Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

IR10-OM00007

-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

IR30-OM00013

-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03:3/8 04:1/2 Rc FG NNPT 00.010.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R302BG No.

PSxx-OML0002CN

-4No.PS-OML0002CN-G () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (100 10 ) JIS B 8392-1 11.1.21.6.2:2003 () -5No.PS-OML0002CN-G * / / ,FG (35N ) () () * () 6 33 () () 10 m DC(-)() () * -6No.PS-OML0002CN-G ( ) () CE 050(5), * ON , 1015 10 /1 2146 LCD * -7No.PS-OML0002CN-G 01 N ISE30A 3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01

ZP

T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P. 73 Adapter Assembly Part No.

Table of Contents

6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 TMA-08 KQL08-00 KQT08-00 KQH08-00 KEA10 KEB10 KEA12 KEB12 KEC-03 6 TMA-10 KQL10-00 KQT10-00 KQH10-00 6 TMA-12 KQL12-00 KQT12-00 KQH12-00 Dimensions: Multi-holder M4 round head screw (Pitch) N-holding part Cutting groove for separation Applicable tubing O.D.

Air Fittings & Tubing

holder) KEA-10 KEB-10 KEA-12 KEB-12 KEC-03 KQL10-00 KQT10-00 KQH10-00 TMA-10 6 TMA-12 6 KQL12-00 KQT12-00 KQH12-00 Multi-holder/Dimensions Tube O.D.

KQ2

Applicable model Applicable thread Material Gasket M-10/32G 10-32 UNF Stainless steel 304, NBR KQ2E01-00, KQ2E03-00, KQ2E01-35 KQ2E03-35, KQ2LF01-00, KQ2LE03-00 KQ01-P01 KQ2E05-00, KQ2E07-00, KQ2E05-34 KQ2E07-35, KQ2LF05-00, KQ2LE07-00 KQ05-P01 Pipe nut KQ09-P01 KQ2E09-00, KQ2E09-36, KQ2LE09-00 KQ11-P01 KQ2E11-00, KQ2E11-36, KQ2LE11-00 KQ2E13-00, KQ2E13-36 KQ2E13-37, KQ2LE13-00 KQ13

KJ

(mm) 4 6 Note) Weight (g) L M Model D Applicable tubing KQ2C04-00 KQ2C06-00 10.4 12.8 3 3 17 18.5 16 17 8 KQ2C08-00 15.2 20.5 18.5 4 10 KQ2C10-00 18.5 23 21 6 Note) D: Max. diameter 12 KQ2C12-00 20.9 24 22 8 16 KQ2C16-00 26.5 28 25 13 Color Cap: KQ2C Applicable tubing O.D.

Table of Contents

VX2121-00 VX2221-00 VX2321-00 VX2131-00 VX2231-00 VX2331-00 VX2241-00 VX2341-00 VX2113-00 VX2123-00 VX2223-00 VX2323-00 VX2133-00 VX2233-00 VX2333-00 VX2243-00 VX2343-00 2 2 0.17 4.1 4.1 0.17 3 3 0.33 7.9 7.9 0.33 3.0 3.0 4.5 4.5 0.61 15 15 0.61 6 6 1.1 26 26 1.1 Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure

Table of Contents

Body type Plug-in type ARBF5050-00-P-1 Non plug-in type ARBF5050-00-P-2 P port regulation ARBF5050-00-A-1 ARBF5050-00-A-2 A port regulation ARBF5050-00-B-1 ARBF5050-00-B-2 B port regulation Body type Plug-in type AXT512-14-1A Non plug-in type Part no. For details, refer to Serial Transmission catalog separately.

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5° to 60°C (no freezing), Effective area (Cv): 0.55, Port size

The VZM series is a 5 port mechanical valve. It is compact in design with a large flow capacity (VZM400 Cv 0.55, VZM500 Cv 0.6). The VZM is available in a metal or rubber spool style, with a variety of actuator choices and optional external pilot.Fluid: air, inert gas, Operating pressure: 0.15 to 1.0MPa, Ambient and fluid temp: -5° to 60°C (no freezing), Effective area (Cv): 0.55, Port size