Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Dust proof Dust tight, Splash proof Nil W 5 Series VQ5000 Base Mounted Type Dimensions (mm) 1in = 25.4mm Plug-in Type Conduit terminal 2 position single: VQ510 0 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 (Port A) 17.5 13.5 (Port B) 2-3/8 (ports R1, R2) Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 66 40 B A VQ5000 4 2 14 5 1 3 12 17.5 13.5 Manual override 35 53 2-6.5 Mounting hole

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Digital Flow Switch (Integrated display type) ( compatible)

(Refer to page 66)) (3) Change the set value with the UP or DOWN button, and press the SET button to set the value. Then, the setting moves to the setting of OUT2. (The snap shot function can be used. (Refer to page 66)) (4) Press the SET button for less than 2 seconds to complete the OUT1 setting. [P_2] or [n_2] is displayed on the sub screen (left side).

Lubrication Equipment

gauge Model Metal bowl Metal bowl with level gauge B B AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122 142 177 177 254 268 162 197 197 274 288 Model Port size A B C D LL M P E F G H J K Bracket mounting dimensions N 324(374) 334(384) 334(384) 336(386) 336(386) 38 41 39 45 45 106 106 106 106 106 53 70 75 90 95 70 70 70 70 70 66 66 66 66 66 25 18 16 35 35 11 11 11 11 11 3.2 3.2

CC

107 116 135 50 24 40 40 28 100 27 1 115 62 180.5 124.9 CCVL02-lG-S 3/4 66 107 116 135 50 24 40 40 28 100 27 2 135 80 180.5 132.8 CCVLl1-lG-S M6 X 1 10.5 to 12.5 3/4 66 107 116 135 50 24 40 40 28 100 27 1 135 80 115 180.5 124.9 CCVLl2-lG-S 3/4 66 107 116 135 50 24 40 40 28 CCVLl3-lG-S 100 27 1 135 80 115 180.5 124.9 3/4 66 107 CCVLl0-S 116 50 40 28 100 27 135 80 115 *Pitch of

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

66 For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Solenoid Valve Base Mounted Series VZ5000 How to Order VK Light/Surge voltage suppressor VZ Type of actuation Manual override VF Electrical entry Rated voltage Body option Port size Note) Please contact SMC in the case of without indicator light.

CC

107 116 50 24 40 28 1 40 27 115 100 3/4 62 180.5 124.9 135 MVGQ CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 3/4 80 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 3/4 80 135 180.5 124.9 135 CC CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 3/4 80 80 135 135 180.5 124.9 135 CCVL0-S 3/4 RB Pitch of

21

Up to Up to 21% 21% 21% Up to Up to 66 mm 66 mm 66 mm lighter lighter shorter shorter 138 mm 29 mm shorter CM3 CM3 CM3 NEW Female thread, Boss-cut CM3 CM3 CM3 NEW Male thread CM2 Conventional model Male thread CM3B40-50l stroke Series CM3 CAT.NAS20-212A Series CM3 Female rod end available as standard 2-color indication solid state auto switch mountable Applications expanded by making it possible

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGG MGC (mm) MGF Stroke range Bore size (mm) D1 J K M B D C E KA GA GB H MGZ 11 12 22 25 25 25 25 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 39 43 49 59 71 82 106 29 33 38 46 55 66 86 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5

IR1000/2000/3000

9 68 66 IN Bleed 2-Rc 1/8 Pressure gauge port 2-Rc 1/4 to 1/2 Port size 22 76 144 43 EXH(3) SUP(1) OUT(2) Rc 1/2 Exhaust port 68 66 66 2-Rc 1/4 to 1/2 Port size 2-Rc 1/8 Pressure gauge port 14-5-9 9 Series IR1000/2000/3000 Series IR1000 Relief Characteristics Pressure Characteristics Flow Characteristics Testing methods conform to JIS B 8372.

LVQ

Tightening torque for piping Body class Torque (Nm) 2 3 4 5 6 1.5 to 2.0 3.0 to 3.5 7.5 to 9.0 11.0 to 13.0 5.5 to 6.0 17-5-66 5 Series LVQ Integral Fitting Type (Hyper Fittings) Construction Double acting type N.O. type Basic type N.C. type PB PB q q q VC PA PA VDW e e e VQ VX2 A B A B SMC SMC VX A A B A B B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Series VQ Metal Seal/Rubber Seal Body Ported

See p1.10-66 for details. Note 2) See p1.10-67 for details.

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

KK WA WB L9 VD BG A G f L12 BG VD 2 x 4 x RT 2 x h + L8 + 2 x Stroke h L8 + Stroke h + Stroke A L12 l + Stroke f l G Bore size [mm] Stroke range*1 [mm] A BG D E EE G KK L8 L9 L12 PL R RT SL SW VD WA WB 32 Up to 1000 22 16 12 47 G 1/8 28.9 M10 x 1.25 94 4 6 13 32.5 M6 x 1 8 10 4 4 7 40 Up to 1000 24 16 16 54 G 1/4 32.6 M12 x 1.25 105 4 6.5 14 38 M6 x 1 8 13 4 5 8.9 50 Up to 1000 32 16 20 66

AC Servo Motor Driver

Battery (Cell) : LEC-MR-J3BAT Lithium content : 0.65(g) App. 5 Symbol for the new EU Battery Directive Symbol for the new EU Battery Directive (2006/66/EC) that is plastered to general-purpose AC servo battery is explained here. Note. This symbol mark is for EU countries only. This symbol mark is according to the directive 2006/66/EC Article 20 Information for end-users and Annex II.

LEC-OM07605CN

PA23 ]0 0 0 0() 8 66 8. (2) [Pr. PA23 ]0 0 0 0()2.1 2.2[Pr.

LEC-OM071xx

the range of the NEAR Signal Width (common parameter: 67) This bit is valid only in modes other than the position control mode. 0 Outside the positioning completion range Positioning Completed (Position Control Mode) PSET 1 Within the positioning completion range 14 The status used to judge if the current position is within the range of the Positioning Completed Width (common parameter: 66

Sine Rodless Cylinder Series REA/REB

4 x TC Effective thread depth R 14 REC 8 x Q Effective thread depth R 14 22 23 25 K W 23 25 4 x M8 x 1.25 Effective thread depth 12 CY C 0.1 14.5 B S + Stroke 2 2 CX ZZ + Stroke MQ B Q x R S TC x R W X ZZ C D E(h8) I K NA L P TN Model Nil TF RHC REA50 REA63 Rc 1/4 G 1/4 NPT 1/4 0 86 32 53 30-0.033 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 Rc 1/4 G 1/4 NPT 1/4 0 100 38 66