75 80 90 20 15 100 10 25 30 35 40 45 50 60 70 75 80 90 Model CXS20 CXS25 CXS32 60 40 194 104 109 114 119 124 129 134 139 144 154 164 169 174 184 90 85 170 80 95 100 105 110 115 120 130 140 145 150 160 60 40 30 196 106 111 116 121 126 131 136 141 146 156 166 171 176 186 92 87 172 82 97 102 107 112 117 122 132 142 147 152 162 70 50 40 212 122 127 132 137 142 147 152 157 162 172 182 187 192 202
(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX LZ ZZ
x 5.5 (For mounting) 1.7 (Pitch) PE port P = 27.5 23.5 1/8 [4(A), 2(B) port] (Station 1) (Station n) (Indicator light) L-type plug connector (L) (Lead wire length) + + Approx. 300 70 47 25 47.3 EB EA EB EA M5 x 0.8 [5(EA), 3(EB) port] 11 (Pitch) P = 27.5 18 68.5 L: Dimensions 137.1 n: Stations L n 2 3 4 5 6 7 8 9 10 11 12 13 14 L1 L2 74.5 64.5 102 92 129.5 119.5 157 147 184.5 174.5 212 202
Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC Formula: L5 = 16n + 10 L3 = 16n + 20 n: Stations (Max. 20 stations) Dimensions L n 2 3 98 87.5 68 15 58 4 123 112.5 84 19.5 74 5 135.5 125 100 18 90 6 148 137.5 116 16 106 7 173 162.5 132 20.5 122 8 185.5 175 148 19 138 9 198 187.5 164 17 154 10 210.5 200 180 15.5 170 11 235.5 225 196 20 186 12 248 237.5 212 18 202
171.5 139 14 12 P PB PA 80.5 4-1/8 67 R2 R1 40(41.5) (Pilot pressure EXH port) 1 3 5 SMC 6-1/2, 3/4 32(35) 32(35) 35 35 L Dimension Formula L n 10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120 176 1/2 L2 640 584 528 472 416 360 304 248 136 192 L1 650 594 538 482 426 370 314 258 146 202
x M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) HA 40 40 40 25 36 72 76 Model F 35 35 35 50 35 55 65 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 GA 15 15 15 42 51 61 111 I 10 10 10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 NA 2 2 2 2 2 4 4 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202
Objects . 166 18.7.3.8 PDS Control Objects . 177 18.7.3.9 Position Control Function Objects. 181 18.7.3.10 Profile Velocity Mode Objects . 184 18.7.3.11 Profile Torque Mode Objects . 186 18.7.3.12 Profile Position Mode Objects . 188 18.7.3.13 Homing Mode Objects. 192 18.7.3.14 Factor Group Objects . 198 18.7.3.15 Touch Probe Function Objects . 201 18.7.3.16 Optional application FE Objects . 202
boot 150 + l 171 + l 149 + l 170 + l 20 130 151 129 150 159 + l 180 + l 158 + l 179 + l 25 137 158 136 157 163 + l 187 + l 163 + l 187 + l 32 141 165 141 165 184 + l 212 + l 179 (188) + l 207 (216) + l 40 164 192 159 (168) 187 (196) Z + Stroke 210 + l 242 + l 205 (217) + l 237 (249) + l 50 190 222 185 (197) 217 (229) ZZ + Stroke 215 + l 252 + l 210 (222) + l 247 (259) + l 63 195 232 190 (202
to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202
145 for deflection data. 82 Non-standard Motor/Vertical Mount Specification Series LJ1H30 Dimensions/LJ1H303PA(X10) Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 212 160 Z section detail 63.5 63 Stroke + 196.5 (table movement range) 62.5 202
