SQ1000/2000

N.C. 1 5 3 (K) (Y) 5 6 5 6 5 6 4 For single VQ110SLJ12-1 Negative COM: VQ110SNJ12-1 5 For double (latching) For double (double solenoid) on A side (K) (Y) 5 6 6 VQ110S (N)J13(B)-1 For 3P, dual 3 port on A side For double (double solenoid) on B side (K) (Y) 5 6 7 VQ111S (N)J14-1 For 3P, dual 3 port on B side Note) Nil: Standard B: Locking type manual override N: Negative COM specification

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

(The number of solenoids are counted as: 1 for single solenoids and 2 for type 3P double solenoids.)

Series MXP Precision Air Slide Table

Contents 6 2 pieces each of No.12 and 13 MXPJ6-PS 166 166 Precision Air Slide Table Series MXP Dimensions 6 MXPJ6 Scale:100% 4-M30.5, 3 deep 7 5 H 3 D B 18 10.05 3.5 16.5 14 13 20 6 6 F 6 5 2-M40.7 Bottom hole diameter 3.3 Piping port 13.5 2-M30.5 170.05 (Plug:M-3P) Base side for mounting B D M 1 Stroke : S 5 J Z 2.4 Piping port 2-M30.5 (mm) Model F H J M S Z MXPJ65 25 38 27 37 5 44 MXPJ6

Parallel Style Air Gripper Series MHZ

Axial Ported (with One-touch fitting for coaxial tubing) [W] (mm) Auto switch mounting groove (4 locations) (Except 10) Model A B D2 E F G H D1 0.016 0.043 MHZ2-10DW 12f8 15 7 11 52.8 18 28.3 5.5 Plug 10: M-3P 16 to 25: M-5P Applicable coaxial tubing MHZ2-16DW 0.016 0.043 16f8 20 10 15 58.7 16.2 27.7 6.5 End boss assembly 0.020 0.053 MHZ2-20DW G H 20f8 22 12 19 70.5 18.2 31.2 7.5 D2 0.020

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 16.5 14 13 20 6 F 6 6 5 Piping port 2-M4 x 0.7 13.5 Bottom hole diameter 3.3 2-M3 x 0.5 17 0.05 (Plug: M-3P) Mounting base side B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) Z S M J H F Model MXPJ6-5 44 5 37 27 38 25 MXPJ6-10 59 10 47 42

Air Slide Table Series MXP

020 (20 g) MXP12-PS 16 GR-S-050 (50 g) MXP16-PS GR-L-005 (5 g) GR-L-010 (10 g) Cylinder unit GR-L-020 (20 g) GR-L-050 (50 g) D-X Individual -X 199 Series MXP Dimensions: MXPJ6 MXPJ6-5 , depth 2.5 2.5 H 7 5 3 3.5 4 x M3 x 0.5, depth 3 +0.030 0 B D 0.05 1 16.5 3.5 18 14 13 20 6 6 E 5 +0.030 0 Piping port , depth 2.5 2.5 Pilot hole diameter 3.3 2 x M4 x 0.7 6 2 x M3 x 0.5 QL F 13.5 (Plug: M-3P

M Series

M-3AU(Except M-3AU-2) Approx. 1/4 rotations M-3N M-3P M3 M-3ALU-2 Approx. 1/3 rotations M-3ALU(Except M-3ALU-2) Approx. 1/2 rotations M-3UL M-3UT M-5AUM-5ANM-5HApprox. 1/6 to 1/4 rotations Note) M-5J M-5N M-5UN M-5P M-5ALUM-5ALNM-5ALHUM-5ALHNApprox. 1/2 rotations Note) M-5HLM-5HLHM-5UL Note) As a guideline, the tightening torque should be 1 to 1.5 Nm.

Low Profile Slide Table Series MXF

MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25 5 15 25 17 27 23.5 33.5 26.5 36.5 46.5 30 40 50 MXF8 6 2 M4 x 0.7 MXF12 7 2.5 M5 x 0.8 MXF16 8 3 M6 x 1 B A MXF20 12 4 M8 x 1 140 Low Profile Slide Table Series MXF Dimensions: MXF8 Stroke adjuster at extension end Stroke adjuster at retraction end MXH Width across hexagon socket hole 2 Width across flats 6 MXU N 2 ( 1) x F Blanking plug (M-3P

1

22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5 48.5 52.5 99.5 50.5 68.5 XSA2-2P(N) 36 36 79 35 14 22 10 1/4 24 29.5 68.5 32.5 55 50 62.5 25.5 68.5 67 60.5 55 102 62.5 71 XSA3-3P

MXF

MXF-A1627-X11 MXF-A1627-X12 MXF-A2027 MXF-A2027-X11 MXF-A2027-X12 5 15 5 15 5 15 25 5 15 25 17 27 23.5 33.5 26.5 36.5 46.5 30 40 50 MXF8 M4 x 0.7 6 2 MXF12 M5 x 0.8 7 2.5 MXF16 M6 x 1 8 3 A B MXF20 M8 x 1 12 4 8-6-9 10 Series MXF Dimensions: MXF8 Stroke adjuster at extension end Stroke adjuster at retraction end Width across hexagon socket hole 2 Width across flats 6 N 2 Blanking plug (M-3P

XSA Series

.:6 to 12 Width across flats 22 Model A B Bs C D E F L M P [inch] Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11 20 3 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5 48.5 52.5 99.5 50.5 68.5 XSA2-2P(N) 36 36 79 35 14 22 1/4 24 29.5 68.5 32.5 55 50 62.5 25.5 68.5 67 60.5 55 102 62.5 71 XSA3-3P(N) 40 40 88

7ND9071en

LINEARIZATION SUCCESSFUL 3P/9P linearisation successfully performed.

