Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Bore size 12 12 mm 40 40 mm 16 16 mm 50 50 mm 20 20 mm 63 63 mm 25 25 mm 80 80 mm 32 32 mm 100 100 mm Auto switch Nil Without auto switch (Built-in magnet) *: For applicable auto switches, refer to the table below. Port thread type Nil M5 x 0.8 Rc TN NPT TF G Cylinder stroke [mm] Refer to Standard Strokes on page 433. *: For bore sizes 12 and 16, only M5 x 0.8 is available.

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

Nil S 3 n Auto switch 32 40 50 63 80 100 125 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm 125 mm Nil Without auto switch For applicable auto switch model, refer to the below table. Rod Single rod Double rod Nil W Stroke (mm) Refer to Standard Stroke on page 20.

3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A M9BW Number of auto switches Mounting bracket Nil A B L F G D Both ends tapped 2 pcs.

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

With auto switch (Built-in magnet) Bore size 40 50 63 80 100 Bracket 2 Bracket 1 40 mm 50 mm 63 mm 80 mm 100 mm Mounting B L F G C D T Nil V W Without bracket Single knuckle joint Double knuckle joint Nil N Without bracket Pivot bracket Auto switch Basic Axial foot Rod flange Head flange Single clevis Double clevis Center trunnion Nil Without auto switch For applicable auto switch model,

Air Cylinder

2.75 .63 .19 1.500 5.50 1/2 NPT 4.50 2.88 4.25 7.88 1.38 7.25 600 (6") 1.375 1-14 1.63 .75 3.25 .63 .19 2.000 6.50 3/4 NPT 5.00 3.13 5.25 8.50 1.63 8.00 800 (8") 1.375 1-14 1.63 .75 4.25 .69 .25 2.000 8.50 3/4 NPT 5.13 3.25 7.13 8.75 1.63 8.56 MS4 Side tapped style (R) P + Stroke 2-EE AA 4-DD KK MM B TH WF LF + Stroke TG TN 4-NT Depth ND XT ZJ + Stroke A SN + Stroke E MM 1.000 1.375 1.375

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

How to Order CP96S B W J 32 100 C CP96SD B W J S 32 100 M9BW C With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting B Basic L Axial foot F Rod ange G Head ange C Single clevis D Double clevis Bore size Nil 2 S 1 3 3 n n 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm * Mounting brackets are shipped together, but not assembled.

Air cylinder

Replacement partsA 32 40 50 63 80 100 125 Seal kit no. MB32ZCA2-40Z CA2-50Z CA2-63Z CA2-80Z CA2-100 Z-PS MB125-PS PS -PS -PS -PS -PS Rod seal 1 pc Contents of Piston seal 1 pc the seal kit Cushion seal 2 pc Cylinder tube gasket 2 pc Note) Seal kits include grease pack.

Compact Cylinder: Guide Rod Type ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series CQM

Bore size 12 16 20 25 32 12 to 25 M thread Rc NPT G Nil 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Built-in Magnet Cylinder Model TN TF 32 to 100 If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

Guide Table Series MGF ø 40, ø 63, ø 100

Guide Table Series MGF 40, 63, 100 How to Order Port thread type Rc NPT G Nil TN TF MGF 63 30 M9BW Made to Order Refer to page 413 for details. Guide Table Bore size/ Standard stroke (mm) Number of auto switches 40 63 100 30, 50, 75, 100 30, 50, 75, 100 30, 50, 75, 100 2 pcs. 1 pc. "n" pcs.

Toggle Type Air Gripper ø 32, ø 40, ø 50, ø 63 Series MHT2

Bore size 32 40 50 63 32 mm 40 mm 50 mm 63 mm Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below. Port thread type Type Rc NPT G Symbol Nil TN TF Double acting Action D Applicable Auto Switch/Refer to pages 761 to 809 for further information on auto switches.

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

Lead wire length (m) Auto Switch model Electrical entry direction Applicable load Pre-wired connector Type Special function Electrical entry Indicator light Wiring (Output) Load voltage AC 0.5 (Nil) 5 (Z) 1 (M) 3 (L) DC In-line Perpendicular M9NV M9PV M9BV M9NAV M9PAV M9BAV M9N M9P M9B M9NA M9PA M9BA 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 5 V, 12 V IC circuit Solid

Low-Speed Rotary Actuator

42 67.5 46 71.5 30 90 43 59 32 7 47 63 43 3 180 51 82 55 86 40 90 50 69 24 5 54 73 36 4 180 59.5 97.5 63.5 101.5 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

Parallel Style Air Gripper Series MHZ

MHZ Flat Type Fingers [3] MHF 4 x MM thread depth L (Thread for mounting attachment) MHL K J MHR A A D G B MHK MHS D B MHC K J F MHT C MHY S W MHW O -X (mm) F G Mass (g) L MM J K D C B W Model A MRHQ Open Closed MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 +0.2 0 5 4 5 8 10 12 15 18 1 1.4 1.4 1.6 2 3 3 3 5 6 8 10 12 16 M2

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF(NW), Port Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF(NW), Port Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 80, Flange Type: D [K(DN)]

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)