MGP

, 200 250, 300, 350, 400 66 44 14 14 M8 X 1.25 M8 X 1.25 18 10 72 44 14 12 M10 X 1.5 M10 X 1.5 21.5 11 M10 77 49 16.5 16.5 M10 X 1.5 M10 X 1.5 28 13.5 WA R S T U VA VB WB Bore (mm) X XA XB XC XL YY YL Z 25st< 100st 300st< 100st< 200st 200 200 200 200 200st< 300st 33 34 36 38 200st< 300st 300st< 25st< 100st 83 84 86 88 100st< 200st 121 122 124 124 25st 42 50 66 80 25st 171 172 174 174 96 104

4/5 Port Air Operated Valve Series SYJA3000

One-touch fitting for 6) P, R port: M5 x 0.8 0.37 0.19 0.72 0.34 0.12 0.44 Closed center SYJA520-C6 Exhaust center Pressure center Single Double 0.54 0.19 0.67 0.38 [0.38] 0.11 [0.11] 0.41 [0.41] 0.41 [0.39] 0.23 [0.12] 0.82 [0.44] 0.36 0.11 0.41 77 3 position 79 (45) 94 (60) 0.21 0.19 0.79 0.32 0.21 0.83 2 position Base mounted (with sub-plate) 0.28 0.18 0.80 0.34 0.20 0.86 Closed center 104

Metal Seal/Rubber Seal Series VQ Body Ported

A DIN rail clamping bracket is attached to each. 2-4-104 Exploded View of Manifold Series VQ Housing assembly and SI unit no. No. Manifold Part no.

Hygienic Design Cylinder Series HY

ZC 94 102.5 117.5 123 ZD 104 114.5 129.5 139 ZE 116 126.5 149.5 155 ZF 126 138.5 161.5 171 HY-C032SUS HY-C040SUS HY-C050SUS HY-C063SUS 32 40 50 63 Series HYQ Bore size HYDQ / with auto switch Bracket part no.

Modular/F.R.L. Units Series AC

124 124 129 A2 43 57 57 75 80 96 A3 57 74 74 95 102 124 A2 61 76 76 99 104 124 A3 57 74 74 95 102 124 A2 61 76 76 99 104 124 A3 43 57 57 75 80 96 A3 57 74 74 95 A3 43 57 57 75 A1 41.5 55 55 72.5 77.5 93 A1 41.5 55 55 72.5 77.5 93 AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 K KS V S KV KSV SV A3 43 57 75 Attachment Model A1 41.5 55 72.5 A1 41.5 55 72.5 A2 43

Guide Cylinder Series MGG

R Y + Stroke 32 to 50 MGQ Front mounting flange 63 Front mounting flange MGG MGC MGF R Y + Stroke Q X Bore size (mm) R Y (mm) MGZ Y + Stroke 25 32 40 50 63 20 14 14 14 15 16 16 MGT 63 to 100 79 79 81 89 104 119 Front mounting flange Copper and Fluorine-free (For CRT production processes) To prevent the influence of copper ions or halogen ions during CRT manufacturing processes, copper and

LEC-OM071xx

8.20 Operation Sequence when OT (Overtravel Limit Switch) Signal is Input...8-104 8.21 Operation Sequence at Emergency Stop (Main Circuit OFF).8-104 8.22 Operation Sequence when a Safety Signal is Input.8-105 8.23 Operation Sequence at Occurrence of Alarm.8-107 8.24 Notes when the Positioning Completed State (PSET = 1) is Established while Canceling a Motion Command.8-107 8.25 Function/Command

Modular F.R.L. Unit

124 124 129 L1 41.5 55 55 72.5 77.5 93 L2 43 57 57 75 80 96 L3 57 74 74 95 102 124 L1 41.5 55 55 72.5 77.5 93 L2 61 76 76 99 104 124 L3 57 74 74 95 102 124 L1 41.5 55 55 72.5 77.5 93 L2 61 76 76 99 104 124 L3 43 57 57 75 80 96 AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 K KS V S KV KSV SV L3 43 57 75 Attachment Model L1 41.5 55 72.5 L2 43 57 75 L1 41.5 55

