VXA31/32

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly.

CC

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AS2000-01/02 AS600-10 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load Load ratio Load ratio Bore size (mm) Bore size (mm) AS4000-02/03/04 AS3000-02/03 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Circuit diagram No load No load Load

HRX-OM-Z002

HRLE -TF1Z055UK UK DECLARATION OF CONFORMITY SMC Corporation, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN, declares under its sole responsibility, that the following equipment: Thermo Chiller HRLE Series Serial No.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 3) Polyurethane is only applicable for the ZFC050-02. SP ZCUK Made to Order (Refer to page 1115 for details.)

ITV

D side 1 2 3 PWR ERR PWR ERR PWR ERR 1 3 DIN rail 1 3 ITV0030-3MS ITV0030-3ML 14-8-3 4 Series ITV0 Specifications ITV001 ITV003 ITV005 ITV009 Model Min. supply pressure Set pressure +0.1 MPa Set pressure 1 kPa Max. supply pressure 1.0 MPa 0.2 MPa 101 kPa Regulating pressure range 0.001 to 0.1 MPa 0.001 to 0.9 MPa 0.001 to 0.5 MPa 1 to 100 kPa 2 /min(ANR) (Supply pressure: 101 kPa) 3.5 /min

Table of Contents

For details, refer to page 8-11-101.

Pressure Sensor for General Fluids

g -12No.PS-OMG0006-D Analogue output Range Rated pressure range A B C For vacuum 0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -100 to 100 kPa -100 kPa 100 kPa 0 to 1 MPa 0 1 MPa -0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0006-D Dimensions PSE5601 , PSE56N01 02 N02 Be sure to release the air in the air tube of the cable to the atmosphere.

HRX-OM-R039

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

HRS100/150

Model Heat radiation [kW] Facility water specifications HRS100-WApprox. 19 Refer to "Facility water system" in the specifications on page 101. HRS150-WApprox. 28 Tap Water (as Circulating Fluid) Quality Standards The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulation type Make-up water 2.

REA/REB

AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 Adjustment of Cushion Effect (Smooth Start-up, Soft Stop) Caution Since the external slider and piston slider are directional for size 10, refer to the drawings below when performing disassembly or maintenance.

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 6 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 02 (1/4)

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 2 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 02 (1/4)

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 3 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 02 (1/4)

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 3 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 02 (1/4)

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 4 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 02 (1/4)

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 4 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 02 (1/4)

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 02 (1/4)

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 5 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 02 (1/4)

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 02 (1/4)

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 02 (1/4)