VK300

side of A port Nil 1 8 01 Rc VFN Nil Rc G NPT NPTF C4 4 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 F N T Same side of A port S C6 6 cassette Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station 20 20 stations P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve

125

(VEX312 only) Body size Port size Port 1(P), 2(A), 3(R) 12 01 1/8 02 1/4 Rated voltage VEX312 VEX332 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC * DC specification of type D and DO is only available with 12 and 24 VDC. 32 02 1/4 03 3/8 04 1/2 Foot bracket ( VEX312 and VEX332 only) F N* Pilot exhaust (PE) silencer

7ND9071en

(s) 6 0.3 18 1/4 6 mm or 1/4" 1.6* 1.6* 6 mm or 1/4" 1.0* 1.0* 9 0.6 37 1/4 6 mm or 1/4" 2.0 2.0 11 1.1 67 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm

42

Stations (1 to 12) C C kit (Plug lead type) 6.

VK3000

direction 01 1 station Solenoid on same side of A and B port A port: Rc 1/8 B port: Rc 1/8 Nil P port: Rc 1/8 Thread type R port: Rc 1/8 20 Type S42 Solenoid on same side of A and B port 20 stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (

VK300

Solenoid direction Port size Opposite side of A port Nil 1 8 Rc G NPT NPTF 01 Rc Nil C4 4 cassette F N T Same side of A port S C6 6 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station CE-compliant VV061 20 20 stations Q CE-compliant Nil P port: Rc 1/8 R port: Rc 1/8 VV100 Note) Applicable only for DIN terminal

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

N1, N2, F1, F2 Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight

VM

Lubrication Not required/Turbine oil #1 (ISO VG32) Rc(PT) (6A) 180g 1 8 Port size (Nominal size) Many actuator positions and Weight (Basic) orientation options. Model Model Actuator part No. VM830-01-00 Actuator Basic Roller lever Adjustable roller lever Adjustable rod lever VM830-01-01 VM-01F VM830-01-13 VM830-01-14 VM-13F VM-14F Actuator replacement is available.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

1 4 std. 3 8 std. 3 4 1 std. 1 std. 1 2 2 std. 2 3 5 6 8 9 B With bracket 1 Male thread D Drain piping (Except AMC220) (1) (2) 2 Female thread Note 1) Female thread: Available only AMC220, 320, 520.

IR1000/2000/3000

only) 0 1 Accessories None With bracket With pressure gauge Nil B G Regulating pressure range Port size For series IR1000/2000 Application Symbol Size 0 1 2 0.005 to 0.2MPa 0.005 to 0.4MPa 0.005 to 0.8MPa IR1000 IR2000 IR3000 01 02 03 04 1/8 1/4 3/8 1/2 Note) The air operated type is model IR2120 only.

REC

1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts No. No. Qty Description Material Remarks Description Material Remarks Qty 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Rod cover Cushion spear A q o 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Head cover Cushion spear B w !

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

5 Port Air Operated Valve

A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port

HRX-OM-S004

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal trip . 6-10 6.4 Other Errors . 6-11 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control

HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

PSxx-OMM0006CN

(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D

4/5 Port Air Operated Valve SYJA3000 Series

: SYJA5240-01 2 x 4.3 (For mounting) 44 2 x M5 x 0.8 (Pilot port) VGA 37.5 4 1 2 x M5 x 0.8 (Pilot port) 11 B A 5 VPA 1 A B 1 10 M5 x 0.8 (A, B port) 2 x 2.6 (For manifold mounting) 24 A B VPA3 19 1 P R Manual override 54 2 42 47 54 Manual override 23 20 15 3 11 2 x 2.6 (For mounting) 11.5 45 2 x 1.3 (Breathing port) 33.5 M5 x 0.8 (P , R1, R2 port) 21.5 6 6 P R1 17 17 15 8.5 R2 45.5 1/8 (

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

VDW

Types 10, 20 VDW 0 15A 1 2 6 65 (61.5) Series 1 2 8.5 (6.3) 10 20 Type 30 VCW20 12 01A 1 (IN) port 1/8, 1/4 2 (OUT) port 1/8, 1/4 Dimensions inside ( ) are for port size 1/8. 12.8 2-M4 x 0.7 Thread depth 6 17-2-67 8 Series VDW10/20/30 How to Order Manifold How to Order Manifold Assembly VV2DW 2 05 01 Enter the mounting valve and option part numbers under the manifold base part number.