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AL4 at 1 sec. and Cooling Output is 100 70%, the output will be 0.7 sec. ON and 0.3 sec.

Red LERR LED is flashing 1 3 4 1 2 Content Err (Default setting) 5 2.5 Mbps 625 kbps Content 5 Mbps CC-Link version Node number 2.00 2.00 2.00 2.00 1.10 1.10 1.10 1.10 64 1 : 8 7 9 6 Number of occupied nodes x10 x1 0 5 4 4 Pin number 1 Address 2 3 5 3 1 4 2 3 2 1 1 4 3 2 1 (2) (3) Content 8 7 9 6 6 Number of occupied nodes SI unit output data size 4 byte (Default setting) 0 5 4 1 2 3 Signal

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

(mm) H I J K L B U Z A N O P S C D E F M Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 65 31.5 14 82 5.5 9 depth 7 Rc 1/8 58.5 12 16 45 20 34 40 M10 x 1.5 69 5 14 8.5 67 35 14 84 5.5 9 depth 7 Rc 1/8 66 12 16 52 22 40 50 M12 x 1.75 86 7 18 11 76 41 19 98 6.6 11 depth 8 Rc 1/4 80 15 20 64 25 50 63 M12 x 1.75 103 7 18 11 80 47.5 19 102 9 14 depth 10.5 Rc 1/4 93 15 20 77 27 60 80 M16 x 2 132 6 22

They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)1), and other safety regulations. Safety Instructions 1) ISO 4414: Pneumatic fluid power General rules relating to systems. ISO 4413: Hydraulic fluid power General rules relating to systems. IEC 60204-1: Safety of machinery Electrical equipment of machines.

J K l .. oN D P Q W X Z ..J (mm) 50 89 55.5 26 20 64 10.5 M1Bxl .5 B6 7 17 33.5 50 6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread

Do not use water or steam since it leads to rusting of the frame. 1 3rd digit : Data length Temp.control Turn ON Main power switch again Err1 pump and fan 7 or 8 7: 7 bit, 8: 8 bit stop 9.2 General Maintenance 4th digit : BCC check High temp. sensor value Occurs when the temperature sensor breaks. Sets the proportional band for heating.

consult with SMC. 2 15A 1 2 15 14 3 20 16 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Flange Electrical entry/With light/surge voltage suppressor 2 50A 33 Symbol Electrical entry Valve size 1 to 4 Valve size 5 to 7 7 50 2B 50F 33 50 Flange G GS E EZ T TZ D DZ Grommet Grommet

35.8 A Load Load 40 UNIT 12 to 24VDC + RESET SET PFW30(-M) Panel fitting dimensions 8-M3 3 x 7.2 (= 21.6) 36 +0.5 0 6.4 Sensor 1 2 3 4 Blue Brown Black N.C. 1 2 3 4 +0.5 0 19.4 36 5 6 7 8 5 6 7 8 OUT1 OUT2 Load Load 12 to 24VDC + The applicable panel thickness is 1 to 3.2mm.

No.XG*-OMV0028-A / / XGT312-50336-** XGT313-50336-** 23 1. 4 2. 5 3. 68 4. 910 5. 11 6. 11 7. 12 1315 1 - 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

4 byte (Default setting) 6 : : OFF OFF OFF ON ON ON 1 2 3 4 5 6 7 8 7 8 1 byte 2 byte 3 byte : : ON End plate bracket (EX600-ZMA2) OFF OFF OFF ON ON ON : : Remote Control mode *2 DHCP mode *1 192.168.1.254 192.168.0.254 192.168.1.1 192.168.0.1 IP address Diagnostic size set for the input : : 5 6 byte 4 byte 0 byte EtherNet/IPTM status Refer to the SMC website (URL http://www.smcworld.com

k7 NP 120 7 PP+ 1 k7 PP 120 7 mPulse signal output of positioning unit is open collector output Pulse signal power supply Positioning unit Inside of the driver NP+ 1 k7 NP Note 4) Connect the current limit resistor R in series to correspond to the pulse signal voltage. 120 7 Current limit resistor R Note 4) PP+ 1 k7 Pulse signal power supply voltage 24 VDCp10% 5 VDCp5% Current limit resistor

KRMC-06-10 KRMC-06-6 6 6 40.5 2.5 7 7 8 8 3 4 10 66.5 6 48 10 79 KRMC-08-10 KRMC-08-6 8 4.5 Refer to page 15-3-5 for spatter cover 1 and 2. 15-3-7 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by labels of "Caution", "Warning" or "Danger".

2 3/4 1 11/4 11/2 1/4 OUT ARX20 VCH41(N.C.)

Ex.mCG:23R Body slzo 1 0 M 5 20_ya 3 0 _ % 10-tA 50-.A 6 0 1 Polt thread [ NPT Nll Rc (PT) F P F Series NAL Lubricator NAL5qD.6{X'O Flow Characteristics Gonstruction./Parts List NAL5flXh6IXXI tlaln Part8 O I Body I Platinum silver pairiting a I HoGing I Alrminum die cas'ting Parts List 1 1 1 7 1 0 Attachments 3/a'1 Allows for ease of installation and maintenance. Gffi@ NE60.

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 56 Series IL201/211/220 Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5