240

force [%] Duty ratio [%] Continuous pushing time [minute] 70 100 LEY -X5 80 70 10 11LEFS 100 50 5 11LEJS LEPY10 (Basic) LEPY10L (Compact) 25A50 60 LEC 50 LEC S 40 Lead 5 (LEPY10K) Lead 5 (LEPY10LK) LEC SS-T 40 30 Force [N] Force [N] LEC Y 30 20 Motorless Lead 10 (LEPY10J) Lead 10 (LEPY10LJ) 20 10 LAT 10 LZ 0 0 60% 70% 80% 90% 100% 50% 60% 70% 80% 90% 100% LC3F2 Set value of pushing force

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load Weight Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

lbf N lbf N lbf (mm) N lbf N lbf IN 4 12 0.9 3.1 14 0.24 6 65 20 0.175 113 43 4.5 OUT 14.6 9.7 IN Spring return Spring extend 6 16 1.3 3.4 15 8 0.31 126 45 0.312 201 OUT 86 10.1 28.3 19.3 IN 6 20 1.3 3.4 15 10 0.39 204 78 0.487 314 OUT 141 17.5 45.9 31.7 IN 11 25 2.5 4.7 21 12 0.47 323 126 0.761 491 OUT 224 28.3 72.6 50.4 48 14 0.131 84.8 IN 31 3.1 10.8 7.0 3 12 0.7 2.2 10 0.24 6 OUT 85

Plug-in/Plug Lead: Single Unit

entry) 47.5 12 21 47.5 R2 R1 36 PE 21 4.4 4.4 12 2-Rc 1/8 (pilot EXH port) 29.5 29.5 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 83 L n Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) L n Dimensions 2 158 178 9 445 465 2 158 178 9 445 465 3 199 219 10 486 506 3 199 219 10 486 506 4 240 260

Direct Operated

/N.O. 1/8 to 1/2 2 to 10 10 to 50 N.C.

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

VDW

VVDW 2 0 4A VVDW 0 2 C 1 01 2 Series Series VX2 1 2 1 2 10 20 10 20 Thread type Rc G NPT Nil F N VXD Material C S Brass (C37) Stainless steel VXZ Series 30 OUT port size VVCW20-4A Stations VXE Symbol M5 01 Port size M5 1/8 (6A) 1 2 For 2 stations For 3 stations VXP Series 10 is available with M5 only.

MY1

10 1.

CYP

Throttle valves and dual speed controllers for recommended speed adjustment of CYP cylinders Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Operation Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01

MQQ

C D E F H RB I J K L M N OB Q RA W Y M4 x 0.7 4 14.5 7 5 M3 x 0.5 10 to 40 39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5 M4 x 0.7 10 to 60 44 34 8 8 36 5.5 16 47 7 10 25.5 5.4 9 M6 x 1.0 7 19.5 10 6 M5 x 0.8 10 to 60 47.5 37.5 10 10 40 5.5 20 52 8 10 28 5.4 9 M6 x 1.0 7 23 10 49.5 7 M6 x 1.0 10 to 50, 75, 100 54 42 12 12 45 8.5 25 60 4.5 10 12 34 5.5 9 M6 x 1.0 7 26 10

HRX-OM-W002

20 30 40 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] Circulating fluid temperature[] Circula Circulating fluid temperature[] 50Hz 60Hz 60Hz 50Hz 50Hz

Bernoulli Gripper

(Aluminum: 6.5 g, Stainless steel: 17.6 g) ZNC30 to 80: The weight value is for the basic type without a plug. *6 For pressure sensor details, refer to the PSE540 series in the Web Catalog and the Operation Manual. 6 ZNC Series Lifting Force ZNC20m ZNC30m ZNC40m 12 16 6 14 10 5 12 8 Lifting force [N] Lifting force [N] Lifting force [N] 4 10 6 8 3 6 4 2 4 2 1 2 0 0 0 0 0.6 0.5 0.4 0.3 0.2

