SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

location, P/R port with One-touch fitting for 6 VZ1000-3A-1D r VZ1000-3A-1U t SUP/EXH block assembly VZ1000-2A-1M y Note) Block pin (2 pcs.) is attached for q, e, t, y.

Compact 5-Port Solenoid Valve

q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

2

1 r r !2 !2 q q y !3 w y t w i t o i !0 u !0 o e !4 u Meter-in type Meter-out type e Seal method: Face seal For G thread Meter-in type Meter-out type !1 !2 r q w y t i o !0 u !5 e Meter-in type Meter-out type Component Parts No.

Table of Contents

2, Metal joint q, w, O-ring e, r, t, y, u VVFS5000-1A-2Plug-in type Non plug-in type !1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly !

LEC-OM07605CN

PL17] 27.2 (1) ON (2) (2) ( ) [Pr. PL09] 27.3 (1) OFF ON OFF 27.4 [AL. 27.1] 27.5 27.6 27.7 8 22 8. 28 2 28.1 (1) LECSS2-T (2) (2) 2A 1 () 2A.1 (1) LECSS2-T 1-1 (2) (2) (3) (3) () 2A.2 [AL. 2A.1] 1-2 2A.3 1-3 2A.4 1-4 2A.5 1-5 2A.6 1-6 2A.7 1-7 2A.8 1-8 . 8 23 8. 2B 2B.1 (1) LECSS2-T 1 (2) (2) (3) (3) 2B.2 [AL. 2B.1] 2 30 30.1 (1) () ()[Pr.

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

Vacuum System Peripherals:

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Value in the initial state) Note 1) Note 2) Base mounted Solenoid specifications JIS Symbol 5 port 4 port (For manifold use only) Grommet (G)/(H), L plug connector (L), M plug connector (M), M8 connector (W) Electrical entry 2 position single 2 position single (B) 2 (A) 4 (B) 2 (A) 4 DC 24, 12, 6, 5, 3 Coil rated voltage V 100, 110, 200, 220 AC50/60Hz 1 (P) 1 (P) 3 (R) 3 (R) 5 (R) 10% of

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

3 Port Air Operated Valve Series SYJA300

(Value in the initial state) Base mounted Body ported With Bracket Air operated valve type SYJA3 2-M3-F 1 2 JIS Symbol SYJA312 4 SYJA322 4 Pilot Pressure Range Caution (A) 2 (A) 2 For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

SYJ300/500/700

SYJ72R is only for manifold use. 4-4-38 39 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Construction q e r t w y q e r t w y N.C. N.O. (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) i i V100 3 (R) 1 (P) 3 (R) 1 (P) SY u u SYJ VK Component Parts Replacement Parts VZ No.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

2 q u r !0 !1 e !4 !3 w !0 !

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

4 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) e t q r w w q t r A B A B SY SYJ u u R P R R P R SX y VK 3 position closed center/exhaust center/pressure center VZ 3 position closed center VF (A) 4 (B) 2 w t q r VFR 5 (R) 3 (R) 1 (P) 3 position exhaust center A B (A) 4 (B) 2 VP7 5 (R) 3 (R) 1 (P) VP4 3 position pressure center u (A) 4 (B) 2 R P R (This construction

C85

1 y q r e i !2 o !

4/5 Port Air Operated Valve Series SYJA3000

5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B) 2 (B) 2 (A) 4 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) How to Order Manifold Base 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Same manifolds as series SYJ3000 are prepared. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3 Fill the same as SS5YJ3 3 position closed center 3 position

Non-contact Gripper

L) XT661-4A-(R, L) XT661-2A-(R, L) P depth PL Air supply port P depth PL Air supply port 45 45 45 P.C.D.

SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 7 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed

Secondary Batteries

VHK 02S 06F 90 Series compatible with secondary batteries Bracket Nil L None With L-bracket 90 Material restriction *Bracket and screws are attached. 2 2 port valve Valve model Knob color 1(P) port size Gray Nil (Standard) 4 6 8 R 1 8 R 1 4 R 3 8 04F 06F 08F 01S 02S 03S Red R (Option) 2(A) port size 04F 06F 08F 4 6 8 *Specifications and dimensions for the 90-series are the same as standard

VFS

2, Metal joint q, w, O-ring e, r, t, y, u VVFS5000-1A-2Plug-in type Non plug-in type !1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly End plate (D side) assembly Plug-in type Non plug-in type VVFS5000-3A-2 !