Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: Analog

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: Analog 4

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: Analog 4

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: Analog 4

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 3/4, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/4, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: Analog 4

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to

Rated Flow Range: 50 to 250 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 1 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: Analog

Rated Flow Range: 50 to 250 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: Analog

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: G, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: G, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to

Rated Flow Range: 50 to 250 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: Analog

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 3/4, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: Analog 4

Stations: 10 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Remote Sensor Unit, Return Unit Flow Range: 2 to 16 L/min, Return Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Supply/Return Port Size: 3/8, Return Unit Flow Switch Output Specifications: Out 1: Analog 4 to 20 mA; Out 2: Flow

Stations: 10 Stations, Piping: U Side: Closed; D Side: Open, Thread Type: NPT, Supply Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Unit Flow Switch: Remote Sensor Unit, Return Unit Flow Range: 0.5 to 4 L/min, Return Unit Components: w/Flow Adj. Valve; Stop Valve: None, Supply/Return Port Size: 3/8, Return Unit Flow Switch Output Specifications: Out 1: Analog 4 to 20 mA; Out

Stations: 10 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Flow Switch Type: Remote Sensor Unit, Rated Flow Range: 2 to 16 L/min, Return Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Return Port Size: 3/8, Flow Switch Output Specifications: Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes, Lead Wire: -, Flow Switch

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Table of Contents

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

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D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.