45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

AC Servo Motor Driver (CC-Link Type ）

1200 470(423 to 517) [Unit: mm] Model D H T E (Note)L d W D T Max.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.

Thermo-chiller/Rack Mount Type

For models with a high-pressure pump mounted (-T, -MT), the cooling capacity will decrease by about 300 W from each graph.

High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

Direct Solenoid

{/s6ews tF2 = SPR0102 Ooubl Inlerlace Feg. w/icfsws +R3 = SPF0101 SinSle hlerlac Reg. w/98u9 0-60 PSI tR4 = SPRo101 Sinsl Interlace Feg. Vqauge G160 PSI T = Top wie oudel 1 sjngr sol-/+ring rturn I 2 oouble sol,/datntsd t 3Oouble Sol,/sprhg cenlded t (alr Fds blockd in ndbau 4. Doublo Sol./sPdng c6ntsrd t (cy'por6 opn io exhausi in n6uttaD.

VEX1

Construction Component Parts Description No. q w e r t y u i o !0 !1 !

Prevents Micro-Bubbles

Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !1 Holder assembly replacement screw i Holder assembly r Insert pin assembly u Fitting nut Place the insert bushing t on the insert pin assembly r. t Insert bushing 2 !

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

KQ2

D MS LQ MQR T How to Order KQ2 H 05 S 02 Made to Order Refer to page 82 for details. One-touch fittings Model With thread sealant H Male connecter L Male elbow Nil Without sealant W Extended male elbow S With thread sealant Port size T Male branch tee Applicable tubing O.D.

Series AK1000

Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.

AC Servo Motor Driver (CC-Link Type ）

time 215 775 1200 470(423 to 517) [Unit: mm] Model D H T E (Note)L d W D T Max.

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Resin/HNBR Spool valve assembly e r t !0 !1 i q q u y For N.O.

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Spool valve assembly Resin/HNBR e r t !0 !1 i q q u y For N.O.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

4 @1 w !8 w !8 w !6 !5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

e r t q w e r t i i o o !

ASR

6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

AS

2 w y r u e !2 t i q o !0 !1 i q o !0 !1 Component Parts No. Material Note No.