Regulator Unit Combination: Air Filter + Mist Separator + Regulator, Port Size: Rc3/8, Filter Rating: 5μm, Mist Separator: 0.3μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Auto/Manual

Regulator Unit Combination: Air Filter + Mist Separator + Regulator, Port Size: Rc3/8, Filter Rating: 5μm, Mist Separator: 0.3μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided]

F/MS/R COMBO MODULAR. 1.071 lb. P29.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 LEFS25 V V V V V V V V V V V V V V V V LEFS32 V V V V V V V V V V V V V V V V V V V V LEFS40 V V V V V V V V V V V V V V V V V V V V * Please consult with SMC for non-standard strokes as they are produced as special orders.

VQZ100V-OMT0001

R 200cm3/min (0.5MPa) PE ? ? 15 No.VQZ100V-OMT0001 No. () 1ISO VG 32 R ? ? ?

VG300-OMI0003

-2No.VG300**-OMI0003-A V V V VG342 G342 G342 G342 / / / / , 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 3 3 3 3) ) ) ) 1 1 1 1 1 1 1 1 () -3No.VG300**-OMI0003-A VG342 VG342 VG342 VG342(R) (R) (R) (R) Series Series Series Series 3 3 3 3 / / / / C-R C-R DC % AC 15% SSR SSR SSR SSR AC AC AC AC 1 C-R OFF 2 1V -10 ( ( ( ( ) ) ) ) () 1 -4No.VG300**-OMI0003-A VG342 VG342 VG342 VG342(R) (R)

Clean Air Module

P2 P3 P4 P5 P6 Nil Without ON/OFF valve With air operated With air operated flow adjuster Manual operation valve (with lever lock) V V1 V2 Regulator Without regulator With regulator With regulator + Pressure outlet port assembly Nil R R1 LLB3 LLB4 334 Clean Air Module LLB Series Variations HAA HAW AT IDF IDU Threaded type Threaded type Manual operation valve (with lever lock) IDF FS IDFA

IDX-OM-W089

For Option R L N PE TB ILS For Option V V EDV OLR PTC PE CM PE FM1 PRS P FM2 PE Symbol Name CM Compressor Motor FM1,FM2 Fan Motor OLR Overload Relay PRS Pressure Switch ILS ON/OFF Switch with Lamp PTC PTC Starter TB Terminal Block GFCI Ground Fault Circuit In terrupter EDV Electronic Drain Valve IDFA6E-20 6 3 6-3 Electrical Circuit IDX-OM-W089 Air Dryer 6 References 6 4 Compressed Air and

5 Port Air Operated Valve Series SYA3000/5000/7000 1

the manifold base model no. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 (Example) SS5YJA3-41-03-M5 1 pc.

Refrigerant R134a (HFC) 1E, 2E, 3E, 4E, 6E, 8E, 11E, 15E1 (Inlet air temperature: 35 ° C, Outlet air pressure dew point: 10 ° C) Standard Inlet Air Temperature IDF l E Series

Voltage Symbol Voltage Applicable size 1E 2E 3E 4E 6E 8E 11E 15E1 10 Single-phase 100 VAC (50Hz) 100/110 VAC (60Hz) V V V V V V V V 20 Single-phase 200 VAC (50Hz) 200/220 VAC (60Hz) V V V V V V Options Symbol 1 Nil A C G K L M R S T Power supply terminal block connection (Voltage symbol 10 only) 3 With a terminal block for power supply, operating, and error signals 4 With an earth leakage

PSE540/560

Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Series AP3500

q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

KT10

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e 0 6 10 20 40 60 Q No pressure gauge w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN 4000 psig/bar 3) e 4P 4PN 4 4B NPT 1/4 inch

Filter Regulator IW Series

Thread type Nil Rc N NPT* * Semi-standard Suffix Low temperature (30 to 60C) High temperature* (10 to 100C) External parts copper-free Nil T V L V S V ST V V SL V V * With pressure gauge type: Max. 80C.

ZSE2/ISE2

1/8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 IF Data 16-6-13

Compact Vacuum Ejector Series ZA

V V V V ZA1 B M 1 J1 ZA1 FB M 1 Q1 N2 ZA1 1 Q2 N2 ZA1 FP M 1 K1 M P Circuit diagram Dimensions of the vacuum (V) and air pressure supply (P) port fittings after installation Dimensions after the fittings are installed on the vacuum (V) port, air pressure supply (P) port of a single unit, and the common air pressure supply (P) port of a manifold are shown below.

Air Slide Table Series MXS

12 V 12 V Reed switch Solid state switch Relay, PLC Yes Grommet 24 V 5 V, 12 V Diagnostic indication (2-color indication) 12 V A96V A96 5 V Yes (NPN equivalent) Relay, PLC 24 V Grommet A93V A90V A93 A90 100 V 12 V 2-wire No 100 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches

SL5200

FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 L L MPA MPA 2PW 3PW 4PW 10 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Other range available.