Refer to page 145 for deflection data. 40 Standard Motor/Vertical Mount Specification Series LJ1H30 Dimensions/LJ1H303PA Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 160 212 Z section detail 63.5 63 Stroke + 196.5 (table movement range) 202
W 58 58 70 88 104 128 152 Shock absorber unit model RB0806 RB0806 RB1007 RB1412 RB1412 RB2015 RB2015 8 Series MY1W Side Supports Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202
deep +0.030 0 N 4-M4 X 0.7 thread 6 deep 16 -1 x F 2 2-M5 X 0.8 thread 8 deep 4H9 3.5 deep +0.030 0 8 M 0.5 28.5 32 Z ZZ (NN-1) x H G H 18.5 8.5 8.5 18.5 A B 4.2 8.5 9 9 20 1 5 4H9 3.5 deep +0.030 0 NN-M5 X 0.8 thread 10 deep 4H9 3.5 deep +0.030 0 A B HA GA Cross section AA Cross section BB (mm) Model F 35 35 35 50 35 55 65 GA 15 15 15 42 51 61 111 KA NA 2 2 2 2 2 4 4 Z 70 70 70 82 102 148 202
Operated Type Series PA3000/5000 Dimensions/Air Operated Type (mm) 1in = 25.4mm PA3000 115 68 85 105 4-7 7.5 FLUID OUT 3/8 5.5 AIR SUP (P1) 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 1/4 100 130 FLUID IN 3/8 PA5000 179 4-9 90 90 FLUID OUT 1/2, 3/4 AIR SUP (P1) 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202
Rc 3/8 5.5 AIR SUP (pilot air supply port) Rc 1/4 FLUID OUT PROCESS PUMP AIR SUP 2 115 90 74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 Rc 1/4 100 130 FLUID IN Rc 3/8 PA5000 179 4-9 90 90 FLUID OUT Rc 1/2, 3/4 AIR SUP (pilot air supply port) Rc 1/4 (257) 112 56 165 56 Reset button RESET PROCESS PUMP FLUID OUT 167 AIR SUP 132.5 FLUID I N 125.5 103.5 AIR EXH 58.5 48.5 202
17 13 248 237.5 212.5 18 14 248 237.5 223 12.5 15 260.5 250 233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15 10 223 212.5 191.5 16 11 235.5 225 202 17 12 248 237.5 212.5
Non-standard bar length Separate cable No. of drop prevention cover needed Symbol No. of drop prevention cover needed Symbol for bar for bar IZS40-E3 IZS40-E4 IZS40-E5 IZS40-E3 IZS40-E4 IZS40-E5 length length 28 1 154 5 52 1 1 166 1 1 4 70 2 1 172 1 5 76 1 1 1 178 1 5 88 1 2 184 6 94 3 196 1 1 5 100 2 2 202 1 6 106 1 1 2 208 1 6 118 1 3 214 7 124 4 220 2 6 136 1 1 3 226 1 1 6 142 1 4 238
. 40 41 Standard Motor/Vertical Mount Specification Series LJ1H30 Dimensions/LJ1H303PA Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 LJ1 LG1 LC1 LX LC6D/LC6C Switches 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 160 212 Z section detail 63.5 63 Stroke + 196.5 (table movement range) 202
volume reduction Weight 37 g 35% weight reduction 26.5 Weight 57 g 29 16 24 + Stroke 26 23% volume reduction 25.5 + Stroke 29 Weight 61 g 42% weight reduction 32 Weight 106 g 36 20 40% volume reduction 30 27.5 + Stroke 34 + Stroke 36 Weight 82 g 45% weight reduction 36 Weight 150 g 40 25 40% volume reduction 30 + Stroke 33.5 37.5 + Stroke 40 Weight 135 g 33% weight reduction 43.5 1 32 Weight 202
Page 202 Dimensions . Page 203 Cooling Capacity Calculation Operation Display Panel . Page 204 Required Cooling Capacity Calculation . Page 207 Alarm . Page 204 Precautions on Cooling Capacity Calculation ... Page 208 Circulating Fluid Typical Physical Property Values ... Page 208 Option High Pressure Pump Mounted . Page 205 Specific Product Precautions .