Cylinder with Lock Series CNS

47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 to 1200 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 18.5 215 35 35 35 M16 x 1.5 (mm) Bore size (mm) K KA M MA MM N P Q R S T V VA H ZZ 125 140 160 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 303 87.5 20 23 110 440 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 93.5 25 343 95 20 28 110 480 17 36 30.5 M12 x 1.75 M36 x 1.5 39 3/4 104

Modular F.R.L. Units

77.6 80.2 102 77.6 104 102 77.6 104 80.2 AC50-B 93.1 124 93.1 189.3 124 93.1 124 124 93.1 124 96.2 AC55-B 98.1 124 AC60-B 98.1 129 Attachment Model K S V KS KV KSV SV A1 A2 A1 A1 A2 A1 A2 A1 A2 A3 A1 A2 A3 A1 A2 AC20A-B 41.6 43.2 41.6 41.6 43.2 41.6 57 41.6 43.2 43.2 41.6 57 43.2 41.6 57 AC30A-B 55.1 57.2 55.1 55.1 57.2 55.1 74 55.1 57.2 57.2 55.1 74 57.2 55.1 74 AC40A-B 72.6 75.2 72.6 72.6

CV/MVGQ

Bore size (mm) 10 16 15 Stroke 76 116 Mounting Style and Accessory (For details , refer to page 10-15-9.) 30 Stroke 83 134 Basic weight 45 Stroke 94 156 Axial foot style Rod side style Flange side style 60 Stroke 104 180 Mounting Basic style Axial foot style 7 19 Mounting bracket weight Standard equipment Option Mounting nut Rod side flange style 5 13 Rod end nut Mounting nut and rod end

ZP

or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong alkali Weak alkali = Excellent --Not affected

ZSM1-115/121

1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1 x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556 x 102 9.8067 x 102 9.8067 x 10 1 1.4217 x 10 1.0133 x 105 1.0133 x 102 1.0332 x 104

CNS

35 14 19 20 212 112 255 180 18.5 Up to 1400 56 53 182 180 290 1/2 3/8 144 40 90 63 43 14 19 20 236 118 275 215 Bore size (mm) GB GL GR J K KA M MM N P Q S T V VA H ZZ 125 140 160 23 25 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 303 20 23 110 432 87.5 85.5 28 30 30 M14 x 1.5 15 31 19 M30 x 1.5 35 1/2 343 20 28 110 472 95 93.5 35 35 35 M16 x 1.5 17 36 22 M36 x 1.5 39 3/4 396 25 35 120 538 109 104

JXCx-OMT0023

Table 10.1 lists the enclosure dissipation area for each driver when the driver is operated at the ambient temperature of 40 (104 ) under rated load. 10 3 10.

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62

MLGC

19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45 42 80 17 depth 12 35 142 22 M10 X 1.5 depth20 194 170 110 95 37 10.5 MG Bore size (mm) H GR GQ GL O GK J N S GD I K L M Q R P 20 25 32 40 4 4 5.5 M6 X 1 3.5 60 25 26 54 M8 X 1.25 depth14 35 80 105 50 93 12 M5 X 0.8 MGP 7 7 9 4 70 32 31 62 40

SYJ3000/5000/7000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 43 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-

Table of Contents

113 4 87 96 3 70 79 2 53 62 Formula 17n + 19 17n + 28 L1 L2 With attachment plug lead wire: VV5ZS2-51GStation 1Port size 4-4.5 mounting hole Manual override Indicator light U side (n) (2) (1) Stations D side 2-C4, C6 1 A B 9.5 27.3 (Port size: One-touch fitting type) Electrical entry n: Stations L Stations Formula 17n + 19 17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8

VZS

113 4 87 96 3 70 79 2 53 62 Formula 17n + 19 17n + 28 L1 L2 With attachment plug lead wire: VV5ZS2-51GStation 1Port size 4-4.5 mounting hole Manual override Indicator light U side (n) (2) (1) Stations D side 2-C4, C6 1 A B 9.5 27.3 (Port size: One-touch fitting type) Electrical entry n: Stations L Stations Formula 17n + 19 17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8