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P O Flow Characteristics/Operating Principles P O, O Construction Detail .. PO Dimensions P O Installation PO Power Amp.: Series VEA Model / Spe c i f i c a t i o n s . . . . . P O H o w t o O r d e r . . . . . . . . . P @ Dimensions/ Handling Instructions . . . . . P@, @, @ External Connections P@, @ Features and Functions P@ Sample Applications . . .

B AT IDF IDU IDF FS C IDFA IDFA F IDFB M IDH N ID L P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868

Seal kits consist of items 12, 13, 14 and 16 contained in one kit, and can be ordered using the order number for each respective tube bore size. 13 Series MB1W Standard Type MM MM G VW 2-Rc(PT)P G Cushion valve Port Basic type/(B) E D D E e MB Effective thread Effective thread 13 f 16 l h 9 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot MM 2-Rc(PT)P G G MM

A B C D E F G H P U Load (kN) Weight (g) Angle Bore size (mm) JA30-10-125 32 70 2.5 0.5 9 8 5 8 24 19.5 49.5 M10 x 1.25 17 JA40-12-125 40 160 4.4 0.75 13 11 6 11 31 20 60 M12 x 1.25 22 5 27 JA50-16-150 50, 63 300 11 1.0 15 13.5 7.5 14 41 22 71.5 M16 x 1.5 JAH50-20-150 80, 100 1080 18 2.0 18 16 32 24 59.5 11.5 28 31 101 M20 x 1.5 CJ1 CJP CJ2 CM2 CG1 Courtesy of Steven Engineering, Inc.

Code D33 SST Sensor Dual Module Code D44 Namur Sensor Dual Module Code I02 P+F NJ2-12GK-SN Code I09 P+F NCB2-12GM35-N0 Code I32 Omron E2E-X2Y1 Code I41 P+F NJ4-12GK-SN Code I45 P+F NJ3-18GK-S1N Code I56 IFC 2002-ARKG/UP Code K05 Omron D2VW-5 Code K06 Omron D2VW-01 Code B06 Omron D2VW-01 (ND9100F/P, ND9200F/P and ND9300F/P only) 2.5 Recycling and disposal WARNING (ND9000, ND7000): During automatic

Brow n Pow er suppl y N ot e) The w i re col or i s f or w hen opt i onal cabl e i s used.

Real-time switch output Unit switching Hysteresis mode ON YES Accumulated flow l Display Real-time flow rate l/min OFF P-1 P-2 Real-time flow rate GPM gal (US) "P" Window comparator mode H : Hysteresis GPM = gal (US)/min H H Note) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Made to order options (see Page 55) Low temperatureresistant (XB6) resistant Modification of rod end auto switch Page P 8 P 1 7 P32 fechnical Data Auto switch guide P 4 6 P 3 8 ?

Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure P.460 FGD Vessel Series P.461 FGE Vessel Series P.463 FGET Vessel Series P.466 FGG Vessel Series P.468 FGA Vessel Series P.472 FGB Vessel Series P.476 FGC Vessel Series P.478 FGF Bag Filter P.480 FGH High Precision Filter for Liquids P.482 FQ1 Filter for Cleaning Fluid/Quick Change Filter P.483 FN1FN4

Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure P.460 FGD Vessel Series P.461 FGE Vessel Series P.463 FGET Vessel Series P.466 FGG Vessel Series P.468 FGA Vessel Series P.472 FGB Vessel Series P.476 FGC Vessel Series P.478 FGF Bag Filter P.480 FGH High Precision Filter for Liquids P.482 FQ1 Filter for Cleaning Fluid/Quick Change Filter P.483 FN1FN4

Made to order options (see Page 55) Low temperatureresistant (XB6) resistant Modification of rod end auto switch Page P 8 P 1 7 P32 fechnical Data Auto switch guide P 4 6 P 3 8 ?

-www.stevenengineering.com SYA3220-M5 M5 x 0.8 (A, B port) 1.3 (Ventilation hole) 2 1.5 die-cast hole (For manifold gasket positioning) M5 x 0.8 (P , EA, EB port) 3 position closed center/exhaust center/pressure center SYA3 20(-F2) C4, N3 C6, N7 3 4 5 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 2.2 (For manifold mounting) Manual override

Refer to dimensions on p.4.6-11 and p.4.612 for details. Chrome treatment (Epoxy coating on inner surface) Housing Body q w e Tempered glass Sight glass AMD850 is aluminum casting Replacement Parts AMD450 Part No. Description Material No.

Tightening torque for piping Body class Torque (Nm) 2 3 4 5 6 1.5 to 2.0 3.0 to 3.5 7.5 to 9.0 11.0 to 13.0 5.5 to 6.0 17-5-66 5 Series LVQ Integral Fitting Type (Hyper Fittings) Construction Double acting type N.O. type Basic type N.C. type PB PB q q q VC PA PA VDW e e e VQ VX2 A B A B SMC SMC VX A A B A B B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

M12 lead wire with connector e-con connector Part no. Qty. Lead wire length Part no. Qty. ZS-29-A 1 ZS-28-CA-4 1 3 m OUT2 OUT1 U P SET DOWN e-con connector M12 lead wire with connector PF2A7 (H) PF2W7 (T) PF2A20 PF2W20 M12 lead wire with connector PF2A5 PF2W5 (T) In addition to the connectors shown above, those listed below (e-con) can be connected.

Brow n Pow er suppl y N ot e) The w i re col or i s f or w hen opt i onal cabl e i s used.

Brow n Pow er suppl y N ot e) The w i re col or i s f or w hen opt i onal cabl e i s used.