EX120/121/122

L dimension L dimension No. 6 7 8 2 3 4 5 1 0 7 185.5 0 98 2 3 4 5 6 7 1 0 0 8 198 1 110.5 6 7 8 4 5 2 3 1 1 9 210.5 123 2 M12 input block (n) 6 7 8 3 4 5 2 2 10 223 135.5 3 L dimensions 6 7 8 9 5 4 3 11 235.5 4 148 9 10 8 7 6 4 12 248 5 160.5 Connector type For M (m + n = 2 to 8) 10 8 9 7 5 173 6 10 11 9 6 11 10 7 12 8 Connector type For T (n = 1 to 8) 1686 Decentralized Serial Wiring (GW

Mechanically Jointed Rodless Cylinder Series MY2

10 10 MY3M MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Mass/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40 Load mass kg Load mass kg Load mass kg 10 10 10 MY2HT25 MY2HT25 MY2HT25 5 5 5 4 4 4 MY2HT16

Floating Joint

JS20, 32, 40, 63 Center of sphere M M U U D J F B E G P A R H (mm) Max. thread depth P Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) Weight (kg) M A B C D E F G H J Model JS10-4-070 JS16-5-080 8.5 0.5 17 0.01 14.4 M4 x 0.7 9.5 12 4 7 4.7 80 4 1.5 26 12 0.5 23 19 0.02 M5 x 0.8 13.5 16 6 10 5.8 210 5 2 34.5 JS20-8-125 JS32-10-125 15.5 0.5 29.9

Programless controller Step motor (servo 24 VDC)

LEP6 LEP10L LEP10 J K J K J K Low 7 14 12 24 12.5 25 Pushing force [N] Middle 8.5 17 16 32 19 37.5 High 10 20 20 40 25 50 Pushing speed [mm/s] 20 10 20 10 20 10 Pushing force accuracy is 30%F.S. for the LEP6 and 25%F.S. for the LEP10. Refer to the operation manual of the electric actuator for details.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

Shock Absorbers and Rate Controls

(I$odell A A I D E t H WT $tl oEfio.l il{s} 57.0 6i.0 l(10 x 1.0 3.0 N/A 8.6 49.4 8.6 10.? N/A r{/A N/A 0 t.t5rir(B) 8 t . 8 91.1 Ml2 x 1.0 3.3 l.l/A 8,6 71.4 0.9 14.2 N/A .0 9.7 (r.R)0Efl.251rr(r)8r.8 9 1 . ? M l { x 1 . 5 J.J /A 1.2 71.4 0.9 t4.2 N/A r2.0 12.1 (r.R)0Efti.35rJr(Bl 100,6 0.7 l l 6 x 1 . 5 4.0 N/A ).2 87.4 1.2 t4.5 0.5 t4.0 12.7 l0 [.5t](B] 9E_6 I t 0,5 [!

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

66 R 3 1 P Dimensions n: Stations (Max. 20 stations) Equation L1=16n+10 L2=16n+20 L n 2 42 52 75 85.5 18 298 308 337.5 348 19 314 324 350 360.5 20 330 340 362.5 373 11 186 196 225 235.5 12 202 212 237.5 248 13 218 228 250 260.5 14 234 244 275 285.5 15 250 260 287.5 298 16 266 276 300 310.5 17 282 292 312.5 323 3 58 68 87.5 98 4 74 84 112.5 123 5 90 100 125 135.5 6 106 116 137.5 148 7 122

IDX-OM-W010

2 1 L N PE RUNNING ALARM 3 TB 2 1 L N PE MC MC TDR TDR ILS TDR ILS TDR MC MC OLR OLR MC MC MC CM MC CM PTC PTC PRS C11 FM FM PRS P P TDR MC TDR MC IDF11E-10-T IDF11E-20-T AC200/200,220V (50/60Hz) AC100/100,110V (50/60Hz) PE 2 RUNNING ALARM 3 1 N L RUNNING ALARM 3 1 N L PE 2 TB TB MC MC TDR ILS TDR ILS TDR MC TDR MC OLR OLR MC MC CM C01 CM MC PTC MC PTC C11 FM C11 FM PRS PRS P P MC TDR MC