Series VQ Metal Seal/Rubber Seal Body Ported

M5 thread Coil voltage VQ0 2 position single Note) See Options" on p.1.10-67 for inch size One-touch fittings. 1 2 3 4 5 6 100V AC (50/60Hz) G: Grommet C kit single only.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)

Auto Switch Guide

PC Connector model M83 pin M84 pin M124 pin 1 2 1 4 Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

15

Description 2 Ring 1 1 1 2 Ring 1 3 Hub (Motor side) 1 1 1 1 1 1 3 Hub (Motor side) 1 1 4 Hexagon socket thin head cap screw 1 1 1 1 1 1 4 Hexagon socket thin head cap screw 1 1 5 Hexagon socket head cap screw 4 4 4 5 Hexagon socket head cap screw 4 840 LEJS Series Auto Switch Mounting Auto Switch Mounting Position (C) B (Table center) LEF LEJ LEL LEM LEY LES A LEPY LEPS [mm] LER

Title not found

Connector C (14.2) Cable length (L) 1 3 5 8 A B C (16.6) (23.7) (6.5) Connector A (12.7) (5.6) 1 3 2 4 1.5 m 3 m 5 m 8 m 3 2 1 (13.5) 1 4 A 1 2 (18) B 10 m (6.5) (14.7) 15 m 15 16 (30.7) (11) L Connector B 20 m (10) Connector D Produced upon receipt of order Connector C terminal no. 1 2 3 Connector A terminal no. 1 2 3 Circuit Cable color U V W Red White Black Connector D terminal no. 12

C85

2 !3 !4 !5 !6 !

HRS100/150

outlet, circulating fluid return port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

size C4 (4 Onetouch fitting) C4 (4 One-touch fitting) A, B port C6 (6 One-touch fitting) M5 x 0.8 Flow Rate Characteristics Flow rate characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55

I

ISE5-02-27L Two Output NPN Open Collector 30V, 80mA ISE5-02-67L Two Output PNP Open Collector 80mA ZSE5B02 L O P T I O N S L 3m W I R I N G S P E C I F I C AT I O N S Non-Backlit (Std) B Backlit LCD S W I T C H S P E C I F I C AT I O N S P I P I N G S P E C I F I C AT I O N S 26 Analog 3-Wire 27 2 Output (NPN) 4-Wire 67 2 Output (PNP) 4-Wire 02 PT 1/4 T2 NPTF 1/4 T E C H N I C A L SPECIFICATIONS

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 10 75 90 100 110 D-A9lV n (n = 2, 4, 6, 8) Note 1) 10 + 30 (n 2) 2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (

MGP

YY depth YL 6H7 depth 10 b a 6H7 c d X 0.02 X 7 e 6H7 5 10 (mm) e 22.5 30 Bore size (mm) 80 100 d 8 10 c 12 13.5 b 20.3 23.3 a 13.3 15.3 Section XX detail WB Section XX Z WA HA: T-slot for hexagon bolt 2-cushion valve (width across flats 4) 4-OA through 4-OB depth of counter bore 8 4-MM depth ML 4-NN through Section XX L WA Z Section XX X 0.02 X 0.02 R DA DB T U VB VA X H PW 2-Rc 3/8 GB GC

VFR

(4) Weight (kg) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Type of actuation C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv (B) (A) 4 2 (B) (A) 4 2 Plug-in Non plug-in 2 position 3 position 4.73 (4.56) VFR611 VFR610 40 0.12 9.1 41 0.15 9.6 2 Single 3 4 100 or less (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 100 or less 4.78 (4.61) 40 0.14 9.2 41 0.17 9.7 VFR621 VFR620 3 4 Double Double Exhaust

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

1 5 10 20 0.5 1 5 10 20 Load (kN) Load (kN) 27 Hydraulic Cylinder Technical Data Series CH2E/CH2F/CH2G/CH2H Limit stroke charts/Bore sizes 50, 63, 80, 100 Bore size 50 B rod C rod 2000 5 2 4 8 3 7 2 4 8 3 7 5 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B rod C rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50

ARM10/11

C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

ARM10/11

C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

energy saving effect

Cooling Capacity HRSH100-A-20/40HRSH100-W-20/4014 16 Ambient temperature 32C Facility water temperature 32C 14 12 Cooling capacity [kW] Cooling capacity [kW] 10.5 10 11.5 12 10 Ambient temperature 43C 8 8 Facility water temperature 40C 6 6 Ambient temperature 45C 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH150

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 95 (n 4) 2 15 + 40 (n 2) 2 80 + 40 (n 4) 2 85 + 40 (n 4) 2 (n 4) 2 (n 4) 2 D-M9/M9W 80 + 40 95 + 40 90 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

MG

@3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.