High Vacuum Angle Valve Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.
D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,
N.O. 1 (P) 3 (R) 1 (P) 3 (R) e r t q e r t q V100 (A) (A) SY 2 2 SYJ u u VK VZ 3 (R) 1 (P) 3 (R) 1 (P) w w VT VP y y VG Component Parts Replacement Parts VP Note Zinc die-casted Part no.
D 2.8 x P First tentative bore size determination 0.3 x Wcos + Wsin D 5.0 x P 0.3 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure (Refer to page 25 for vertical operation.)
Nil : : P R 20 20 stations A A S + + + + P, R port thread type R port A port size R P A port M5 x 0.8, C4 P port 1/8 Nil Rc M5 M5 x 0.8 P port F G A 1/8 1/8 C4 One-touch fitting for 4 N NPT R port N3 One-touch fitting for 5/32" A port M5 x 0.8, C4 1/8 T NPTF Note) For more than 8 stations, supply air to both sides of P port and exhaust air from both sides of R port. 667 Manifold specifications
T2 V W T1 S 6.5 10 18 50 80 11 YB-03 32, 40 Part No.
/EB 4.14 (225.7) C6: P to A/B 9.54 (520.2) A/B to EA/EB 9.0 (490.7) C8: P to A/B 16.2 (883.3) A/B to EA/EB 16.2 (883.3) C10: Valve effective area Note 2) mm (Nl/min) Manifold base weight W (g) n: Number of stations W = 39n + 83 W = 48n + 99 W = 67n + 118 W = 88n + 151 W = 109n + 174 Flat ribbon cable connector, Socket: 26 pin MIL, With strain relief, MIL-C-83503 conformity Applicable flat
0.02 P.1214 50, 63, 80, 100 0.01 CS2Y 125, 140, 160 0.005 P.1228 REA REB Low Speed Cylinder Low Speed Cylinder CJ2X/CUX/CQSX/CQ2X/CM2X P. 1243 REC Action Series Bore size (mm) Minimum operating speed (mm/s) Page CY CY CJ2X CX CX P.1246 10, 16 1 MQ CUX 10, 16 1 RHC P.1256 20, 25, 32 0.5 RZQ CQSX 12, 16 1 P.1261 Double acting 20, 25 0.5 CQ2X P.1268 32, 40, 50, 63, 80, 100 0.5 CM2X DP.1280 20
-m LECSS2-m L11 L21 For single phase 200 VAC For three phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N W M N() W W P1 P1 PE PE P2 P2 CNP2 CNP2 P P(+) Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power
A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .
AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.
ZP3 T 015 U N A3 With adapter From p. 137 p. 160 From p. 162 ZP3 T 015 U N J 3 B3 With buffer From p. 140 p. 161 p. 164 q w e r t y u Flat type q Vacuum inlet direction w Pad diameter e Material Nil Pad unit T Vertical Y Lateral 015 1.5 02 2 035 3.5 N NBR S Silicone rubber1 U Urethane rubber F FKM GN Conductive NBR GS Conductive silicone rubber r Buffer specification t Buffer stroke J Rotating
With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6
S T Connecting port position Y CRB2B P 10 90 S E C1C30 Without auto switch W CRB1 Free-Mounting Type CRBU2 CRB2 CDRB2 U P 10 90 S T79L C1C30 W With auto switch With angle adjuster Made to Order symbol Vane type With auto switch Auto switch Rotation Shaft type Size Standard W Patterned sequence ordering Refer to page 4.
A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .
Shaft Pattern Sequencing I -XA1 to XA24 Applicable shaft type: W (Standard) Connection port location CRB2 63 90 S E XA1A2C1C30 Without auto switch C RB1BW P CRBU2 With auto switch CRB1 63 90 S T79L XA1A2C1C30 CD RB1BW P E MSU With solenoid valve (Refer to page 11-4-6.)
and operating pressure MK(2) RS Q G First tentative bore size determination W D 2.8 x P First tentative bore size determination First tentative bore size determination 0.3 x Wcos + Wsin D 5.0 x P 0.3 x W + W D 5.0 x P RS H A RZQ W W > WV P > PV Determination of allowable load weight & pressure MI W S Inclined operation CEP1 (For vertical operation, refer to page 10-2-30.)
Wsin D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P RZQ MI W S CEP1 W W > WV P > PV Determination of allowable load weight & pressure CE1 CE2 Inclined operation W WV P PV (For vertical operation, refer to page 10-2-54.)
X Y Connection port location Z Without auto switch RB1B 63 90 S E XC1C30 W C P With auto switch RB1B 63 90 S T79L XC1C30 W E CD P With solenoid valve (Refer to page 11-4-6.) Vane type Made-to-order symbol Rotating angle Auto switch Size Shaft type W Standard Patterned sequence ordering J Refer to page 11-4-7.
Shaft Pattern Sequencing I -XA1 to XA24 Applicable shaft type: W (Standard) Connection port location CRB2 63 90 S E XA1A2C1C30 Without auto switch C RB1BW P CRBU2 With auto switch CRB1 63 90 S T79L XA1A2C1C30 CD RB1BW P E MSU With solenoid valve (Refer to page 11-4-6.)