One-touch Fittings

[mm] *1 D1 Weight [g] With a rib X (X) Y Nylon Urethane Applicable tubing M L1 Oval type Round type 4 1/8 KQ2L04-01GS1 10 8.2 7.7 10 10 14.8 16.2 17.2 13.3 4.6 3.3 3 4.8 1/4 KQ2L04-02GS1 14 8.2 7.7 10 10 14.8 21.7 21.1 13.3 4.6 3.3 3 14.3 Rib 4, 6 8 to 16 6 1/8 KQ2L06-01GS1 10 10.4 9.7 12 10 15.5 17.3 19.4 13.3 11.4 9 4.5 5.2 1/4 KQ2L06-02GS1 14 10.4 9.7 12 10 15.5 22.8 23.3 13.3 11.4

AIR COMBINATION

AC-OMQ0008-D PRODUCT NAME AIR COMBINATION MODEL/ Series AC10(A,B)-A AC20(A,B,C,D)-A AC25(B,C)-A AC30(A,B,C,D)-A AC40(A,B,C,D)-A Contents PAGE 1. PRECAUTION FOR SAFETY 18 2. APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1115 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 16 7. TROUBLE SHOOTING 16 8. SPARE PARTS LIST 16 9.

80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

HRX-OM-X037

-T020-B-X61 Note) HRL200-W FGESA-10-T020A-G2 Note) Note) The filter shown above cannot be directly connected to thethermo-chiller.

HEC_W-E

UPPER AND LOWER LIMIT ARISES -9-2 FIG. 10-1 MOISTURE AIR DIAGRAM -10-3 vi Contents Table List Page No.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

Digital Flow Switch

Units indicator Indicates the unit currently selected. -11No.PF-OMS0002-B Definition and terminology Terminology Definition A Accumulated flow The total amount of fluid that has passed through the device. If an instantaneous flow of 10 L/min continues for 5 minutes, the accumulated flow will be 5 x 10 = 50 L.

OMR0031

(Unit: mm) Separate position ranges can be set for up to two outputs: AREA A and AREA B. The position ranges should be set as follows: Position 1 Position 2. Part No. Range Resolution LAT3-10 0 to 10 Refer to the 0.03 LAT3-20 0 to 20 Area Range table on the LAT3-30 0 to 30 right.

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter

KJ

F (inch) Model N L1 L2 H (Width across flats) Port B min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 65 5 32 1 4 29 18 29.5 19.5 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 72 KM12-07-35-10 KM12-07-35-6 48 82 31.25 10 19.5 31.5 21.5 13.2 13 17 7 17.46 1 4 1 4 73.5 92 KM12-09-36-10 KM12-09-36-6 52.8 97 37.5 12.7 23.7 37.7 25 15.2 15 18.5 9.5 22.22 5

Hydraulic Cylinders

CHKDB Bore size Rod end thread type Auto switch Quantity XC64 Stroke With air release valve Dimensions CHKDB--XC64 A C C B A B C Bore size (mm) 20 16.5 14.5 7 25 17 15 8 32 19.5 17 10 40 20.5 17.5 10 50 22 19.5 10 63 25.5 22 10 80 30 26.5 15 100 36 33 15 Note) Dimensions other than those highlighted above are standard. 12

Series AK1000

volume Mass 4500 psig (30.7 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 1 x 10-10 Pam3/sec NPT female, Compression 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.4 lbs (1.09 kg) 3) 1) Max 300 psig (2.1 MPa) for PTFE seat. 2) 14 to 194F (10 to 90C) for Vespel and PEEK

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

10 12 Only R is available.

HRX-OM-T002

: 45 oC 12 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity

Microspeed Cylinder

Series 10-, 11CQSX Series10-,11CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (built-in magnet) (built-in magnet) Microspeed cylinder Mounting Microspeed cylinder Bore size 32 40 32mm 40mm Number of auto switches

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Function Content 10 Sets the position of station numbers 100 and 10 1->10, A->100, B->110, C->120 1 Sets the position of station number 1 Example: When station number is 120: set C to x10 and 0 to x1 When station number is 111: set B to x10 and 1 to x1 HOLD/CLEAR switch: Sets the output status when the fieldbus has a communication error or is in idling state.

Rotary Gripper Series MRHQ

0.8 (one each on three sides) Port B 47h9 0 0.062 4-M5 x 0.8 Depth 8 8 N I J E A D P A A M N 22 R R SMC 12 E O P T 25 P A I R 8 R G Y 11 A R I 6 6 29 Side A Side B Scale: 45% 10 Rotary Gripper Series MRHQ Dimensions (mm) 1in = 25.4mm Scale: 50% MRHQ20 A B 48 59 78 38.5 4-M6 x 1 Depth 10 0 0.074 54h9 26.3 opened + 2.2 0.2 8 0 0.1 M5 x 0.8 0 0.05 10 16.3 closed 0 0.7 4-M4 x 0.7 Finger

240

Dimensions [mm] Model L1 L2 L3 A B C D E F G J LEPS6-25 127.1 138.6 11.5 16.5 21 24.5 28 16.5 28 36 76.4 LEPS6-50 156.6 169.6 13 22 45 30 52 22 52 60 107.4 393 LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS10 D E C B 4 10 22 ( ) +0.025 0 ( ) +0.025 0 3H9 depth 3 3H9 depth 3 2 x M5 x 0.8 thread depth 10 4 x M4 x 0.7 thread depth 6 28 24 16 K 25 14 Table operating range Note 1) [1] 1