Filter Regulator AW30, 40

Note 2) Drain guide is G1/4 (applicable to AW30 and 40).

Vacuum Equipment

-www.stevenengineering.com -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Pad diameter (mm) Pad diameter (mm) Pad diameter (mm) 6 6 4 4 2 2 Lifting force (N) Lifting force (N) Selection Graph (1)-2 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (50 to 250) Selection Graph (2)-2 Pad Diameter Selection Graph by Lifting Force Vertical Lifting

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20

MXF

M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8

CJ2

2 !3 !

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Selection of air quality by purpose For these cases, degree of quality is 15 4 +3 5 specified as 1, 4, and 2 respectively. 40 5 +7 25 Refer to Guide (1). Refer to Guide (2). Refer to Guide (3). Refer to below piping system chart. Refer to Guide (4) page 14-14-4.

AC

How To Order Lubricator Series AL20 to 40 AL 20 N 02 B X480 Z 2 Lubricator With External Epoxy Coating, Stainless Fasteners Body Size Symbol 20 30 40 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Bowl Applicable Body Size 20 30, 40 NPT Threads Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Port Size Symbol 02 03 04 Accessories Applicable Body Size 20 30 40 Port

Series AC Epoxy Coated F.R.L.

How To Order Lubricator Series AL20 to 40 AL 20 N 02 B X480 Z 2 Lubricator With External Epoxy Coating, Stainless Fasteners Body Size Symbol 20 30 40 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Bowl Applicable Body Size 20 30, 40 NPT Threads Description Metal Bowl Metal Bowl with Sight Glass Symbol 2 8 Port Size Symbol 02 03 04 Accessories Applicable Body Size 20 30 40 Port

3 Port Solenoid Valve/

) (M12 connector) 2 x 1/2" [3(R) port] 67 6.5 Applicable cable O.D. 3.5 to 7 2 x 6.2 (For mounting) G1/2 Channel 2 113.5 41.5 36 94.5 77.5 Channel 1 36 21 9.5 (88.9) 16 18 (14) (Max. 10) 224.2 117.3 27.2 (70.7) A 124.8 99 View A For M12 connector 36 18 e w Vent port (6.2) 1/2" [1(P) port] 40 r Pin number (22.9) (With check valve) q 88.9 80 224.8 11 Safety Standard ISO13849-1 Certied 3 Port

Speed Controller with One-touch Fitting

2 1/2 4 Fluororesin (TLM, TILM Series) (TH, TIH Series) 1/8 2 R 1/4 3/8 3 NPT 1/2 4 2 1/8 2 2 2 1/4 Gasket seal Uni Brass/Steel wire 1/4 3 3/8 2 1/2 4 1 Without sealant type can be selected as a standard option. 2 Universal type is not available.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350

LX Series Compact Electric Actuators

1 0 E : t 50 8 40 6 30 9 4 20 2 l 0 n E .1! o 0.5 1 15 2 2.5 3 Load (kg) a How to use the graph 1. lt work overhangs to the direction of "L1" or "L2'. 70% of appt|cabte toad weight shown in the graph is rhe upper timit. 2. The graph above shows lhe case of horizonlal orientation of actLrator. ll using in verlical, static moment should NOT exceed slatic moment attowanc. 3.

PF2D

(In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.)

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Series KP/KPQ/KPG

1) Fluid Maximum operating pressure at 20C (68F) 0.7MPa (101 psi) Note 2) Min. bending radius mm 10 20 25 30 40 Burst pressure Refer to the burst pressure characteristics curve.

Series KP/KPQ/KPG

1) Fluid Maximum operating pressure at 20C (68F) 0.7MPa (101 psi) Note 2) Min. bending radius mm 10 20 25 30 40 Burst pressure Refer to the burst pressure characteristics curve.

SQ1000/2000

BS+ BDH BSFG 24V 0V COMM BDL (108.5) Approx. 10 101 68 34 10 4.6 A A B A B A A 2.PUSH 2.PUSH 1.TURN 1.TURN B 28 5.5 35 74.5 ADDRESS No. 13 2-M4 clamp screw EXH outlet Approx. 9 1.5 D side U side Stations 1 2 3 4 5 6 7 8 n Approx. 9 C8: EXH port For top ported C8: SUP port 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 81.5 67 2n-C3, C4, C6, M5 (A, B port) C3:

10

1 2 2 1 2 m 2 1 2 1 2 Kinetic energy E1 m 2 RB T S R Thrust energy E2 m g S F S + m g S F S m g S Absorbed energy E E1 + E2 E1 + E2 E1 + E2 E1 + E2 Note 2) E 2 2 E 2 2 E 2 2 E 2 2 Equivalent mass Me Note 1) This is the momentary speed at which an object is impacting against a shock absorber.

Series MXP Precision Air Slide Table

, 3.5 deep 2-M20.4, 3 deep For magnet mounting For rail mounting 8 5.7 3.5 6-M40.7 20 20 4.5 deep L (mm) Model G H J K L M S V W Z MXP12-15 10 40 68 22 24 29 15 59 55 76 MXP12-25 30 60 98 40 42 49 25 89 75 106 169 Series MXP Precision Air Slide Table Dimensions 16 MXP16 Scale: 50% Z 3 2-M50.8, 8 deep V K 6.5 5 G 2-M40.7, 6 deep Max. 4 11 M Stroke:S MXP16-20 Piping port A Width across flats

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

VQ550 Indicator light Indicator light 214 121.8 195 (200.5) 91.5 59.5 105.8 (Port A) 17.5 13.5 (Port B ) 2 2 73 (78.5) 122 106 59.5 (Port A) 17.5 13.5 (Port B) 2 4 SMC SMC 2 4 A B 40 53 66 162 50 41 37 31.5 18 A B A B 53 66 40 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 5 1 3 12 14 Manual override 35 53 2-6.5 Mounting hole G1/2 Electrical entry 18 31.5 37 41 50 98 G1/2 Electrical