3 Port Air Operated Valve

VZA Common EXH VFA 2(A) port 1/4 1(P) port 1/4 3(R) port 1/4 VFRA 2 to 20 stations VPA300 VV3PA3-42 VPA4 SYJA Individual EXH VZA 1(P) port 1/4 2(A) port 1/4 3(R) port 1/4 VTA VGA VV3PA5-41 VPA VPA VPA3 Common EXH Air operated valve Base mounted 1(P) port 3/8 3(R) port 3/8 2(A) port 3/8 2 to 20 stations VPA500 P. 1569 VV3PA5-42 Individual EXH 1(P) port 3/8 3(R) port 3/8 2(A) port 3/8 VV3PA7

Clean Regulator

ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

IIIIIII

H J K u 1 5 7 {40) 1 1 8 1 0 0 0 8 ( 3 0 1 0 2 ) 1 8510008 (47 lO 2t 1 3 2 {33 5) ) 7 1 I t a t 0 9 6 t24 E\ r 1 8 t30l 1 3 0 7 5 ) 0 7 5 fi9 0 008 o2l , 2 C (s) 224 157) Millimeters in Parentheses Millimeters in Parentheses NVM830-N01-13 Nylon Roller Loosen hex socket screw and adjust NVM830-N01-14 Rod may b6 bent: bending is 0 39" {1 omm) I I J F O F 0 5 1 l b s ( 0 2 3 k q ) F O F ' 4

Mechanical Valves Series NVM, NVFM, NVZNI

H J K u 1 5 7 {40) 1 1 8 1 0 0 0 8 ( 3 0 1 0 2 ) 1 8510008 (47 lO 2t 1 3 2 {33 5) ) 7 1 I t a t 0 9 6 t24 E\ r 1 8 t30l 1 3 0 7 5 ) 0 7 5 fi9 0 008 o2l , 2 C (s) 224 157) Millimeters in Parentheses Millimeters in Parentheses NVM830-N01-13 Nylon Roller Loosen hex socket screw and adjust NVM830-N01-14 Rod may b6 bent: bending is 0 39" {1 omm) I I J F O F 0 5 1 l b s ( 0 2 3 k q ) F O F ' 4

V

5 ~ 60C / 40 ~ 40F Temperature Rc(PT) 1/8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc

NCQ8

-3/4 1-7/8 2 2-7/8 3-1/8 3-3/8 3-5/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2-3/4 3 3-1/4 3-1/2 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2-3/4 3 3-1/4 3-1/2 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-7/8 3-1/8 3-3/8 3-5/8 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 3 3-1/4 3-1/2 3-3/4 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/8 3 3-1/4 3-1/2 3-3/4 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Controlled flow Free flow Model Port size Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 90 1/8 340 0.94 250 0.7 115 1/4 1/4 810 2.3 0.35 0.2 810 2.3 130 3/8 1/4 1670 4.6 1670 4.6 225 3/8 1/2 Note

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

center/pressure center 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 4 (A) 5 (EA) 1 (P) 3 (EB) 2 (B) 5 (EA) 1 (P) 3 (EB) Parts list 2 position single with back pressure check valve Material Note Description No.

Series AP500

) Connections 1/2, 3/4 inch face seal, 1/2, 3/4 inch tube weld 3.

VSA4

0.31 0.31 0.30 0.33 b 0.34 0.47 0.51 0.34 0.47 0.51 0.34 0.44 0.48 0.33 0.48 0.53 Cv 1.0 1.2 1.4 1.0 1.2 1.4 1.0 1.2 1.3 1.1 1.2 1.3 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 Rc VSA4120-01 VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double

IR1000/2000/3000

8 L Rc(PT) 1/4 X1 Port size Rc(PT) 3/8 IRM Rc(PT) 1/2 Refer to page 8 for details.

Table of Contents

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Manual override P L 5 24 VDC 02 Rc 1/4 (8A) Rc 3/8 (10A) 9 Other 03 3-9-1 2 Series VS410 Accessory (Option) Apparent Power (Power Consumption) 1.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

SZ3000

0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !0 5 (EA) 1 (P) 3 (EB) 4(A) JIS symbol 3 position closed center (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i 3 position exhaust center (A) 4 (B) 2 3 position closed center/exhaust center/pressure center 5 (EA) 1 (P) 3 (EB) w e q r t y u o !

Free Mount Cylinder

Note Contents 20 1 CU20A-PS Hard anodized Aluminum alloy Cylinder tube 1 25 2 CU25A-PS Hard anodized Rod cover/Bearing Aluminum bearing alloy 13, 14, and 15 1 32 3 CU32A-PS Clear chromated Head cover Aluminum alloy 1 4 Chromated Piston Aluminum alloy 1 5 Piston rod Stainless steel 1 6 Phosphate coated Snap ring Carbon tool steel 1 7 Nickel plated Rod end nut Carbon steel 1 8 Cushion needle

A_HEC-OM-J017

HEC ii CONTENTS CONTENTS Pages 1 Preparation for Communication -1-1 2 Specifications of Communication Method -2-1 3 Communication Format -3-1 3.1 Control code used for communication -3-1 3.2 Command code list -3-1 3.3 Communication procedures and format -3-2 3.4 Calculation of checksum -3-3 4 Details of Communication format -4-1 4.1 Temperature setting (without writing EEPROM) -4-1 4.2 Reading

Direct Solenoid

hd'd.3 p, (1)n at'r@. duodel l l (1) d.r 1s, (2) d.r9, {2) rbr 10, & 0 ) .rr 3 sc0001 6B &l4ilcpssy indLd6ep, (1) 6*.drcn-l@kir'9 opoErord6r r2, (r ) d6r r 5, {2) d6r 9, {2}d6t 10, & sc@02 6C &lsFrd ep *Ey indude. c.p, (1) ruhbr.c.* plugd.l 1 1, 11) hdr.iorrishtsl. dst 13 a 14, (1) (h 1s, {2) .bi 9, l2) d.t 10. & d ) de13 tld@tvos t"t sc 0@3.)o( a0 So|mij ep aEy. indld6 @p, (l ) Eesd M]oding

LEC-OM02704CN

CC-Link 5 19 5 (4) CC-Link CC-Link (a) 1 (RYn1)(RYn2) DWELL 0 1 3 1 1 3 DWELL 0 1 1 1 5 20 5 (b) , 1 2541 255 0 DWELL 0 1 DWELL [ms](1) 1 0 1 2 0 1 3 0 0(2) 4 0 1 5 0 1 6 0 1 7 0 0(2) 1. 0 2. ,02 5 21 5 1 2 3 4 (1) DWELL [10STMm] [ms] [ms] [r/min] [ms] 1 5.00 3000 100 150 0 1 2 3.00 2000 0 3 3 10.00 1000 0 1 4 6.00 500 0 2(2) 1. 0 2. ,02 0 2 No.1 (100) No.1 (150

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated