1

This is for reference. *8 Indicates case of grommet type Flow Rate Characteristics Face seal fitting/Compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 Flow rate characteristics C[dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Female thread XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 Flow rate characteristics C[dm3

* 1 XSA Series Normal Close High Vacuum Solenoid Valve

XSA1 XSA1R-8-1 XSA2 XSA2R-8-1 XSA3 *1 Not CE-compliant For the special option below, refer to page 7. Special electrical entry direction 2

Series VS

+ 72 L2= 43n + 84 LENGTH FORMULA L1= 71n + 66 L2= 71n + 90 L1= 56n + 90 LENGTH FORMULA L2= 56n + 106 LENGTH DIMENSIONS LENGTH DIMENSIONS LENGTH DIMENSIONS SIZE 3 SIZE 2 SIZE 1 n L n 10 n L 3 2 4 5 6 8 7 9 10 5 6 7 8 9 10 2 3 4 6 5 7 8 9 2 3 4 L 279 421 492 634 563 705 776 370 482 426 538 594 650 L1 208 350 L1 158 201 244 502 287 373 330 416 459 L1 202 258 314 587 445 516 658 729 800 374

XL

Mode: VX021-002DBT-05 (Example) Series XSA3 with 24VDC terminal, surge voltage suppressor and light.

pneuaire

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 pneuaire High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv

VS7-6

Unit n: Station L: Dimensions n L L1 L2 Equation L1=43n+64 L2=43n+76 L3 297 340 383 426 469 512 555 598 641 L3=43n+211 2 150 162 3 193 205 4 236 248 5 279 291 6 322 334 7 365 377 8 408 420 9 451 463 10 494 506 ( ): In case of direct manual override style.

VQ7-6/7-8

A L side R side (2n-1/8) EVS 38 D side VFN 3 68.5 (A, B port) 4n-1/4, 3/8 16 120.5 (Single) 44 155 (3 position) 145 (Double) 55 77.5 121 PA 14 PB 12 1 R 3 5 65 54 P 39 (Pilot pressure EXH port) 4-1/8 SMC 21 R2 R1 17 17 (P , R port) 6-3/8 26.5 26.5 L Dimension n: Stations 10 9 8 7 6 5 4 3 2 1 Formula L1 L1 = 43n + 64 494 451 408 365 322 279 236 193 150 107 L2 L2 = 43n + 76 506 463 420 377

VQ7-6/7-8

+ 64 L2 119 162 205 248 291 334 377 420 463 506 L2 = 43n + 76 255 298 341 384 427 470 513 556 599 642 L3 L3 = 43n + 212 (215.5) (258.5) (301.5) (344.5) (387.5) (430.5) (473.5) (516.5) (559.5) (602.5) (645.5) L3 dimensions inside ( ) are for MP . 3-10-19 20 Series VQ7-6 Manifold Option Parts Interface regulator ARB250-00Residual pressure release valve spacer AZ503-82 P A B A B Interface regulator

VQ7-6/7-8

) 155 (3 position) 44 55 77.5 121 12 14 1 PB PA 5 3 R 21 39 54 65 4-Rc1/8 (pilot pressure exhaust port) P SMC R1 R2 17 17 6-Rc3/8 (ports P, R) 26.5 26.5 L: Dimensions n: Stations Formula 10 9 8 7 6 5 4 3 2 1 L1 L1 = 43n + 64 494 451 408 365 322 279 236 193 150 107 L2 L2 = 43n + 76 506 463 420 377 334 291 248 205 162 119 8 Series VQ7-6 Optional Manifold Parts Blank plate assembly Blocking

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

+ 64 150 193 236 279 322 365 408 451 494 L1 4-1/8 12, 14 port 3 R 65 119 L2 = 43n + 76 162 205 248 291 334 377 420 463 506 L2 54 R 39 21 R2 R1 17 17 6-3/8 1, 3, 5 port 26.5 26.5 3-11-7 8 Series EVS7Dimensions EVS7-8-FG-S-M0 174.5 103 174.5 49 (64) 49(64) 103 71.5 31 (42) 31 (42) 2-8 mounting hole 56 56 1 3 5 16 (20) (2 port) 16 (20) (4 port) 16 (23) (22) 16 (11) 10 12 (16) 62(72) 75(86)

