Air Cylinder Series CA2

Rc NPT G Nil TN TF Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3A !3B !4 !5 !6 !7 !

XL

Through the movement of piston S (11), the valve S (18) is removed from the valve S seal assembly [1]-(14), and initial exhaust takes place through the passage S(17).

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

1 ) 0 . 1 ( 1 2 . 2 ) 5 1 . 1 ( 4 5 . 2 ) 5 8 . 1 ( 8 0 . 4 ) 9 . 1 ( 9 1 . 4 ) d r a d n a t s ( d r a u g l w o B t e k c a r B P 4 4 B P 1 4 4 B P 1 5 4 B P 2 5 4 B P 6 4 B F 8 6 e r u t a r e p m e T , 2 3 G V 1 # l i o e n i b r u t e s u , n i m / s p o r d 5 e t a r p i r d l i o g i s p 3 7 f o e r u s s e r p y l p p u s h t i W * s e i r e S T L A N k n a T d e e F o t u A l

ALF400 to 900, ALT-5/-9

N 1 * S 1 5 T L A N 9 T L A N 1 * S 1 9 T L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r p g n i t a r e p o . x a M ) 0 . 1 ( 0 5 1 e g n a r . p m e t g n i t a r e p O ) C 0 6 ~ 5 ( F 0 4 1 ~ 3 2 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T y d o B C D A e r u s s e r p e n i l d n a k

New

0.59 0.87 0.75 0.59 0.87 0.75 0.69 0.69 0.87 0.81 0.69 0.87 0.81 0.25 0.25 0.30 0.24 0.25 0.30 0.24 1.06 1.16 1.16 1.16 1.26 1.26 1.26 1.73 2.13 2.07 2.11 2.28 2.22 2.26 1.18 1.28 1.28 1.28 1.38 1.38 1.38 1.20 1.57 1.52 1.56 1.75 1.69 1.73 2 3 Conduit terminal DIN terminal Port size Size P Q R S Q R S T 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 2.54 2.64 2.64 2.64 2.74 2.74 2.74 1.42 1.81 1.73 1.77

Fluoropolymer Piping Equipment

Metric size Inch size 6 8 10 12 19 25 4 3 Series 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" Appearance Class 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 Space saving union elbow LQ1E-S SMC LVC P.908 LVA Space saving union tee LQ1T-S LVH SMC LVD P.908 LVQ Space saving panel mount union LQ1P-S LVP LVW P.908 LQ1 LQ1 Space saving union LQ1U-S SMC LQ3 LVN P.908 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1

HRX-OM-W002

1 1 3 3 3 3 18AWG BK 3 3 1 1 1 1 C3 (CN51) (CN1) (CN6) Compressor CM CM AC Power Board 3 1 PCB1 3 3 [ ] TH 14AWG BK 14AWG BK C CM 2 Current Transformer S 14AWG G/Y G3 [ ] [ ] 14AWG BK S Condenser Circuit Protector R C1 E CT 1 14AWG G/Y G1 [ ] CP R 1 1 [ ] R [ ] 14AWG BK 14AWG BK N (CN4) N [ ] 14AWG BK 14AWG BK 2 2 22 21 L L L [ ] [ ] 14AWG BK 14AWG BK 1 1 12 11 (CN2) WH BK 3 12 12 3 3 BR

A_HEC-OM-K001

Fig. 5-1 Details of operation panel 1st line Indicates No. corresponding to the alarm which arises and [WRN] comes to light up when temp. upper or lower limit warning occurs. E R R 1 1 W R N P V < 3 1 . 6 C # 1 2nd, 3rd line S V 3 0 . 0 C Current temp.[PV]]and target temp.[SV] during normal operation.

Large Size Vacuum Module: Series ZR

SP 18 20 ZR1 1-K1M-DZCUK For port exhaust Exhaust (EXH.) port Rc 1/4 AMJ A B AMV A B S A B AEP 75.3 HEP 7.2 1 Related Equipment A B A B S A B Digital pressure switch for vacuum 109 1 (Port exhaust) 114 1 (Built-in silencer) 109 PE A (79.8) 1 85 1 PD 60 1 PS PV 147 (2000) 957 Series ZR Ejector exhaust Vacuum V port Ejector System with Valve Pilot pressure exhaust PE port Circuit diagram Release

CV/MVGQ

L 50 100 J 1 CV3 Without auto switch 100 L 50 Y7BW J 1 CDV3 With auto switch Bore size 40 50 63 80 100 Number of auto switches 40 mm 50 mm 63 mm 80 mm 100 mm Built-in magnet Nil S n 2 pcs. 1 pc. n pcs.

Magnetically Coupled Rodless Cylinder

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

Vacuum Module Series ZX

(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) (3) Ejector assembly How to Order Unit for Replacement 05 1 D W ZX1 (1) Valve unit Unit for replacement Ejector exhaust K1 A V ZX1 5 Z B L D S L 1 Nozzle diameter Built-in silencer 2 Port exhaust 05 07 0.5 mm 0.7 mm Single (PD and PS ports are equipped with plugs.)

ZX

Ordering example) ZX1051-K15LOECN 1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. (For 110 VAC) 3A 36 VJ10 6 Ejector System/Recommended Model (The models below will have shorter deliveries.)

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

ZR

ZR1 W 20 S 1 Ejector exhaust Nozzle diameter 2 Individual exhaust 1 Built-in silencer 10 13 1.0 mm 1.3 mm Port size: RC 1/8 (Nozzle dia. 1.0 to 1.5 mm) RC 1/4 (Nozzle dia. 1.8, 2.0 mm) 15 1.5 mm 18 1.8 mm 20 2.0 mm Maximum vacuum pressure S L 84 kPa 53 kPa 13-3-9 9 Series ZR Ejector Unit/Standard Type (S): Max.

VZS

For VZS2000 New: BG-VZS2000-1 (Ditch groove): Set of gasket 1 pc. and mounting screw 2 pcs. Old: BG-VZS2000 (Plate gasket): Set of gasket 1 pc. and mounting screw 2 pcs. For VZS3000 New: BG-VZS3000-1 (Groove gasket): Set of gasket 1 pc. and mounting screw 3 pcs.

AC Servo Motor Driver (SSCNET /H Type)

Pr.1 Setting value Set value set by PLC program (Unit) 0:mm 1 to 20(x10-2mm/min) 1:inch 1 to 20(x10-3inch/min) 2:degree 1 to 20(x10-3degree/min) (Note 1) 3:PLS 1 to 50(PLS/s) (Note 1) The command speed range by setting Pr.83 Speed control 10 x multiplier setting for degree axis" to valid: 1 to 20(x10-2degree/min). -64- Pr.9 Acceleration time 0, Pr.10 Deceleration time 0 Pr.9 Acceleration

E-P HYREG ® Series VY1

2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

VCL

(mm) 2 4 3 5 7 10 1/8 (6A) V V V V 2 1/4 (8A) V V V V 1/4 (8A) V V V V 3 3/8 (10A) V V V V V 1/2 (15A) V 1/4 ( 8A) V V V V Available types of electrical entry are either G, C and T.