3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Manual override (29.3) 104 D side U side Stations 1 2 3 4 5 n 2-M50.8(E port) 2-M50.8(P port) 42.9 A A (8.5) 20 5 15 (7.5) 5 (A port) n-M50.8 15 P=10 Dimensions n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 63 83 112.5 123 3 62 73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153

Lubricator Series AL10 to 60

10.5 10.5 13 13 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specifications Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level gauge B 186 220 220 294 312 With drain cock B 85 123 153

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

n x 6.6 6H9 ( +0.030 0 ) depth 66 7 60 64 76 7 6H9 (+0.030 0 ) depth 66 6H9 (+0.030 0 ) depth 66 11 Motor mounting position: Right side parallel 153 G 70 60 64 *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

Title not found

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

CG1

Description Material 25 PDU-10Z PPD-25-19 CM-025-16-124 32 PDU-12LZ PPD-32 CM-032-16-126 40 PDU-16Z PPD-40 CM-040-16-127 50 63 80 PDU-25Z PPD-80 CM-080-16-152 100 PDU-30Z PPD-100 CM-100-16-153 Rod seal Piston seal Tube gasket NBR NBR NBR PDU-20Z PDU-20Z @4 @5 @6 PPD-50 CM-050-16-128 PPD-63 CM-063-16-129 With air cushion (Parts @4 to @6 are the same as rubber bumper style.)

XLGR Series

Dimensions E C D E E L (Width across flats) M (Width across flats) M8 (KF Flange) (K Flange) Fn Fd C Detail of (a) (a) M Rc1/8 J H K B A G A Model A B C D E Fn Fd XLGR-80*-1* 90 250 117 45.5 38.5 114 110 XLGR-100*-1* 108 270.5 154 55 38.5 130 102 XLGR-160*-1* 138 339 200 65 38.5 180 153 Model G H J K L M XLGR-80*-1* 83 105 44 9 13 4 XLGR-100*-1* 102 92 58 9 13 4 XLGR-160*-1* 153 124 62 12.5

Series H, DL, L, LL Self-align Fittings

-01 44 66 63 14 17 12 16 9 55.9 57.9 52.9 21.8 56.8 58.5 57 12 10 14 1 4 3 8 1 4 8 LL08-02 LL08-03 LL10-02 68 77 89 16 19 14 17 14 23.3 56.9 58.9 58.9 59 60.7 62.7 14 12 17 3 8 1 2 1 4 3 8 1 2 Reference dimensions after R(PT) thread installation. 10 LL10-03 LL10-04 LL12-02 98 117 121 LL12-03 LL12-04 17 22 17 60.9 63.9 62.9 63.9 66.9 31 23.3 64.4 65.5 66.7 67.4 71.4 17 14 19 17 12 19 129 153

Aluminum High Vacuum Angle Valve

0 2-1 o 0.2 153 188 q 190 138 O-ring Part No.

PF-OMM0004_C

K L N P Q Q PF3W704S 104 50 63.6(Max.68.6) 70.2 34 58.5 18 13.6 2.7 10 19 6 PF3W720S 112 54 63.6(Max.68.6) 74.2 34 62.5 18 13.6 2.7 10 19 6 PF3W740S 142 71 75.25(Max.81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W704S 56.5 22 PF3W720S 60.5 22 PF3W740S 78 30 -84No.PF-OMM0004-D PF3W704/720/740(+) A AA D K S PF3W704S--T 115 50 81.2 69.5 67.5 PF3W720S--T 123 54 85.2 73.5 71.5 PF3W740S--T 153

Rubber seal 5 Port Solenoid Valve Series SYJ7000

96 109 Body ported Base mounted 0.32 0.53 1.6 2.2 0.33 0.4 2 position Double C6 (One-touch 0.33 0.49 1.4 1.1 1.8 [0.78] 1.9 2.5 [1.3] 1.6 0.27 0.37 0.35 0.27 Closed center 1/8 SYJ720--C6 fitting for 6) 0.32[0.54] 0.30 0.61 [0.38] 0.39 Exhaust center 129 121 163 119 3 position 0.36 [0.40] 0.45 [0.22] Pressure center Single 101 119 97 111 98 153 96 109 2 position 2.0 2.3 0.34 0.61 0.39 0.52

