. -90 -80 -70 Vacuum pressure [kPa] -60 -50 -40 -30 -20 -10 0 0 5 10 15 20 25 Suction flow [L/min(ANR)] Flow rate characteristics Exhaust characteristics * The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.
. -90 -80 -70 Vacuum pressure [kPa] -60 -50 -40 -30 -20 -10 0 0 5 10 15 20 25 Suction flow [L/min(ANR)] Flow rate characteristics Exhaust characteristics * The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.
. -90 -80 -70 Vacuum pressure [kPa] -60 -50 -40 -30 -20 -10 0 0 5 10 15 20 25 Suction flow [L/min(ANR)] Flow rate characteristics Exhaust characteristics * The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.
P A B C D G J M N Q R S T U V B AFF50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AFF60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.
P A B C D G J M N Q R S T U V B AM50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AM60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.
P A B C D G J M N Q R S T U V B AMD50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AMD60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.
P A B C D G J M N Q R S T U V AMK50 3/41 90 222 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 AMK60 1 90 299.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 -16- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of
5) () (01 MPa 0.001 MPa 1/1000) () () F // () -14No.PS-OMU0002CN-D (38L(2 ) 0.50.05 Nm ,, A(ZS-46-A1) 38L A B(ZS-46-A2) 38L B -15No.PS-OMU0002CN-D (a)(a) (b) (ZS-46-B) +(ZS-46-D) () 90 -16No.PS-OMU0002CN-D (-M5) 1/61/4 11.5 Nm (ZS-46-N) -01-N01 23 35 Nm -C4H-C6H-N7H-C4L-C6L-N7L 1/61/4 11.5 Nm -17No.PS-OMU0002CN-D -18No.PS-OMU0002CN-D FG () () No.
=1.1000.01=0.011[MPa]) R.D. 1.000[MPa]5R.D.1.000[MPa]50.05[MPa] 0.800[MPa]5R.D.0.800[MPa]50.04[MPa] ON/OFF () (34 ) ON OFF 34 75 75 ON OFF Hysteresis / () () 25[]ON-OFF () -11No.PS-OMU0005CN-C NPN () () ()()( ) () ON ON 0 (1k1MA/D 5V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005V ) 34 ON-OFF ON ( )(P1L~P1H) ON (34 ) () "digit" () 0 -12No.PS-OMU0005CN-C () SI ON/OFF ON-OFF 90
TSJ Tube Swage Joint Swagelok URJ Union Ring Joint VCR ONOFF () (35 ) ON OFF 35 76 76 ON OFF Hysteresis / () () 25[]ON-OFF () -12No.PS-OMU0008CN-D NPN () () ()()() () ON ON 0 (1k1MA/D 5 V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005 V ) 35 ON-OFF ON () (P1LP1H)ON (35 ) () digit () 0 -13No.PS-OMU0008CN-D () SI ONOFF ON-OFF / ON/OFF 90% () () () () ON -14No.PS-OMU0008CN-D
ONOFF (31 ) ON OFF 31 61 61 ON OFF Hysteresis / () () 25[]ON-OFF -11No.PS-OMS0006CN-G NPN () () ON ON 0 31 ON-OFF ON ( )(P1L~P1H) ON (31 ) () "digit" () 0 () SI ON/OFF ON-OFF / ON/OFF 90 ON -12No.PS-OMS0006CN-G ON ( )(n1L~n1H) ON (31 ) 31 (0FF)(ON)(OFF)(ON) () 5%R.D.(5%) (0~1MPa 0.001MPa 1/1000 () () F () ripple -13No.PS-OMS0006CN-G (3X8L(2 ) 0.50.05 Nm ,, A
(Refer to page 90 for the Endian type of the upper level communication.) Check that the Endian type on the master upper level communication transmission format is Big Endian type or Little Endian type.
90 () () 1 OPEN OPEN (15), 2 2 0.2MPa 0.16MPa 3 OPEN (A ) A (OPEN ) -19No.PS-OMF0005CN-E 0.01 mm 0.01 mm ISA2-G ISA2-H 1.5 64 5 m 2.0 64 5 m 50kPa 30kPa [mm] [mm] [mm] [mm] -20No.PS-OMF0005CN-E ISA2-G ISA2-H 1.5 64 5 m 100 kPa 2.0 64 5 m 100 kPa 0.05mm 0.05mm [s] [s] [mm] [mm] 1.5 64 100 kPa 0.15 mm 2.0 64 100 kPa 0.3 mm [s] [s] [mm] [mm] -21No.PS-OMF0005CN-E ISA2-G
Terminal board box (See the concentrated wiring method) Manual operation Slotted locking type (Tool required) Manual lock part Valve opening: Turn the screw 90 clockwise using a slotted screwdriver. The valve remains open even when the screwdriver is removed. Valve closing: Turn the screw 90 anticlockwise from a valve open position to its original position.
Used as a 3-Port Valve Manual Override Push-turn locking lever type [E type] Push down on the manual override by finger until it stops, and then turn it 90 clockwise. The manual override is then locked. To release it, turn it counterclockwise. If it is not turned, it can be operated the same way as the nonlocking push type.
B A, B A VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 3.2 4.2 A B VQ1000 VQ2000 90 3.2 4.2 VQ1000 VQ2000 90 VQ1000 VQ2000 No.VQ1000V-OMV0001 8 - VQ1000 Series VQ1000 Series VQ1000 Series VQ1000 Series/ / / / 3,4,5 3,4,5 3,4,5 3,4,5 / / / / M M M M-03 03 03 03-3 3 3 3 IP65 IP65 IP65 IP65 IP65 IP65 Assy )O )M5 Assy (0.81.2Nm) )10 Assy VQ1000 VQ2000 Assy VVQ1000-82A-1 VVQ2000-82A-1 10
Locking type (Tool required) Push down the manual override button with a small flat head screwdriver until it stops, and turn it clockwise 90 to lock it. Turn it counterclockwise to release it. Locking type (Manual) Push down the manual override button with a small flat head screwdriver or with your finger until it stops, and turn it clockwise 90 to lock it.
) RWw(n+90) RWr(n+91) RWw(n+91) IO-Link IO-Link : : Process data Process data Port 4 Port 4 RWr(n+9E) RWw(n+9E) RWr(n+9F) RWw(n+9F) n: Start address -45No.EX-OMW1003-A Details of diagnostic data System diagnosis Input register Bit No.
O-ring (New) O-ring (Used) Gasket (New) Gasket (Used) Element (Used) Element (New) Case AMD80, 81, 90, 91, 100 y Replacement Parts e Element r Seal t Seal y Gasket u O-ring (Material: NBR) (Material: NBR) (Material: V#6500) (Material: NBR) IN OUT Model applicable filter Kit no. Kit no. Kit no. Kit no. Kit no. Qty. Qty. Qty. Qty. Qty.
1FluidProof pressure (MPa)Ambient and fluid temperatureOperating pressure range (MPa)Rotation time adjustment range (s/90)Shaft loadBearingPort locationPort sizeDeflection accuracyMSUA1Single vane90 ?