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

0.93 2 to 20 (1) Valve stations Note) Values for 5 stations manifold with a 2 position single type valve. 4/2 (A/B) Location Valve 1,3,5 (P,EA,EB) Port 1/4 1/8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) Port size 4,2 (A,B) Port Manifold base weight W (g) n: Station W = 36n + 6 W = 43n

Valve Single Unit

Common EXH 2 to 20 stations Valve Rc 1 8 Rc 1 4 Rc 1 8 Rc 1 4 A, B port location P, EA, EB port Rc 1 4 M5 x 0.8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C4 (One-touch fitting 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) A, B port SV Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n

Intrinsically Safe Valve

Note 1) A, B port location Valve 1/4 P, EA, EB port 1/8 C4 (4 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) N3 (5/32" One-touch fitting) N7 (1/4" One-touch fitting) N9 (5/16" One-touch fitting) 1/4 C8 (8 One-touch fitting) C10 (10 One-touch fitting) N7 (1/4" One-touch fitting) N11 (3/8" One-touch fitting) Port size A, B port Manifold base weight W (g) n: Stations W = 43n

Table of Contents

+ 64 L2 119 162 205 248 291 334 377 420 463 506 L2 = 43n + 76 255 298 341 384 427 470 513 556 599 642 L3 L3 = 43n + 212 (215.5) (258.5) (301.5) (344.5) (387.5) (430.5) (473.5) (516.5) (559.5) (602.5) (645.5) L3 dimensions inside ( ) are for MP . 3-10-19 20 Series VQ7-6 Manifold Option Parts Interface regulator ARB250-00Residual pressure release valve spacer AZ503-82 P A B A B Interface regulator

Valve Single Unit

A, B port location 1 8 1 4 1 8 1 4 P, EA, EB port 1 4 M5 x 0.8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) A, B port SV Manifold base weight W (g) n: Stations SZ W = 19n + 45 W = 43n + 77 W = 51n + 81 Applicable flat ribbon

Valve Single Unit

Common EXH 2 to 20 stations Valve Rc 1 8 Rc 1 4 Rc 1 8 Rc 1 4 A, B port location P, EA, EB port Rc 1 4 M5 x 0.8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C4 (One-touch fitting 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) A, B port SV Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Electrical entry Dimensions Formula L1 = 43n + 70 L2 = 43n + 82 n: Stations (Max. 10 stations) n 2 156 168 3 199 211 4 242 254 5 285 297 6 328 340 7 371 383 8 414 426 9 457 469 10 500 512 L L1 L2 Note) Actual number of manifold base stations: Add 1 SI unit mounting station to the number of valve stations. 1199 Series VFS4000 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in

SX

A, B port location 1 8 1 4 1 8 1 4 P, EA, EB port 1 4 M5 x 0.8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) A, B port SV Manifold base weight W (g) n: Stations SZ W = 19n + 45 W = 43n + 77 W = 51n + 81 Applicable flat ribbon

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

manifold base to allow the external wiring to be piped all together with the 26 pin MIL connector. 1 8 1 4 1 8 1 4 P, EA, EB port 1 4 M5 x 0.8 C4 (4 One-touch fitting) C6 (6 One-touch fitting) Port size C4 (4 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) A, B port C8 (8 One-touch fitting) C10 (10 One-touch fitting) Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

C6 (6 One-touch fitting) C8 (8 One-touch fitting) A, B port C8 (8 One-touch fitting) C10 (10 One-touch fitting) SV P to A/B 15.84 (863.7) A/B to EA/EB 14.94 (814.6) P to A/B 9.18 (255.3) A/B to EA/EB 9.9 (539.8) P to A/B 3.6 (196.3) A/B to EA/EB 4.14 (225.7) SY SY Valve effective area Note 2) mm (Nl/min) C10: C8: C6: SYJ Manifold base weight W (g) n: Number of stations W = 19n + 45 W = 43n