VEX1

VEX1201-5DOZ-G4 Regulator valve, External pilot solenoid valve, 24V DC, DIN connector (without connector), with indicator light and surge voltage suppressor, Option...With pressure gauge (1) VEX1-171 Blank plate Note 1) In case of manifold, pressure gauge: Only G27-10-01(O.D.26) VEX Dimensions VVEX2-1-1-02 Station AN AMC n n: Station Calculation L1=31Xn+29 L2=31Xn+14 2 91 76 3 122 107 4 153

CP95

16 10 130 10 12 142 26 48 7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145 12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153

MGC

100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 50 75 150 115 82.5 45 194 42 M10 200 95 12 11 135 115 210 190 19 23 142 Bore size (mm) W WH W V U T S Z R Y Q X O P 20 25 32 40 50 30 23 36 40 86 12 26 140 12 80 21 30 M6 x 1 M5 x 0.8 30 25 44 47 98 13 31 153

E-P HYREG ® Series VY1 1

Stations Dimension 2 3 4 5 6 123 169 215 261 307 107 153 199 245 291 L1 L2 14-10-17

ASR

18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R1/4 49.2 55.8 50.8 25.9 49.8 44.8 18.8 120 143 21 32.6 59 10 122 146 22 34.4 60.8 20.9 12 137 160 17 36.5 62.9 6 140 163 18.5 37.5 63.9 18.5 8 67.3 25.3 24.3 21 R3/8 49.2 57.4 52.4 25.9 51 46 20 130 153 21 32.6 59 10 133 156 22 34.4 60.8 20.9 12 219 237 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R3/8 65.5 67.6 60.1 27.7 61.2 53.7 20.6 221 239 22 34.4 64.6

VXR21/22/23

136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153

Guide Table Series MGF

Theoretical Output OUT (N) IN (N) (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Rod size (mm) 1.0 0.9 0.8 0.7 0.6 0.2 0.5 0.4 0.3 1256 1130 1004 879 753 251 628 502 1256 OUT 376 40 25 765 688 612 535 459 153 382 306 765 IN 229 3117 2805 2493 2182 1870 623 1558 1246 3117 OUT 935 63 36 2099 1889 1679 1469 1259 419 1049 839 2099 IN 629 7853 7067 6282 5497 4711

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

P1 approx. 0.68MPa for orifice 4 (VCS21) is P1 approx. 0.40MPa for orifice 5 (VCS21) is P1 approx. 0.29MPa The holding heat differs somewhat depending on the pressure P1, but at 25kg/h it is approximately 16000kcal/h. [664] (179) 0.9 Downstream pressure of valve (P2) MPa 0.85 0.9 0.95 [662] (174) 0.8 [661] (170) 0.65 0.7 0.75 0.8 0.7 Subsonic [660] (164) 0.6 Critical pressure 0.6 [658] (153

5 Port Solenoid Valve, Series VQC

For each additional input block, add 21mm.) n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 73 192 212.5 223 2 89 208 237.5 248 3 105 224 250 260.5 4 121 240 262.5 273 5 137 256 275 285.5 6 153 272 287.5 298 7 169 288 312.5 323 8 185 304 325 335.5 9 201 320 337.5 348 10 217 336 362.5 373 11 233 352 375 385.5 12 249 368 387.5 398 13 265 384 400 410.5 14 281 400 425 435.5 15 297 416 437.5

Cylinder with Lock

245 45 250 63 10 50 12 5.5 80 264.5 50 269.5 80 12 63 14 6.5 100 320 63 325 100 14.5 71 16 6.5 120 343.5 75 353.5 Double Acting, Double Rod Flange Rod side: CP96NF 4 x FB R E2 TF UF W MF Head side: CP96NG ZF + Stroke MF [mm] Bore size E2 FB MF R TF UF W ZF 32 50 7 10 32 64 79 16 188 40 55 9 10 36 72 90 20 211 50 70 9 12 45 90 110 25 230 63 80 9 12 50 100 120 25 249.5 80 100 12 16 63 126 153