SMC Corporation of America
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SS Hastelloy C-22 PCTFE (Option: Vespel) Flow Characteristics 2.

For replacement parts, refer to page 2-5-47. Refer to pages 2-5-40 to 2-5-43 for control unit.

For connector cable of M8 connector, refer to page 1-5-78. 1-5-6 7 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 SV SZ u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) SY y 3 position closed center/exhaust center/pressure center SYJ 3 position closed

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

C D B A 5 Standard Motor Series LJ1H10 Motor Output Slide Screw High Rigidity Direct Acting Guide 50W 20mm/20mm lead Horizontal Mount How to Order Stroke LJ1H101 SC 1 F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 1 2 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) F R L T B Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry Right

/4 1.125 1/4 5/8 1 15/16 5 2 3/8 5 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 5 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1/2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 3 1/4 1 3/4-16 1 1/8 1.5 1/4 3/4 2 3/8 5 7/8 2 5/8 3 1/4

7/16-20 3/4 1.125 1/4 5/8 1 15/16 5 2 3/8 5 5 1/2 1/2 5/8 2 1/4 1 1/2 7/16 6 6 1/2 3/4 3/4 2 3/4 1 5/8 7/16 2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 5 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 5 2 3/8 2 1/2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 5 2 3/8 3 1/4 1 3/4-16 1 1/8 1.5 1/4 3/4 2 3/8 5 7/8 2

4w@2 !8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

2 6 7 Long stroke 5[-2.5] 4.5[-2] 10[-7.5] 12[-9.5] 5 5.5 9 10 5 5.5 9 10 7 6 11.5 13.5 9 9.5 13 14 11 10.5 16 18 9 9.5 13 14 12 16 20 25 11 10.5 16 18 19.5 21.5 25 27 1 0.5 6 8 17 19 22.5 24.5 7 6 11.5 13.5 Bore size (mm) Anti-lateral load 1[3.5] 0.5[3] 3.5[-1] 5.5[-3] 6 5.5 9 10 12 16 20 25 0.5 1 5 7 6 5.5 9 10 0.5 1 5 7 17 19 22.5 24.5 10 9.5 13 14 5 5.5 9.5 11.5 5 4.5 0.5 1.5 10 9.5

to Order F = (C x 1.8) + 32 1l/min = 0.0353SCFM IDG 30 M 03 Optional specifications Size Symbol Contents Size 3 3 5 10 20 30 50 60 75 100 5 Standard Nil 10 With fitting for purge air discharge 20 30 50 60 75 P Note 2) Note 1) Note 2) Note 2) Note 2) Flow direction (rightleft) R S Standard equipment With dew point indicator In case of two or more options, indicate them in an alphabetical

[C] HRS100-W-20/40(60 Hz) HRS100-W-20/40(50 Hz) 14 14 Facility water temperature 32C 12 12 Cooling capacity [kW] Cooling capacity [kW] Facility water temperature 32C 10 10 8 8 6 6 4 4 Facility water temperature 40C Facility water temperature 40C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRS150-A-20/40(50 Hz) HRS150-

C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-3 2.2.1 HRL-A-40 (Air-cooled type) . 2-3 2.2.1 HRL-W-40 (Water-cooled type) . 2-3 2.3 Function of Parts . 2-5 Chapter

(PA/B) 4/25/3 (A/BEA/EB) Valve model (P, EA, EB) 4, 2 (A, B) 1, 5, 3 4position dual 3 port Cv b C [dm3/ (sbar)] Cv b C [dm3/ (sbar)] N.C.

2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

M5 thread Coil voltage VQ0 2 position single Note) See Options" on p.1.10-67 for inch size One-touch fittings. 1 2 3 4 5 6 100V AC (50/60Hz) G: Grommet C kit single only.

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

The Remote cannot be reset when the power supply is not connected. (5) Confirm that the radio button "Pairing mode" is checked. (4) (3) (5) Pairing check window (Wireless Remote (1)) -87No.EX-OMV0017-C STEP 5 Change of parameter setting (Wireless Remote (2)) (1) Hold the NFC reader/writer over the Wireless Remote (2).

Users equipment 2 1 2 Circulating fluid outlet Oscillator CH1 2 2 Circulating fluid return port 3 5 4 5 Circulating fluid outlet Optical system CH2 5 5 Circulating fluid return port No. Description Size Recommended part no.