3 Port Air Operated Valve

11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 Type 42/Individual exhaust: VV3PA5-423-03 Stations (Pitch) P = 33 3/8 3(R) port 31 28.5 3R 3R 12 92.5 2 x 7.2 (For mounting) N.C.

LEC-OM07605CN

(2) ()40 10(555) (10.1) P A = (10.1) K T 2] A: [m P: [W] T: [] K: [56] (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10. 10.3 101 1000 EM1(1) EM1(1) LECSS2-T 400W [Pr. PF06][Pr.

Electric Actuator

to 500 10 LEFS16 100 to 400 10 4 5 to 250 5 Series LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (

SMC

10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44 G 15 15 15 15 15 19 37 41 19 N 4 4 4 4 6 6 6 8 8 NA 2 2 2 2 2 2 4 4 4 HA 35 35 35 35 35 70 70 76 88 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA 169 223 275 13-/22-MXS20L-10 13-/22-MXS20L-20 13-/22-MXS20L-30 13-/22-MXS20L-40 13-/22-MXS20L-50 13-/22-MXS20L-75 13-/22-MXS20L-100 13-/22-MXS20L-125

JXCx-OMT0062

Please refer to 10. Memory map for details of each signal.

Mini Free Mount Cylinder

Allowable kinetic energy (J) Applicable bore size (mm) Bolt Proper tightening torque (Nm) 3.8 x 10-3 6.25 x 10-3 9.35 x 10-3 12.5 x 10-3 0.030 0.053 0.077 0.54 20% (0.432 to 0.648) 4 M2.5 x 0.45 6 8 10 12 16 (Supply pressure: P = 0.5 MPa) 1.06 20% (0.848 to 1.272) M3 x 0.5 100 3.27 20% (2.61 to 3.92) M4 x 0.7 10 20 16 12 10 Load mass m1 + m2 (kg) 6.6 20% (5.28 to 7.92) 20 M5 x 0.8 Torque

48

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 51 5 2 101 10 D-M9W 1 52 2 102 10 D-M9WV D-M9AV 1 52 2 10 D-M9A 1 52 2 102 1 Confirm that it is possible to secure the min. bending radius of 10 mm of the

Model Selection 1

] (170) 0.7 0.8 0.75 Subsonic [660] (164) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg

ITV

(Maximum 10 stations) Example) IITV00-05-07 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.

CC

Conditions: Operating pressure 0.5MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1m AS420-02, 03, 04 AS500-06 AS2000-01, 02 AS600-10 AS3000-02, 03 AS4000-02, 03, 04 Circuit 4.12-12

Air-hydro Unit

Bore size (mm) Bore size (mm) AS2000-01/02 AS600-10 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load Load ratio Load ratio Bore size (mm) Bore size (mm) AS4000-02/03/04 AS3000-02/03 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Circuit diagram No load No load No load No load Load ratio

IP8101 Series

to 10 (832) Integrated time setting; -10 to 10 (833) Differentiation time setting; -10 to 10 Table 12 Amount of change when set value is increased/ decreased by 1 Set value is 0 or more Set value is less than 0 Prop. gain 10% 10% Integ. time 50% 10% Deffer. time 10% 10% 8: When automation calibration is performed, PID constant is automatically set.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Specifications Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50 (No freezing.

PSE200

Pressure sensor/Sensor range Sensor supply pressure (Compound pressure) (Vacuum) (Low pressure) (High pressure) 101 to 101kPa PSE533 10 to 101kPa 10 to 101kPa 0.1 to 1MPa Regulating pressure range PSE531 PSE532 PSE530 Applicable pressure sensor SET If the controller is equipped with a unit switching function, unit setting can be changed.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

V

Hg L 400mm Hg 1 Torr = 0.0197PSI I N L E T P O R T 10 10mm Tube 12 12mm Tube 16 16mm Tube 03 Rc3/8 04 Rc1/2 T03 3/8NPTF T04 1/2NPTF 10 10mm Tube 12 12mm Tube 02 Rc1/4 03 Rc3/8 T02 1/4NPTF T03 3/8NPTF Courtesy of Steven Engineering, Inc. !

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

Low Friction Cylinders Series MQ

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 10 20.5 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 16 22.5 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 20 24.5 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 25 33.5 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 30, 40 40.5 22 Applicable bore size (mm) Part no.

MQQ

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 10 8 9.2 6 15.5 5 10 9.2 M5 x 0.8 4 20.5 8 16 8 9.2 8 16.5 6 16 11.5 M6 x 1.0 5 22.5 10 20 8 9.2 10 18.5 6 20 15 M8 x 1.25 5 24.5 13 25 10 11.5 12 22.5 11 25 19.6 M10 x 1.25 6 33.5 17 28 14 16 16 28.5 12 28 25.4 M14 x 1.5 8 40.5 22 Applicable bore (mm) Part no.