T/TIA

Min. bending radius (mm) 75 60 48 36 24 25 13 100 15 20 30 60 75 Caution Operating temperature 20 to +60C (Water: 0 to 40C) (No freezing) 1. Applicable for general industrial water. Please consult with SMC if using other kinds of fluid. Surge pressure must be under the max. operating pressure.

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flats 19 OUT Purge air for dehumidification IDG 30, 50, 60, 75, 100 Dimensions (mm) A IDG3, 5, 10, 20 A IN IDG1 Series IDG Series IDG Comes with pre-filter as detailed left + regulator AR.

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

High Vacuum L Type Valve

E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87

XL-OMV0002

D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-

Electrostatic Sensor Monitor

Connector for sensor lead wire ZS-28-C 1 pc. Panel mount adapter ZS-27-C With M3x5 L (2 pcs.) Panel mount adapter + Front protective cover ZS-27-D With M3x5 L (2 pcs.) Front protective cover ZS-27-01 -7No.SFOD-OMO0004-B Summary of Product parts Names of individual parts Output (OUT1) display (Green): Lit when OUT1 is ON. Output (OUT2) display (Red): Lit when OUT2 is ON.

LA-OMP0023

A B C D E F G H LAT3-50 50 75 6 25 150 140 54.5 70 14 - 3. 2 Card Motor Return to Origin The Card Motor uses an incremental type sensor (linear encoder) to detect the position of the table. Therefore, it is necessary to return the table to the Origin Position after the power has been switched on. There are three [Return to Origin Position] methods as described below.

XLG Series

66 2 11 55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62

Pressure Relief 3 Port Valve With Locking Holes

C Update the photos of Spacer and Spacer with bracket to the latest version. Update the Construction to the latest version.

PA3000/5000/PAX1000

to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature

AMX-OM-Q015E

C, prevent water droplets from entering the inlet port. (No freezing of the fluid) * Note 2. ANR indicates the flow rate converted to the value at 20 deg. C, under the atmospheric pressure and the state of relative humidity 65%. * Note 3. Includes 1 L/min [ANR] of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG3, 3H, 5, 5H). * Note 4.

AMX-OM-Q018E

C, prevent water droplets from entering the inlet port. (No freezing of the fluid) * Note 2. ANR indicates the flow rate converted to the value at 20 deg. C, under the atmospheric pressure and the state of relative humidity 65%. * Note 3. Includes 1 L/min [ANR] of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG3, 3H, 5, 5H). * Note 4.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

rate l/min (ANR) (SCFM) Note 3) 12 (0.42) 25 (0.88) 50 (1.8) 75 (2.6) 125 (44) Inlet air pressure MPa (psi) 0.7 (101) Inlet air temperature C (F) 25 (77) 25 (77) 25 (77) 1l/min (ANR) (0.03SCFM) {inlet air pressure at 0.7MPa} (101psi) Inlet air saturation temperature C (F) Ambient temperature C (F) Dew point indicator purge air flow rate Port size (nominal size B) 1/4, 3/8 1/8, 1/4 Weight

Process Pump Series PA3000/5000/PAX1000 Series PB1000

to 50 5 to 55 5 to 50 Outlet air atmospheric pressure dew point C Standard performance 20 Inlet air flow rate l/min (ANR) Note 2) 625 62 125 250 375 Outlet air flow rate l/min (ANR) 50 100 200 300 500 Purge air flow rate l/min (ANR) Note 3) 12 25 50 75 125 Inlet air pressure MPa 0.7 Inlet air temperature C 25 25 25 1l/min (ANR) {inlet air pressure at 0.7MPa} Inlet air saturation temperature

High Vacuum L Type Valve

E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87

AR Series Modular Type Regulator

size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge V V V V V G Round type pressure gauge (without limit indicator) V Round type pressure gauge (with limit indicator) V V V V M Round type pressure gauge (with color zone) V V V V + b Pressure gauge Note 4) c

WRF100

320 (mm) 3300.05 Arm type A B C T200 T240 T270 200 340 29 240 360 19 270 380 9 Note 1) This product does not include the limit switch.

MWB

[mm] Bore size Standard stroke Max. manufacturable stroke Stroke range q Stroke range w 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1000 Ordering Example of Cylinder Assembly 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175

Clamp Cylinder with Magnetic Field Resistant Auto Switch (Rod Mounting Type) ø 40, ø 50, ø 63 CKG1/CKP1 Series

Cylinder stroke (mm) Auto switch MK2T 40 50 63 50, 75, 100, 125, 150 50, 75, 100, 125, 150, 200 50, 75, 100, 125, 150, 200 Nil Without auto switch (built-in magnet) Without switch mounting rod Without auto switch (built-in magnet) With switch mounting rod CK1 CK1 P Built-in Standard (Strong) Magnet Cylinder Part No. CLK2 Select applicable auto switch models from the table below.

MNB

Standard Stroke DMaximum manufacturable stroke Bore size (mm) -X Standard stroke (mm) 20700 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 800 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500