Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

27 43.4 54 90 24 37.4 48 CRJB 1 23.5 35 12.5 14 9 4.5 21.1 22 8.5 7.5 6g6 14h9 M5 x 0.8 7.5 4.5 M5 x 0.8 6 15.5 13.5 16.5 5.9 32 5.5 180 30.5 50.4 61 11-6-9 10 Series CRJ Proper Auto Switch Mounting Position (Detection at rotation end) D-F9, D-M9 auto switch D-F8 auto switch Rotating angle Size Operating angle m Operating angle m Hysteresis angle Hysteresis angle B A 90 180 90 180 40 (

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

27 43.4 54 90 24 37.4 48 CRJB 1 23.5 35 12.5 14 9 4.5 21.1 22 8.5 7.5 6g6 14h9 M5 x 0.8 7.5 4.5 M5 x 0.8 6 15.5 13.5 16.5 5.9 32 5.5 180 30.5 50.4 61 11-6-9 10 Series CRJ Proper Auto Switch Mounting Position (Detection at rotation end) D-F9, D-M9 auto switch D-F8 auto switch Rotating angle Size Operating angle m Operating angle m Hysteresis angle Hysteresis angle B A 90 180 90 180 40 (

,

-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2

CRJ

EA) 25 1.4 32 5.5 (mm) EA EB HA Size CRJU05 CRJU 1 6.6 5.6 33.8 6.5 5.6 35.8 7.5 3.1 (mm) Rotation angle Q S JC JD BA BD A BH J BB D JB H BE BG BI JA SD BC DD UU N BF CB W CA Size 32.4 21.5 43 90 CRJB05 13.5 M4 x 0.7 5 30 11 19.5 20 M4 x 0.7 5g6 3.5 14.5 6.5 17.1 7 5.8 3.4 9.5 10h9 28 12.5 3.5 5.5 4.5 43.4 27 54 180 37.4 24 48 90 CRJB 1 16.5 M5 x 0.8 6 35 14 23.5 22 M5 x 0.8 6g6 4.5 15.5

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

EA) 25 1.4 32 5.5 (mm) EA EB HA Size CRJU05 CRJU 1 6.6 5.6 33.8 6.5 5.6 35.8 7.5 3.1 (mm) Rotation angle Q S JC JD BA BD A BH J BB D JB H BE BG BI JA SD BC DD UU N BF CB W CA Size 32.4 21.5 43 90 CRJB05 13.5 M4 x 0.7 5 30 11 19.5 20 M4 x 0.7 5g6 3.5 14.5 6.5 17.1 7 5.8 3.4 9.5 10h9 28 12.5 3.5 5.5 4.5 43.4 27 54 180 37.4 24 48 90 CRJB 1 16.5 M5 x 0.8 6 35 14 23.5 22 M5 x 0.8 6g6 4.5 15.5

Clean Rodless Cylinder Series CYP

Depth JK Inner cover holding screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6 69 M4 x 0.7 6 4.5 67 M5

Round Type Low Pressure Hydraulic Cylinder Series CH
M

36 44 M4 10 10 13 13 10 10 12 12 12 12 12 16 7 7 7 9 6.5 5.5 5.5 +0.058 0 +0.070 0 +0.070 0 M4 6.5 10 10 5.5 9 9 5.5 7 10 M5 M5 Y-type double knuckle joint Bracket pin Material: Carbon steel 20: Y-02 25: Y-03 Material: Rolled steel 32: Y-04A 40: Y-04B Material: Cast iron 2-D drill through RR1 C1 Chamfer RR1 C NDH10 NDH10 MM C1 Chamfer A B E1 E1 NX NZ NZ NX U1 A1 A1 U1 L1 L1 Part no.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2

IDX-OM-W026

K L M N P IDF22E R1 775 6001 IDF37E R11/2 855 6801 85 340 (698) (93) 46 25 290 623 (134) (405) 13 314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (968) 526 (250) 5195 13 500 75 7001 (455) (110) 36 50 R2 470 855 (128) IDF Series 6-3 6 2 IDX-OM-W026 6 6-4 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30 GFCI GFCI R

IDX-OM-W029

GFCI 5. 6. 7. 10-2 IDU22E/37E/55E-23-R 10A 30mA IDU75E-23-R 20A 30mA IDU22E/37E/55E-30-R 10A 30mA IDU75E-30-R 15A 30mA IDU Series 10-1 10 1 IDX-OM-W029 10 R 10-3 1) 2) 3) M5 9.5mm 2 1.25mm N L L ,N () 6.5mm () Connect to earth cable GFCI Connector width AC230V 6.5mm or less M5 Electrical entry 9.5mm 2 1.25mm L01,L02,L03 L01 L02 L03 L1 L2 PE L3 () M3 () 6.5mm

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-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2

HEC_W-E

J o 0001 Serial No. Manufacturing month o: January U: July P: February V: August Q: March W: September R: April X: October Manufacturing year S: May y: November J: 2005 T: June Z: December K: 2006 L: 2007 . . . 4-1 Unit Overview 4.3 Model No. label Model No. label is attached to the unit and indicated as shown below.

XL-OMV0002

H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6M5 x 0.8AS1201FG-M5-06AS1211FG-M5-06AS1301FG-M5-06AS1311FG-M5-06

Microspeed Cylinder

to 7.9 in/s) Piston speed Piston rod diameter 1 to 200mm/s (0.04 to 7.9 in/s) 12 M6 x 1.0 M10 x 1.25 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 Female threads Rod end threads Male threads Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port JIS class 2 +1.0 0 mm M5 x 0.8 (10-32 nominal) M5 x 0.8 (10-32 nominal) 11 Clean Room Series Microspeed Cylinder

Speed Controller: Standard Type In-line Type AS Series

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

MTS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 or less (Within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Piping port size M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40

Precision Cylinder Series MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

J. S. T. Manufacturing Co., Ltd.