Series VCS

Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

AC Servo Motor Driver (MECHATROLINK-II type)

To Travel amount per 1 command pulse (P=1m) by actuator lead (L = 6mm) and pulley ratio (n1/n2 = 1/1) = 1 1048576 1 1000 Pn210 Pn20E 1 6 1/1 = 1048576 Pn210 Pn20E 6 1000 1 = 1048576 Pn210 Pn20E 6000 1 = 65536 Pn210 Pn20E 375 1 *1 For pulley ratio, refer to Lead of LECYM Operation Manual (Simplified Edition),section 4.4.1.

AC Servo Motor Driver (MECHATROLINK-III type)

To Travel amount per 1 command pulse (P=1m) by actuator lead (L = 6mm) and pulley ratio (n1/n2 = 1/1) = 1 1048576 1 1000 Pn210 Pn20E 1 6 1/1 = 1048576 Pn210 Pn20E 6 1000 1 = 1048576 Pn210 Pn20E 6000 1 = 65536 Pn210 Pn20E 375 1 *1 For pulley ratio, refer to Lead of LECYU Operation Manual (Simplified Edition),section 4.4.1.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

= 10.5 13.3 24 24 16.2 16.2 17 36.7 34 34 B 2 B 2 B 2 B 2 B 2 2 B 2 2 B 2 B B R B 2 PE R 3 3 R 3 R 3 1 P 1 P P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 4-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 (L4) Applicable connector: 20 pin MIL type with

ISO Standard Hydraulic Cylinder

S + Stroke ZZ + Stroke H CB Stroke range Bore size (mm) B CD F A D CB G C E GA J NB S CX GB L NA P PJ RR MM MA K H 40 52 14 64 8 25 to 800 M6 x 1 M16 x 1.5 46 29 12 22 22 19 40 34 33 107 20 16 19 3/8 58 17 19 47 50 25 to 800 65 64 M8 x 1 M20 x 1.5 46.5 28.5 14 15 28 28 24 50 42 34 108 20 16 19 3/8 58 17 25 11 59 +0.043 0 63 25 to 800 77 93 M8 x 1 M27 x 2 46 33 20 19 36 36 30 58 50 31 115

IDX-OM-W014

13-5 IDU3E/4E-10-T IDU3E/4E/6E-20/23-T AC200 / 200,220V (50,60Hz) AC100/100,110V (50/60Hz) PE N L 1 2 or AC230V (50Hz) TB 3 PE N L 1 2 TB 3 TDR MC TDR MC TDR ILS TDR ILS MC MC OLR OLR MC MC CM MC CM MC PTC PTC C11 PRS FM FM PRS P P MC TDR MC TDR IDU6E-10-T AC100/100,110V (50/60Hz) L N 1 3 2 PE TB MC TDR ILS TDR MC OLR MC C01 CM PTC MC FM C11 PRS P TDR MC CM PTC PTC C01 FM PRS C02

F/ISE

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

VQ20/30

Pilot Operated 2 Port Solenoid Valve For Dry Air Series VQ20/30 How to Order Valves (Single unit) VQ A C6 2 1 1 1 G Series/ Orifice size Option Symbol 2 3 Nil: None Series VQ20 VQ30 F: With bracket Valve type (A) 2 N.C. 1 L: Type L (VQ20 only) 1 (P) Body type Note) If ordering both options, indicate LF.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Floating Joint

45-150-X530 45 1.5 159 150 100 96 29 22 28 70 86 49 3 55000 9.2 Foot Type: JAL JAL180 200--X530 F R K M Center of sphere E 4 x J U U D T C 60 G P A H L B Dimensions (mm) Maximum operating tensile and compressive force (N) Center of Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B C D E F K L T J G H Weight (kg) Nominal size Pitch sphere R 180 JAL180-40-150

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: -0.1 TO 1 Mpa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -

Series: 25A-ISE20, Rated Pressure Range: -0.1 TO 1 Mpa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -

VZ5000

(Non-locking) (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm (PE port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) 2-Rc 1/4 (5(R1), 3(R2) port) L plug connector (L) VZ5240-LM plug connector (M) VZ5240-M01 02 01 02 (Lead wire length) 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ5240-D01 02 MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-72 5 Port Solenoid

VK300

R port) (Lead wire length) 2 x 4.5 4 x Rc1/8 8 (P, R port) (Mounting hole) 2A 2A 2A 34 2.3 20 7 (Pitch) 7 44.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) L Dimension n L n: Stations 1 35 27 20 396 388 13 32 51 70 89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 2 54 46 3 73 65 4 92 84 5 111 103 6 130 122 7 149 141 8 168 160 9 187 179 10 206 198 11

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

type: Black color 14.2 Applicable tubing diameter N ZF 14.2 Applicable tubing diameter E 14.2 17.2 ZP 17.2 19.95 ZCU 19.95 93.3 58.5 41 10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ 93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.

q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

33

HEB Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v HED Reference item HEA Electrical Wiring Warning IDH * In the case of [Mcm], it will be 0.003 to 0.01.