Air Pilot Operated

DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

Guide Cylinder Series MGG

Reed switch Solid state switch 2-wire 12 V Connector Relay, PLC Yes Yes Yes Yes Yes No No No 24 V 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) 4-wire (NPN) IC circuit 5 V, 12 V IC circuit 3-wire (NPN equivalent) A96 5 V A93 A90 100 V Grommet

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Relay, PLC 12 V Yes Yes 24 V (B54) B54 100 V, 200 V 2-wire C73C 12 V Diagnostic indication (2-color indication) PLC (B59W) B59W Grommet G79 K79 K79C 3-wire (NPN) H7A1 H7A2 H7B H7C H7NW H7PW H7BW G59 G5P K59 5 V, 12 V IC circuit Grommet 3-wire (PNP) 12 V 2-wire Connector 3-wire (NPN) G59W G5PW K59W 5 V, 12 V Relay, PLC IC circuit Diagnostic indication (2-color indication) 24 V 3-wire

2-Color Display Digital Flow Switch Series PFM

80 mA Internal voltage drop 1 V or less Max. 28V, 80 mA Internal voltage drop 1 V or less Max. 28 V, 80 mA Internal voltage drop 1 V or less C: Analog output 1 to 5 V Output impedance 1 k D: Analog output 4 to 20 mA Load impedance 50 to 600 External input: No-voltage input Reed switch or solid state switch input 30 msec or more PFMV PF2A 2 PNP outputs type PFM7--BPNP + Analog output type

Vacuum Ejector Series ZM

Vacuum 1/8 (Rc, NPTF, G) Vacuum port (V) 1/8 (Rc, NPTF, G) Vacuum port (V) (Side entry style is equipped with plugs.)

MGG

C 4-O D Q 2-P T U W E S K L B AA A X AB I J R AP Y + Stroke V Z + Stroke Non-locking type Locking type 8-AF AC AD AE With rod side locking Q Y + Stroke R With head side locking For standard strokes Dimensions not marked with an "" are the same as standard.

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

40 98 27 28.5 M28 x 1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Ionizer

or higher +100 V to +400 V +30 V to +100 V Within 30 V 30 V to 100 V 100 V to 400 V 400 V or lower Light ON Positive Static neutralization completion Flash at 4 Hz Detects the electric potential difference and outputs in an analog voltage.

VCW

(mm) Dimensions Electrical entry A B C D E G H J Z Model Grommet Conduit DIN terminal Conduit terminal Q R S T U V W N X Y VV2CW2 49 20 24.5 28 4.5 38 17.3 34.5 63.5 22 45.5 44 43.5 46 58 41.5 66 99 77 VV2CW3 57 25.5 28.5 30 5.5 42 19.3 38.5 74 24 55 45.5 53 48 60 51 68 101 86.5 VV2CW4 57 25.5 28.5 30 5.5 42 20.8 41.5 81.5 26 62.5 47.5 60.5 50 62 58.5 70 103 94 17-2-59

Vacuum Unit Ejector / Vacuum Pump System

Light/surge voltage suppressor circuit is equipped for the valve type J, K and R.

VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

IZx-OMP0064

B5 White Unused 1) NPN type Ionizer (IZS41, IZS42) When an ionizer (IZS41) is used in DC mode, make sure to ground the F.G. cable (green) and 0 V cable (blue) Shield Green: F.G. +24V F.G. Brown (2pcs.): +24 VDC + DC/DC + +24 V Power supply 24 VDC Blue (2pcs.): 0 V 0 V 0 V 0 V F.G. PLC INPUT Internal circuit F.G.

Vacuum Unit Ejector / Vacuum Pump System

Light/surge voltage suppressor circuit is equipped for the valve type J, K and R.

With Factory Installed

AW3001 AW4001 C J Drain guide c 'iii -0 .9 (Only AW3001 and 4001) Port size Dilferen1ial pressure type auto drain AW2001 N Non relieving type 01 118 0 ::J Floa1 type auto drain(N.O.) Wi1h drain cock and barb fitlings AW3001 AW4001 02 114 W (Only AW3001 and 4001) 03 3/8 (For %6,%4 for nylon) 04 1/2 . When speCllylng mor e than one option, please tisl numerically Ihen atphabetically.

F

Applicable Connection Model H (Width D L1 L2 M Effective Tube OD mm Thread Across Flats) Orifice (mm 2) Uni Thread Nylon 4 1/8 KQF04-01 14 10 27 11 16 5.6 4 1/4 KQF04-02 17 10 31 14 16 5.6 6 1/8 KQF06-01 14 12 27.5 11 17 13.1 6 1/4 KQF06-02 17 12 31 13 17 13.1 6 3/8 KQF06-03 19 12 33.5 15 17 13.1 8 1/8 KQF08-01 14 14 29 11 18.5 26.1 8 1/4 KQF08-02 17 14 32.5 13 18.5 26.1 8 3/8 KQF08-03 19

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

SJ3000 P 00 SJ3000-01-P(-H) SJ3000-M1-P(-H) SJ3000-00-P(-H) With manual operation of pressure adjustment screw Option 00 01 M1 Pressure gauge, top mounting Pressure gauge, side mounting Without pressure gauge Regulating port P port P Pressure adjustment screw operation Slotted locking type Manual Nil H Pressure gauge, side mounting Without pressure gauge Pressure gauge, top mounting Note)

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication