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Pneumatics Norway A/S Vollsveien 13C, Granfoss Nringspark N-1366 LYSAKER, Norway TEL: 67-12-90-20 FAX: 67-12-90-21 NEW ZEALAND SMC Pneumatics (New Zealand) Ltd. 8C Sylvia Park Road Mt.Wellington Auckland, New Zealand TEL: 09-573-7007 FAX: 09-573-7002 BELGIUM (Distributor) SMC Pneumatics N.V.

Pneumatics Norway A/S Vollsveien 13C, Granfoss Nringspark N-1366 LYSAKER, Norway TEL: 67-12-90-20 FAX: 67-12-90-21 NEW ZEALAND SMC Pneumatics (New Zealand) Ltd. 8C Sylvia Park Road Mt.Wellington Auckland, New Zealand TEL: 09-573-7007 FAX: 09-573-7002 BELGIUM (Distributor) SMC Pneumatics N.V.

Pneumatics Norway A/S Vollsveien 13C, Granfoss Nringspark N-1366 LYSAKER, Norway TEL: 67-12-90-20 FAX: 67-12-90-21 NEW ZEALAND SMC Pneumatics (New Zealand) Ltd. 8C Sylvia Park Road Mt.Wellington Auckland, New Zealand TEL: 09-573-7007 FAX: 09-573-7002 BELGIUM (Distributor) SMC Pneumatics N.V.

System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: w/o Option, Pump System PE

System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: w/o Option, Pump System PE

System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: w/o Option, Pump System PE

System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: w/o Option, Pump System PE

System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: w/o Option, Pump System PE

System: Vacuum Pump System for Manifold, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, Connector: L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch, Vacuum, V Port: Metric Size, ø6 One-touch Fitting, Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option

System: Vacuum Pump System for Manifold, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, Connector: L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch, Vacuum, V Port: Metric Size, ø6 One-touch Fitting, Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option

System: Vacuum Pump System for Manifold, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, Connector: L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch, Vacuum, V Port: Inch Size, ø1/4" One-touch Fitting, Bracket: w/o Option, Pump System PE Port Female Thread: w/o

09 310 -1 310 -1 310 -1 310 -1 ft ft ft ft 310 -1 0.1 ft 310 -1 1 ft 310 -1 1 ft 310 -1 / 0.1 ft 0.1 1 1 1 310 -1/pulse 310 -1/pulse 310 -1/pulse 310 -1/pulse ft ft ft ft 0.927= -23No.PF-OMJ0005CN-I [F 1] OUT1 OUT1 <> [F 1] [oU1] [1ot] () -24No.PF-OMJ0005CN-I 21 [P_1] [P1L][P1H] [P1.1][P1.2]([P1.1]3[P1.2]3) Pn [H_1] [CoL] ON OFF ON OFF [F 1] OUT1 -25No.PF-OMJ0005CN-I H_1(H_2) H1

Setting Control modes (Note 1) P S T CP/CL 00 01 For manufacturer setting (Note 2) 02 SON SON SON SON 03 RES RES RES RES 04 PC PC PC 05 (Note4) EM1 EM1 EM1 EM1 06 CR 07 ST1 RS2 ST1 08 ST2 RS1 ST2 09 TL1 TL1 TL1 0A LSP LSP LSP 0B LSN LSN LSN 0C For manufacturer setting (Note 2) 0D SP1 SP1 0E SP2 SP2 0F SP3 SP3 10 LOP LOP LOP 11 CDP CDP CDP 12 to 1F For manufacturer setting (Note 2) 20 MD0

Inch size Metric size 3.2 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 With One-touch fittings Use 1/8" tube. 15-9-72 2 Speed Controller with One-touch Fittings Panel Mount Type, In-line Type Needle Valve/Flow Characteristics AS1001F AS2001F AS2051F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR))

Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10 2 Speed Controller with One-touch Fittings In-line Type Series AS Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is