sensor Monitor

(Additional range) Relation between analog input and digital display Set value A B 0.002 0 kPa 2 kPa -0.1 0 kPa -101 kPa F0.1 -100 kPa 100 kPa 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa 1 0 MPa 1 MPa 2 0 MPa 2 MPa 5 0 MPa 5 MPa 10 0 MPa 10 MPa 20 0 MPa 20 MPa 25 0 MPa 25 MPa USEr Input value (setting) Input value (setting) Available display unit and minimum set value Pressure range Rated pressure

Fan Type Ionizer

Ground the F.G. cable with a resistance of 100 ohms or less +24V Brown +24VDC +24V Power supply Blue 0V 0V 24VDC F.G. Internal circuit Ground the F.G. cable with a resistance of 100 ohms or less OUTPUT PLC +24V INPUT Yellow Maintenance signal +24V Purple Error signal 12 - Doc. no. IZ*-OMT0002 3-2-2.

Information

63 84 30 8 44 22 14 60 77 60 11 M10 x 20 L 75, 100 10 to 50 91.5 CQ-C080 80 101.5 38 10 56 28 18 77 98 70 13.5 M12 x 30L 75, 100 101.5 10 to 50 110 120 CQ-C100 100 120 45 13 67 32 22 94 117 70 13.5 M12 x 30L 75, 100 The double clevis pin and retaining ring are not included.

PFxx-OMX0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) -95No.PF-OMX0002-B Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 -96No.PF-OMX0002-B Lead wire with M12 connector (ZS-37-A) Pin

Cylinder with lock

The amount of grease per cylinder of 100 mm stroke is shown in the table below. Roughly, one scoop with a forefinger is approximately 3g.

Cylinder with lock

The amount of grease per cylinder of 100 mm stroke is shown in the table below. Roughly, one scoop with a forefinger is approximately 3g.

CG5-S

Stainless Steel Cylinder Se ries CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order X165US TN CG5 L N 25 S R 100 Without Auto Switch X165US TN CDG5 L N 25 S 100 G5BAL R With Auto Switch Inch rod thread (Only available with "TN" port option. Currently only available on the 20 to 63mm bore sizes.)

PFxx-OMX0007

(Displays 0 when the value is (Displays 0 when the value is below 40 L/min) below 80 L/min) 50 to 1050 L/min 100 to 2100 L/min 5.0 0 to 5%F.S. (Displays 0 when the value is (Displays 0 when the value is below 50 L/min) below 100 L/min) 60 to 1050 L/min 120 to 2100 L/min 6.0 0 to 6%F.S.

3 Port Solenoid Valve SYJ300/500/700 Series

Specifications Applicable model Base mounted type (SYJ714R,SYJ724R) 30inHg~100(--100kPa~0.7) 22~100(0.15~0.7) External pilot pressure Main pressure Operating pressure range PSI(MPa) Note) Externally piloted body ported valves(SYJ7 2R) can only be used on the manifold.

LFE-OMY0008

24 5 5 100 500 9.5 2 2 100 200 3.8 [F30] [SAVE] 2 2 2 2 5 5 5 5 [F30] 2 5 OFF OFF 2 5 B OFF OFF OFF OFF 47 No.LFE*-OMY0008 [F32] () 1. 1. 1. 1.

Fieldbus system EtherNet/IP TM compatible SI unit

Enable Generates an error. 1 Ignores excess current per unit for 100 msec. after inrush.

Copper-free Actuators

200 Series/Variation Rotary table Series MSU Standard MSU 1.7-1 SMSUl MDSU With auto switch Rotary table Series MSQ MSQ Standard 1.6-1 SMSQl MSQ With auto switch MSQR With shock absorber 5.5-6 World Wide QS\E Support...

Dedicated Controller

To minimize the voltage drop, use 100/200 V AC and 24 V DC wires with the largest sectional areas possible and keep the wiring length as short as possible. 5. The 100/200 V AC wire must not be bundled with or arranged in close proximity with the input/output lines of control terminals or encoder signal lines. If possible, keep a 100 mm or larger distance from such lines. 6.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Closed center SQ1000 SQ1331 33 or less 0.16 0.26 0.58 0.15 0.20 0.64 25 or less Rubber seal 100 SQ1430 26 or less 0.14 0.14 0.60 0.14 0.12 0.58 20 or less Metal seal 100 Exhaust center SQ1431 33 or less 0.19 0.20 0.80 0.15 0.20 0.64 25 or less Rubber seal 100 SQ1530 26 or less 0.14 0.14 0.63 0.14 0.12 0.62 20 or less Metal seal 100 Pressure center Courtesy of Steven Engineering, Inc.-230

Compact Proportional Solenoid Valve Series PVQ

) 24 VDC 12 VDC SRP PVQ30 (2.3) SRF 120 ARX20 P = 0.35 MPa 100 P = 0.25 MPa VCHR Flow rate (l/min) 80 P = 0.18 MPa ITV 60 P = 0.1 MPa 40 IC 20 PVQ 0 0 0 20 40 40 80 60 120 80 160 100 200 120 240 140 280 160 320 180 360 200 400 Current (mA) 24 VDC 12 VDC VEF VEP VER PVQ30 (4.0) VEA 120 100 P = 0.12 MPa VY2 Flow rate (l/min) P = 0.08 MPa 80 VBA VBAT P = 0.06 MPa 60 AP100 40 P = 0.04 MPa