JXCx-OMT0002

Controller and Peripheral Devices / Specific Product Precautions . 100 16.1 Design and selection . 100 16.2 Handling Precautions . 101 16.3 Mounting . 102 16.4 Wiring . 102 16.5 Power supply . 103 16.6 Grounding . 103 16.7 Maintenance . 103 17. Troubleshooting . 104 17.1 Operation Errors . 104 17.2 Position / Speed problems . 107 Supplement 1.

SFOD-OMT0010

Controller and Peripheral Devices / Specific Product Precautions 101 14.1 Design and selection . 101 14.2 Handling Precautions . 101 14.3 Mounting . 103 14.4 Wiring . 103 3 No.SFOD-OMT0010-B 14.5 Power supply . 104 14.6 Grounding . 104 14.7 Maintenance . 104 15. Troubleshooting . 105 15.1 Operation Errors . 105 15.2 Position / Speed problems . 108 Supplement 1.

smcmaintenancepartslist

Pressure Control Equipment P 0.25 MPa Spring washer Tightening torque (Nm) Base cylinder Tie-rod nut 200 250 125 140 180 103 160 75.5 Bore size (mm) 147.1 254 Aluminum tube Tie rod 49 Steel tube Manual release bolt 92.7 132.4 62.8 39.2 Old-lock unit Push plate bolt 11 22 38 3-5. Mount seal with care to prevent damage to it. 3-6.

10

47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 57 53.5 59.5 53.5 59.5 55 62 55 103 113.5 55.5 53.5 56.5 53.5 64.5 53.5 65.5 60.5 CS1 CS2 D-X Technical Data 427 A MB Series Minimum Stroke for Auto Switch Mounting Mounting Brackets Except Center Trunnion n: Number of auto switches [mm] Auto switch model Number of auto switches 32, 40, 50, 63 80, 100 125 Note 2) 2 (Different surfaces, same

Table of Contents

The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 103 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of

LJ1H

The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 103 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of

VCL

62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class H 17-2-35 8 Series VCL How to Order Manifold How to Order Manifold Assembly VV2C L 2 02 01 Enter the mounting valve and option part numbers

VCS

74.5 70 107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold base part number.

Series VCL

62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2 02 01 Enter the valve

Series VCS

74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option models to be mounted under the manifold base part number.

MXQ

10 9 9 8.5 8.5 4.2 4.2 B A 16 8 16 8 H (NN 1) x H G Section AA Section BB (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103

17

= 2 x 9.8 x 30 x 103 = 0.59 (Nm) 1 3 1 3 MY3A MY3B M3E = x FE x Y = x 82.3 x 30 x 103 Load factor 3 = M2/M2 max = 0.59/1.6 = 0.37 = 0.82 (Nm) Load factor 5 = M3E/M3E max = 0.82/2.9 = 0.28 MY3M M2 Sum and Examination of Guide Load Factors 5 = 1 + 2 + 3 + 4 + 5 = 0.89 1 The above calculation is within the allowable value, and therefore the selected model can be used.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

) M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) m3 M3 Load factor 3 = M3/M3 max = 8.86/38.7 = 0.23 5.

TABLE OF CONTENTS

COIL NO. 6 7 12 14 5 6 10 12 1.8 2.2 3.7 4.4 2C-102-A24 2C-103-A24 2C-104-A24 2C-105-A24 2C-2-K24 2C-3-K24 2C-4-K24 2C-5-K24 19 24 28 30 38 17 21 24 26 33 6 7.5 9 9.5 12 2C-106-A24 2C-107-A24 2C-108-A24 2C-109-A24 2C-110-A24 2C-6-K24 2C-7-K24 2C-8-K24 2C-9-K24 2C-10-K24 48 55 77 120 138 42 48 67 100 120 15 18 24 38 45 2C-111-A24 2C-112-A24 2C-113-A24 2C-114-A24 2C-115-A24 2C-11-K24 2C-12-

VZ5000

159 130 214 204 286 235 310 398 386 386 VZ5120-01 379 379 364 364 360 360 310 301 301 286 157 252 252 252 252 235 214 204 103 159 157 130 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Station Port size VV5FS2-01FD1 FU12With light/surge voltage suppressor Pilot EXH port Formula for manifold weight M = 0.178n + 0.378 (kg) Wiring specifications: Refer to page 1227. n: Stations 1(P), 3(R2), 5(R1) port 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 Stations Formula L1 = 28 x n + 47 L2 = 28 x n + 56 L L1 L2 1151 Series VFS2000 Manifold Option

Air Cylinder Series MB

47.5 45 48.5 45 58 51.5 53.5 59.5 53.5 57 54 53.5 62 55 59.5 55 103 113.5 55.5 53.5 56.5 53.5 65.5 60.5 64.5 71 64.5 68.5 65.5 64.5 71.5 66.5 70.5 66.5 115 125 67.5 65 68.5 65 76.5 72 Operating Range (mm) Auto switch model Bore size 32 40 50 63 80 100 125 D-A9/A9V 7 7.5 8.5 9.5 9.5 10.5 12 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 4 4.5 5 6 6 6 7 D-Z7/Z80 D-A5/A6 D-A59W D-A3/A44 7.5 8.5 7.5

0.55

Pg9 6 to 8 2 x 1/8 1/4 (Pilot EXH) (External pilot port) 2 x 8.5 (Mounting hole) EXH 205.1 196.1 PA PE 156 103 119 112 93 IN EXH OUT 65 62 42 42 25 2 x 3/8, 1/2, 3/4 36 71 36 3/4 (IN, OUT port) (EXH port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

Guide Cylinder Series MGG

30 6 30 130 17.5 65 113 6.6 35 65 70 100 35 54 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 120 14 16 10 100 35 6 35 135 20 80 118 6.6 40 73 80 106 35 60 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 140 17 19 10 120 40 9 45 170 20 100 150 9 50 93 95 134 50 75 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 170 23 21 10 150 45 9 50 194 25 120 170 11 55 103

Air Slide Table Series MXQ

113 157 182 M 67 67 77 94 104 148 173 Z 66 66 76 93 103 147 172 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 34 34 42 58 70 110 135 I 12 12 14 15 13 17 17 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 N 4 4 4 6 6 8 10 HA 32 32 40 39 39 72 72 Model F 28 28 38 34 34 36 36 GA 18 18 20 38 48 59 84 KA 117.5 142.5 NA 4 4 4 4 4 8 8 MXQ1210 MXQ1220 MXQ1230 MXQ1240 MXQ1250 MXQ1275 MXQ12-100