Series: 2 (VQZ200), Stations: 8 Stations, Port Size: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 10 Stations, Port Size: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 12 Stations, Port Size: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 14 Stations, Port Size: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 13 Stations, Port Size: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 11 Stations, Port Size: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 7 Stations, Port Size: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 9 Stations, Port Size: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 16 Stations, Port Size: 01T (NPTF1/8)

Series: 2 (VQZ200), Stations: 6 Stations, Port Size: 01T (NPTF1/8), Option: D0 (DIN Rail Mount w/o DIN Rail)

Series: 2 (VQZ200), Stations: 8 Stations, Port Size: 01T (NPTF1/8), Option: D0 (DIN Rail Mount w/o DIN Rail)

Series: 2 (VQZ200), Stations: 10 Stations, Port Size: 01T (NPTF1/8), Option: D0 (DIN Rail Mount w/o DIN Rail)

Series: 2 (VQZ200), Stations: 12 Stations, Port Size: 01T (NPTF1/8), Option: D0 (DIN Rail Mount w/o DIN Rail)

Series: 2 (VQZ200), Stations: 11 Stations, Port Size: 01T (NPTF1/8), Option: D (DIN Rail Mounting)

Environment

15.9 87 101 to 500 Body Bottom Tapped [mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 Note 1) Range within which the rod can move.

Table of Contents

300 200 0.5 10 20 30 31 50 100 101 300 200 DStroke (mm) Stroke (mm) -X MGPL32 to 63 MGPL32 to 63 50 50 20Data Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load

MGP

200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 100 Load weight m (kg)

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Vacuum Pressure Switch ZQ1-ZS A Vacuum pressure switch specifications Check valve Note 3) EA EB EC EE FA FB FC FE 0 to 101 kPa/NPN open collector 2 outputs, with suction filter 0 to 101 kPa/PNP open collector 2 outputs, with suction filter 0 to 101 kPa/NPN open collector 1 output + analog voltage, with suction filter 0 to 101 kPa/PNP open collector 1 output + analog voltage, with suction

Part Number Description: ASSY MANIFOLD10-STA.'   Product Line: V   Product Line Description: VALVE   Family Code: 351   Family Description: VV*FS* MANIFOLD VFS SERIES   Class Code: PM   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

PSE530/200

Pressure Sensor/Sensor Range ZSM Sensor supply pressure 101 to 101 kPa (Compound pressure) (Vacuum) (Low pressure) (High pressure) PF2 PSE533 10 to 101 kPa 10 to 101 kPa 0.1 to 1 MPa Regulating pressure range PSE531 PSE532 PSE530 Applicable pressure sensor IF SET If the controller is equipped with a unit switching function, unit setting can be changed.