MHx-OMZ0003

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 mm 10 3 4M40.7 8 3.4 8 2 13 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 14 - 4-3.

MHx-OMZ0004

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 (g) 128 3 4M40.7 8 3.4 8 2 11 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% 0.4 (W) [0.40.1] P .1367 LED 300 12 - 4-3.

MHx-OMZ0005

JMHZ2-16D mm 16 MPa 0.1~0.7 (oC) -10~60 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 3 4M40.7 8 3.4 8 2 14 - 4-2.3 V114-5LU (oC) -1050( (ms) ON5 OFF4 Hz 20 / m/s2 150/30 V114-5LU L (L) (V) 24 -1010% (W) 0.4 [0.40.1] P .1367 LED 300 15 - 4-3.

LEF-OM006xx

LEC / (LEC ) () ID 1 164 1 IO 1: 64 1 S 0 +23) +2 10 -23) -2 -10 / 3000 3000 LEFS 0.5 LEFB 1 LEFS 0.5 LEFB 1 4) 0.00 CCW:-10+[] 9 CW-9+10-[] 1: /1:+2: SW 2 /1:2 W 1 0.00 W 2 0.00 0.00 1 2 (1-052) 2mm 3 CCW CW (+2 4) P29 -27- LEC / (LEC ) () 1) 2:CCW 1CW 2CCW 1 LEF 100 LEF16A 150 LEF25A 250 LEFS 200 LEFB 200 LEFS 30 LEFB 60 1000 LEFS 30 LEFB 60 0 1

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

Product Weight [kg] Stroke [mm] Lock weight Model 50 75 100 150 8 1.06 1.23 0.16 16 2.39 2.78 0.32 25 4.82 5.42 6.22 0.61 -4- How to order Coution The actuator body and controller are sold as a package. If when only the actuator is purchased separately, confirm that the combination of the controller, which you have and the actuator is compatible.

JXCx-OMT0005CN

C RESET <>ON SVRE ON DRIVE ON (01-099) <> SET OFF DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150

JXCx-OMT0061CN

C RESET <> <>1 2 (1-103) C RESET 1 [] A [a ] [] A [a ] 2 [SW] <> <> ( (1-106) RESET SVON ) C <>1 <> <> 1-144 RESET SVON D 73 - <> ON <>(M24V) 1-145 RESET SVON (1) D <> <> <> 1-146 RESET SVON (1) D <> <> <>(C24V) RESET SVON (1) 1-147 D <> <> <> (1-148) RESET SVON (1) D <> 74 - <> 1-149 RESET SVON D <> <> <> *2 LED PLC 11 10: RESET SVON PLC 1-150

LEC-OM032xx

Comm Format: Data-SINT Comnection Parameters Instance Size Input 100 256 Output 150 256 Configuration 1 0 It is not necessary to set Connection and ModuleInfo. RSLogix5000TM is a registered trademark of Rockwell Automation. 20 - 5. External connection 5. 1 CN4: Power supply connector Connect the power supply. The gateway unit and the controller (LEC) should have the common 0V line.

IDX-OM-W016

Air Pressure 1.0MPa Ambient Temperature 2 ~ 40oC(Relative Humidity of 85% or less) Power source 1 AC230V10% 50Hz (Note 4) Specification Operating current(Note 2) 1.2A 1.2A 1.2A 1.4A 2.7A 2.9A Electrical Power consumption(Note 2) 180W 180W 180W 208W 385W 420W Circuit Breaker (Note 3) 5A 10A Noize at 50Hz 50dB Condenser Air cooling Refrigerant R134aHFC(WGP:1300) Refrigerant Charge Quantitiy 150

HRX-OM-M005

Table 7-1 Water Quality Standards Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max. 200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max. 100 Max.50 Total hardness (mgCaCO3/L) Max. 200 Max.70 Calcium hardness (mgCaCO3/L) Max. 150

