Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

Vacuum Regulator

1 2 3 43 Description Pressure gauge Gauge nut O-ring R 1/8 23.5 3 breathing port 1 to 3 are assembled before shipment. 39.5 2-Color Display High Precision Digital Pressure Switch Part No.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Note 5) In case of an external pilot "R", indicate external pilot specifications "R" for the applicable valve also. L8 3 2 B4 1 B6 Stations B8 D side LM Note 1) For CM, indicate in the specification table. Note 2) Inch sizes use the following symbols. N3: 5/32 N7: 1/4 N9: 5/16 NM: Mixed Top ported elbows are LN and bottom ported elbows are BN.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

to 20 in/sec/50 to 500 mm/s Piston speed CJ1 Option (No additional charge on 7/8" and 1 1/4" bore) Rubber bumper CJP Not required (Pre-lubricated at Factory) Lubrication B, C, E, R Mounting CJ2 Note) R mount available on 3/4", 1 1/16", and 1 1/2" bore only.

AC Servo Motor Driver (Pulse input type/Positioning type ）

error 1-4 EDB 0 1 1 0 2A.5 Linear encoder error 1-5 EDB error 1 2A.6 Linear encoder error 1-6 EDB 2A.7 Linear encoder error 1-7 EDB 2A.8 Linear encoder error 1-8 EDB 2B Encoder counter 2B.1 Encoder counter error 1 EDB 1 1 1 0 2B.2 Encoder counter error 2 EDB error 30.1 Regeneration heat error DB (Note 1) (Note 1) 30 Regenerative error 30.2 Regeneration signal error DB (Note 1) 0 0 0 1 (Note

5 Port Air Operated Valve SYA3000/5000/7000 Series

5 Port Air Operated Valve SYA3000/5000/7000 Series How to Order A, B port size Thread type Thread piping One-touch fitting (Inch size) Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 Except for M5 One-touch fitting for NPTF T 5 32" One-touch

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

3 (R) 1 (P) 5 (R) 3 (R) 1 (P) e t q r w w q t r A B A B SY SYJ u u R P R R P R SX y VK 3 position closed center/exhaust center/pressure center VZ 3 position closed center VF (A) 4 (B) 2 w t q r VFR 5 (R) 3 (R) 1 (P) 3 position exhaust center A B (A) 4 (B) 2 VP7 5 (R) 3 (R) 1 (P) VP4 3 position pressure center u (A) 4 (B) 2 R P R (This construction shows a closed center.) 5 (R) 3 (R) 1 (P

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

Except for M5 N3 N7 N3 N7 N9 N9 N11 N9 N11 One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting One-touch fitting 5 32" 10-SY3000 Made to Order 3 position pressure center 1 4" 2(B) (A)4 5 32" Main valve fluororubber (Refer to page 169.)

C85

MB1 Rod cover Head cover N Head cover E Head cover F Head cover Y Cylinder tube Piston rod Piston A Piston B 1 1 1 1 1 1 1 1 2 1 1 2 1 2 1 2 1 1 q y u i o !0 !1 !2 !3 !4 (Switch type only) 2A CA2 2B (2 for switch type) 2C CS1 2D e r C76 Nickel plating Nickel plating 5A C85 (Switch type piston) 5B C95 C8520/25 Rubber cushion !8 2A o y !6 !9 u q r e !3 t !7 !5 !2 !4 i !

C85

MB1 Rod cover Head cover N Head cover E Head cover F Head cover Y Cylinder tube Piston rod Piston A Piston B 1 1 2 1 2 1 2 1 1 1 1 1 1 1 1 1 1 2 q y u i o !0 !1 !2 !3 !4 (Switch type only) 2A CA2 2B (2 for switch type) 2C CS1 2D e r C76 Nickel plating Nickel plating 5A C85 (Switch type piston) 5B C95 C8520/25 Rubber cushion !8 2A o y !6 !9 u q r e !3 t !7 !5 !2 !4 i !

SY3000/5000/7000/9000

For type W, DC voltage is only available. 1 4" One-touch fitting for N7 SY5000 X90 X20 Body ported external pilot (Refer to page 332.) 5 One-touch fitting for N9 5 16" Main valve fluoro rubber (Refer to page 332.)

5 Port Solenoid Valve Series SQ1000/2000

N3: 5/32 N7: 1/4 N9: 5/16 Top ports are indicated by LN. R Note 2) Note 1) Except double (latching) type Note 2) Except dual 3 port valve Note 3) When specifying two or more options, enter symbols in alphabetical order 25

Non-contact Gripper

P PL M ML C D XT661-2A-(R, L) M5 x 0.8 5 M2 x 0.4 3.2 20 XT661-4A-(R, L) M5 x 0.8 5 M4 x 0.7 5 32.8 40 XT661-6A-(R, L) M5 x 0.8 5 M4 x 0.7 5 47 60 XT661-8A-(R, L) Rc 1/8 M4 x 0.7 5 47 80 XT661-10A-(R, L) Rc 1/8 M4 x 0.7 5 47 100 ZP2 ZP2V ZP ZPT ZPR Dimensions [Low Profile Cyclone Type] XT661 XT661 XT661-3A-(R, L)-X260 XT661-2A-(R, L)-X260 1.6 Air supply port 1.6 Air supply port 20 1.8

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

1, Connection bracket q, w, Gasket r, O-ring t, u Plug-in type VVFS3000-2A-1 11 End plate (U side) assembly VVFS3000-2A-2 End plate (U) !1, Connection bracket q, w, Gasket r, O-ring t, u End plate (D) !2, Connection bracket q, w, Gasket e End plate (D) !

New

<<R Tp2 K I S R Q z 280 (32) U L H L G1/2 G1/2 E E U 1/4 Exhaust port H 1/4 Exhaust port F F G Port size 2 x P G Port size 2 x P Faston terminal A B D C J K I 11 Q R S L E U 1/4 Exhaust port H F G 2 x P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF21A< VXF22A< VXF23A< 3/4 1 1 1/2 40 47 77 73 84 132

VFS

2, Metal joint q, w, O-ring e, r, t, y, u VVFS5000-1A-2Plug-in type Non plug-in type !1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly End plate (D side) assembly Plug-in type Non plug-in type VVFS5000-3A-2 !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

exhaust cleaners AMC610-10 (Connecting port size R 1), AMC810-14 (Connecting port size R 1 1/2) (2) SY Note 1) With multi-connector, or with D-sub connector: 8 stations max.

Model: 1000 (VQC1000), Port Size: N9 (5/16 inch), Option: S (Direct EXH Outlet w/ Silencer)

Model: VQC1000, Port Size: 5/16 inch, Option: Direct EXH Outlet w/ Silencer