45

Triangle mark position Stations n 11 stations 12 13 14 15 16 17 18 19 20 stations 310.5 323 235.5 248 248 260.5 273 285.5 298 310.5 L1 L2 L3 L4 (Rail mounting hole pitch 12.5) 300 312.5 225 237.5 237.5 250 262.5 27.5 287.5 300 286.5 297 202.5 213 223.5 234 244.5 255 265.5 276 12 13 16.5 17.5 12 13 14 15 16 17 1-6-96 Base Mounted Series SX3000/5000 SS5X3-45PDStations U(26 pins) C4 C6 (Pitch

VQC

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 15 VQC1000/2000 Base-Mounted Type Plug-in Unit VV5QC11 (L3) (L4) L2 65 51 L1 28 P = 10.5 1.5 (12) 13 Indicator light 1.5 Manual override (5.5) 93.5 Approx. 2 (35) 66 75 37.5 Mounting hole for 4-M4 Manual release

Air Cylinder

11 11 D-A513 13 14 14 15 9 9 10 10 11 D-B59W 14 14 17 16 18 D-P3DW 4.5 5 6 5.5 6 D-P4DW 4 4 4.5 4 4.5 Values which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately p30% dispersion) and may change substantially depending on the ambient environment. 22 Auto Switch Mounting

Air Slide Table

11 13 13 14 Average speed Va (mm/s) Collision speed V (mm/s) 13 13 13 13 18 42 41 42 41 23 31 31 31 31 41 36 19 19 19 19 27 84 75 84 75 84 75 36 47 47 47 47 66 57 Note) Use the average speed when calculating static moment.

45

17.5 15.5 14 12 16.5 15 13 12 13 14 15 16 stations Stations n 11 stations 335.5 DIN rail 348 360.5 373 398 410.5 L1 L2 L3 L4 325 337.5 350 362.5 387.5 400 262 278 294 310 326 342 Manual override (Press and turn for the locking type.)

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

MHZ MHF (mm) BF VA 4H9 4H9 5H9 6H9 6H9 ZD 6 10 12 16 20 UC M5 x 0.8 M5 x 0.8 M6 x 1 ZH M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 ZJ 3.5 4.5 5 7 8 ZG 9 10 11 14 16 ZF 14 15 21 24 31 ZE 5 8 10 14 17 BG VB 4 4 5 6 6 AJ 9 9 11 13 13 UD 10 10 12 16 16 AH 9 12 15 18 20 FX 22 26 32 40 50 AG 26 27 33 35 45 BE 30 38 48 58 68 AF 35 36 44 48 58 CC 9.5 13.5 17.5 20 25 Model MHL 0 -0.062 0 -0.062 0

SZ3000

8 210.5 200 187 12 2 160.5 150 134.5 13 3 173 162.5 145 14 4 185.5 175 155.5 15 5 198 187.5 166 16 6 210.5 200 176.5 17 7 210.5 200 187 12 8 223 212.5 197.5 13 L1 L2 L3 L4 L1 L2 L3 L4 L n 9 223 212.5 197.5 13 L n 9 235.5 225 208 14 10 235.5 225 208 14 11 248 237.5 218.5 15 12 260.5 250 229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 20 Z ZZ (NN-1) x H G H 5.5 11 5.5 11 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) GA 11 21 31 43 41 F 20 30 20 28 38 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 HA 20 20 20 30 48 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 M 42 52

42

SOL.A VQC 4/5 10 (+) () White Black 10 stations SOL.B 23 (+) () Gray Red SOL.A 11 (+) () White Red VQZ 11 stations SOL.B 24 (+) () Black White SOL.A 12 (+) () Yellow Red 12 stations SQ SOL.B 25 (+) () White None COM. Note) 13 13 () (+) Orange Red VFS Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common.

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 42 29 11 7.5 8 8.5 9 M4 x 0.7 10 12 13 15 M4 x 0.7 4.3 4.3 5.6 5.6 M5 x 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 8 8 10 10 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 5 5 6 6 13 15 18 21 18 26 30 36 42 13 15 18 21 18 22 24 30 12 16 20 25 10, 20, 30, 40, 50, 75, 100 125, 150

24

8.5 9 8 8.5 5.5 6 40 15.5 16.5 11.5 12.5 11 12 8.5 9.5 50 14.5 17 10.5 13 10 12.5 7.5 10 63 16.5 20 12.5 16 12 15.5 9.5 13 80 18 26 14 22 13.5 21.5 11 19 100 21.5 32.5 17.5 28.5 17 28 14.5 25.5 *1: The auto switch mounting bracket BMG7-032 is used. *1: The auto switch mounting bracket BMG7-032 is used. *: Adjust the auto switch after confirming the operating conditions in the actual setting

MHZ

Refer to page 12-13-1 for further information on auto switches.

MHZ

Refer to page 12-13-1 for further information on auto switches.

JXCx-OMU0004

] OUT3 ONIN02 ON7 (3) OUT0 ON OFF bit_0 OFF ON OUT1 [12] BUSY ON OUT3 OFF bit_1 [13] STOP OUT2 ON OFF [14] OFF BUSY ALARM OFF bit_2 OUT3 ON OFF [15] BUSY ALARM OFF STOP OFF bit_3 [16] ONALARM ON OFF ON BUSY [17] ALARM ONIN03 ON9 OFF ON ALARM 0 48 No.JXC-OMU0004-A 9.4 ) 1011 11 10 53 97 (1) NO.10 No.10 (2) NO.11 No.11 No.11 NO.11 (3) (1) 10 11 9 7 (2) 11 9 7 (3)

MXS

Model CXS A B C D E E1 F H J K L G P* Q* M MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BS 8 7 23 14 15.5 40.8 5 12 16.6 7 15.5 14.6 1.4 M8 X 1 M3 X 16 M3 X 16 CXT MXS-BS12 9.5 31 14.5 16 40.8 6 12 20.5 10 15 18.5 1.4 M8 X 1 M4 X 15 M4 X 15 MXS-BS16 11 37 17.5 19 46.7 7 14 23 12 18.5 21 1.4 M10 X 1 M5 X 18 M5 X 18 MX MXS-BS20 13 47 23.5 26 67.3 11 19 27 13 25.5 25 12 M14 X 1.5 M6 X 25 M6 X 25 MXS-BS25

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no. MU-C02 MU-C03 MU-C04 MU-C05 Part no.

MGG

size (mm) W V U T O P S Z X Bore size (mm) Bore size (mm) Y R HR HN Q Y R Q 20 25 32 40 50 40 48 82 12 M6 x 1 depth 9 Rc 1/8 26 157 30 20 25 32 40 50 20 25 32 40 50 11 25.3 12 (14) 21 37 47.5 107 (115) 104 46 57 100 13 Rc 1/8 M6 x 1 depth 13 31 175 37 11 28.3 12 (14) 21 40 104 48 107 (115) 52 65 114 16 Rc 1/8 M6 x 1 depth 13 38 201 37 11 31.3 12 (14) 21 43 106 49 110 (118) 62 84 138 Rc 1

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D