Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 10 18.5 1/4" 13.2 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8

Stainless Steel 316 Fittings

51 37 41 50 41 45 57 42 43 53 72 78 12.5 15.9 12.5 15.9 13.6 17 15.8 19.2 19.6 20.9 21.3 24.5 20.9 21.3 24.5 20.9 21.3 24.5 20.9 21.3 24.5 24 27.2 13.8 15.6 13.8 15.6 16 17.8 20.4 2.5 4 1.6 1.8 8 5 10 13.5 3 4 2.6 2.3 Applicable tube L1 M 6 4 6 10 5.8 10 15 3.3 H1 12 d 6 8 14 6.6 12 5.3 17.4 16 22.2 A L2 23 H2 25.6 10 7.5 6.8 26 Connection thread 27.5 17 7.6 15 20.9 27 25.6 8 10 7.3 30 27.5

One-touch Fittings Series KQ2

L D A M Nylon Urethane 3.2 KQ2R23-04 KQ2R04-06 4 6 2 2.1 9.6 33.5 34.5 3.4 2.9 18.5 17.5 15.5 10.4 4 KQ2R04-08 36.5 5.6 5.6 2.3 8 18 16 KQ2R04-10 12.8 39.5 3.6 10 18.5 KQ2R06-04 4 3 12.8 37 4 4 21 6 KQ2R06-08 37 3 8 18.5 17 KQ2R06-10 12.8 39.5 13.1 13.1 3.5 10 18.5 KQ2R06-12 42 15.2 5.2 12 20 8 KQ2R08-10 15.2 41 26.1 18.0 4.5 10 20 18.5 KQ2R08-12 42 5.1 12 12 KQ2R10-12 17 42 41.5 32.8 33

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41 69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

41 8 18.5 15.2 79 R3/8 19 23 9.5 1.5 47.4 19.8 52.6 79 19.8 52.6 AS321F-03-10ST AS321F-N03-09ST 18.5 1.5 47.4 5/16" 15.2 29.5 41 NPT3/8 19 23 9.5 31.8 43.3 10 21 18.5 81 81 AS321F-03-12ST AS321F-N03-11ST 21 3/8" 17.9 31.8 43.3 32.8 44.3 12 22 20.9 83 141 AS421F-04-10ST AS421F-N04-11ST 21 3/8" 17.9 33.6 47.9 33.6 47.9 10 21 18.5 141 24 28.6 12 1.5 55.8 1/2" NPT1/2 23.8 21.7 28.6 12 35.2 49.5

OMU0023

Modbus ASCII protocol (ASCII notation) Request data : 01 08 0 1234 B1 [CR,LF] Response data (normal response) : 01 08 0 1234 B1 [CR,LF] (ASCII hexadecimal notation) Request data 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah Response data (normal response) 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah ii.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

25 41 49 36 42.5 8 30 26 36 78 74 18 44.5 46 Inch Size Applicable tubing O.D.

Vacuum Unit

Symbol Type Note Nil Without option Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" When R is selected for q, P needs to be selected.

CL

66 22 16 52 14 7 21 47.3 82 4 Up to 500 24 76 90.5 8 70 100.5 11 Boss-cut Bore (mm) PH GL H2 H1 K I NA N S PW ZZ Z PG P NN MM ZZ PL H GR GQ Bore (mm) 20 168 1/8 1/8 1/8 1/4 20 24 15 20 22 5 37 28 181 8 4 6 M20 x 1.5 38 4 5 127 41 M8 x 1.25 19.5 25 182 25 30 24 15 27 5.5 41 33.5 195 7 8 M26 x 1.5 41 9 7 6 137 45 M10 x 1.25 24 32 184 32 34.5 24 15 27 5.5 41 37.5 8 197 7 M26 x 1.5 41 9 7 6

CL

66 22 16 52 14 7 21 47.3 82 4 Up to 500 24 76 90.5 8 70 100.5 11 Boss-cut Bore (mm) PH GL H2 H1 K I NA N S PW ZZ Z PG P NN MM ZZ PL H GR GQ Bore (mm) 20 168 1/8 1/8 1/8 1/4 20 24 20 15 22 5 37 28 181 4 8 M20 x 1.5 38 4 6 5 127 41 M8 x 1.25 19.5 25 182 25 30 24 15 27 5.5 41 33.5 195 7 8 M26 x 1.5 41 7 9 6 137 45 M10 x 1.25 24 32 184 32 34.5 24 15 27 5.5 41 37.5 197 7 8 M26 x 1.5 41 7 9 6

20

VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 12 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 3 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 4 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: M5T (M5X0.8 NPTF)