Membrane Air Dryer

IDG75 IDG100 IDG60H IDG75H IDG100H Compressed Air Fluid Range of operating conditions Inlet air pressure MPa 0.31.0 -550 -550 Inlet air temperature oC Ambient temperature oC Standard performance Outlet air atmospheric pressure dew point oC Inlet air flow rate L/min(ANR) 725 900 1190 665 830 1110 Outlet air flow rate L/min(ANR) 600 750 1000 600 750 1000 Purge air flow rate L/min(ANR) 125 150

Coolant valve

Rc1/4 12 to 14 Rc3/8 22 to 24 Warning Rc1/2 28 to 30 Rc3/4 45 to 50 Rc1 65 to 70 Rc1 1/4 80 to 90 Rc1 1/2 100 to 110 Rc2 140 to 150 5. Connection of piping to products When connecting piping to a product, refer to its operation manual to avoid mistakes regarding the supply port, etc. 5 SGC200-OMM0002-F SGC / SGH Series Coolant Valve / Precautions 3 Be sure to read this before handling.

Fieldbus system EtherNet/IP TM compatible SI unit

Input =100 Output =150 Configuration =105 (5)Size: Set as below. Input =Number of inputs connected. Output =Number of outputs connected. Configuration =0 (4) (1) (5) (2) (3) -61No.EX-OMN0032-D I/O Map Each unit of the product has its own I/O occupied byte.

SI unit for DeviceNet ®

Installation example Nm L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 (mm) : L1 shows the dimensions of the VQC1000 series solenoid valve.

EXxx-OMK0006

Please refer to the individual catalog for dimensions when other manifolds are connected. n m L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 Wiring (for power supply, communication and input) and piping are installed on only one side of the product

Fieldbus system (SI unit – PROFIBUS DP compatible)

Please refer to an individual catalog for the size when other manifolds are connected. n_m L 0 1 2 3 4 5 6 7 8 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 n_m L 9 10 11 12 13 14 15 16 L1 139.5 150 160.5 171 181.5 192 202.5 213 L2 278.8 299.8 Wiring (for power supply, communication and input) and piping are done on only one side.

PROFIBUS DP Compatible Fieldbus System

.) -40No.EX##-OMO0019 Dimensions When only input blocks for M8 connector are connected Stations 1 2 3 4 5 6 7 8 L1 [mm]: Rail length 98 110.5 123 135.5 148 160.5 173 185.5 L2 [mm]: Mounting pitch 87.5 100 112.5 125 137.5 150 162.5 175 L3 [mm]: Manifold length 74 86 98 110 122 134 146 158 L4 [mm] 12 12 12.5 12.5 13 13 13.5 13.5 When only input blocks of 8-point-integrated type are connected

LV50-OMQ0004

Chart Flow characteristics (Pressure loss) LFE1 LFE2 0.02 0.02 Pressure loss [MPa] Pressure loss [MPa] P r essur r e l oss[ M P a] 0.015 0.015 P r essur e l oss[ M P a] 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Flow rate [L/min] Flow rate [L/min] Fl ow r at e[ L/ m i n] Fl ow r at e[ L/ m i n] LFE3 0.02 Pressure loss [MPa] 0.015 P r essur e l oss[ M P a] 0.01 0.005 0 0 50 100 150

A_HEC-OM-I009

Fine Control of -9.99 to 9.99 C (0.01 C) 0.00 2 External Sensor 3 PB Range Sets PB (Proportional Band) range used for PID control. 0.3 to 9.9 C (0.1 C) 0.6 (2.0) Sets integral operation range of PID control. 0.3 to 9.9 C (0.1 C) 1.0 4 ARW Range (2.2) ARW: Anti Reset Windup 150 5 I Constant Sets integral time used for PID control. 1 to 999sec (1sec) (50) Sets differential time used for PID

EXxx-OMU0020EN

(between FE and all accessible terminals) Insulation resistance 10 M or more (500 VDC is given between FE and all accessible terminals) Ambient temperature Operation: -10 C to 50 C Storage: -20 C to 60 C Ambient humidity 35% to 85% RH (non-condensing) 10 Hz to 57 Hz (constant amplitude) 0.75 mm 57 Hz to 150 Hz (constant acceleration) 49 m/s2 2 hours for each direction X, Y and Z Vibration