ZX

PS PV PD EXH PS PV 1(PV)(PS PD) M-3P PD Plug PE P3200152-12 (M2.5 x 28) PS Manifold base PV Philips screw Plug M-5P Table (1) Single unit In the case of manifold Quantity 2 1 1 1 1 Part no.

Vacuum Module Series ZX

Description Philips screw Plate A Recommended tightening screw torque Note 1) 0.28 0.1 (Nm) Necessary Necessary Necessary Not necessary Not necessary Necessary Not necessary Not necessary Necessary Necessary 2 1 1 2 1 P3200150 P3200152-24 M-3P M-5P P3200152-12 0.28 0.1 (Nm) 0.46 0.05 (Nm) 1.6 0.15 (Nm) Cross-recessed head machine screw for precision machinery Plug Plug Philips screw

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

v ffi q] o10 (3/8") Clevis pin included 30 Asrrc I SERIES NCJ2 Standard Type: Single Acting/ Spring Return, Spring Extend Reed Switch/D47'C8 TYPe Auto switch Spring extend/D-C7'C8 tYPe Spring retum/Dc7'C8 tYPe l @4 er D-C73C.60C tYPe D.C73C.C8oC type Solid State Switch/D'H7A'HzB Tvpe Spring teturn/DH7A' H7B tYPe Sp.ing extend/DH7A' H78 tYPe + H 5 r"l @3P D-HTtype \ D.H7C type D-H?

Plug-in Unit

) VQC101-5 T kit 1 to 10 stations M5 (M5 threads) S kit 1 to 8 stations: EX500 1 to 12 stations: EX250 1 to 8 stations: EX126 C10 (For 10) Options Direct outlet with built-in silencer Branch type C12 (for 12) F Kit: D-sub connector 1051 (Single) C4 (For 4) VQC200-5 P Kit: Flat cable VQC2000 VV5QC21C6 (For 6) Side 1144 (Double, 3P) T Kit: Terminal block box VQC201-5 C8 (For 8) S Kit: Serial

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v ffi q] o10 (3/8") Clevis pin included 30 Asrrc I SERIES NCJ2 Standard Type: Single Acting/ Spring Return, Spring Extend Reed Switch/D47'C8 TYPe Auto switch Spring extend/D-C7'C8 tYPe Spring retum/Dc7'C8 tYPe l @4 er D-C73C.60C tYPe D.C73C.C8oC type Solid State Switch/D'H7A'HzB Tvpe Spring teturn/DH7A' H7B tYPe Sp.ing extend/DH7A' H78 tYPe + H 5 r"l @3P D-HTtype \ D.H7C type D-H?

LEC-OM02904

-16823 LE-CSE-SA 210 AWG22 6 (3) 7/0.26 53 1.2 7.10.3 LE-CSE-SB (3) ETFESVP 70/0.08( AWG#22)-3P -16824 LE-CSE-RB LE-CSE-RA 210 AWG22 6 (3) 70/0.08 56 1.2 7.10.3 LE-CSM-SA 210 AWG18 4 34/0.18 21.8 1.71 6.20.3 HRZFEV-A(CL3) AWG18 4 LE-CSM-SB 210 LE-CSM-RA 210 (5) AWG19 4 150/0.08 29.1 1.63 5.70.5 (4) RMFES-A(CL3X) AWG19 4 LE-CSM-RB 210 LE-CSB-SA 210 AWG20 2 21/0.18 34.6 1.35 4.70.1

5 Port Solenoid Valve, Series VQC

) S Kit: Serial transmission ( ) T Kit 1 to 10 stations C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) 1051 (2.32) (Single) F Kit: D-sub connector ( ) S Kit 1 to 8 stations: EX500 1 to 12 stations: EX250 N11 (for 3/8") P Kit: Flat ribbon cable VQC2000 Side 1144 (2.52) (Double, 3P) T Kit: Terminal block box N3 (for 5/32") N7 (for 1/4") N9 (for 5/16") C8 (for 8) C10 (for 10) C12 (for 12) N7

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

(The number of solenoids are counted as: 1 for single solenoids and 2 for type 3P and 4P double solenoids.) 2-3-6 7 Plug-in Unit Series SQ1000 How to Order Valves Type of actuation With/Without manifold block 5 C6 SQ1 1 3 0 Nil M MB 2 position single (A) 4 (B) 2 Without manifold block With manifold block With manifold block, built-in back pressure check valve 1 1 (P) 5 (R1) 3 (R2) 2 position