LEC-OM07605CN

PB07 ] () 4 1 8 1 (1+) 6 16 6 6.5 2 X-Y22 (1) 2 1 2 21 (a) PB06 GD2 PB08 PG2 PB09 VG2 PB10 VIC (b) PA09 RSP PB07 PG1 (2) 2 2 2122 ([Pr. PB06]) 22 (a) PB08 PG2 PB09 VG2 PB10 VIC (b) PA09 RSP PB06 GD2 PB07 PG1 6 17 6 (3) 2 2[Pr. PB07] 1 1 2 [Pr. PA09] 1 3 4 21([Pr. PA08]:_ _ _ 0) 21( ) 5 22([Pr. PA08]:_ _ _ 4)([Pr. PB06]) 6 7 (4) [Pr.

AS-FG/ASD-FG

AS321FG-N03-11 61 22 32.8 44.3 20.9 12 17.9 3/8" 21 59 33.6 47.9 AS421FG-04-10 AS421FG-N04-11 100 21 33.6 47.9 18.5 10 17.9 3/8" 21 100 R(PT) 1/2 NPT 1/2 23.8 25.4 28.6 50.1 57.6 25.4 24 49.6 57.6 50.1 49.6 42.1 42.1 28.6 35.2 49.5 AS421FG-04-12 AS421FG-N04-13 101 22 34.6 48.9 20.9 12 21.7 1/2" 22 101 Reference dimensions for threads after installation.

smcmaintenancepartslist

Contents Bore size (mm) 20 25 32 40 50 63 80 MGZ20-PS MGZ25-PS MGZ32-PS MGZ40-PS MGZ50-PS MGZ63-PS MGZ80-PS @0 21 Rod seal A Rod seal B 21, 22, 23 and 24 are non-replaceable parts, so they are not included in the seal kit.

One-touch Fittings Series KQ2

20 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note) ( ): Values for soft nylon.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

43.3 61 22 32.8 44.3 20.9 17.9 12 3/8" 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100 21 33.6 47.9 18.5 17.9 10 3/8" 21 100 NPT 1/2 23.8 25.4 28.6 50.1 57.6 25.4 24 49.6 57.6 50.1 49.6 42.1 42.1 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 34.6 48.9 20.9 21.7 12 1/2" 22 101 Reference dimensions of M5 x 0.8, R threads after installation.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

48

M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5

Series AP500

500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

VM

Panel mounting hole Push button (Extended) VFM350-02-32R/B/G/Y (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. (EXH port) 2-4.2 mounting hole (SUP CYL port) 1.7 mm O.T. 6.5 mm T.T. Panel mounting hole Push button (Flush) VFM350-02-33 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 12 20.9 3/8" 17.9 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100 21 33.6 47.9 10 18.5 3/8" 17.9 21 100 NPT 1/2 28.6 24.5 23.8 42.1 56.7 49.2 56.7 49.2 49.6 24 49.6 42.1 24.5 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 35.2 49.5 12 20.9 1/2" 21.7 22 101 Note 1) Reference dimensions Note 2) Reference dimensions of M5 x 0.8, R threads

ZP

H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 1.7 12 12 15 5 6 21 29.9 46 3 ZPR13UT 13 14 ZPR13 1.8 13 1.5 ZPR16UT 16 17 ZPR16 18 16 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

43.3 61 22 32.8 44.3 20.9 17.9 12 3/8" 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100 21 33.6 47.9 18.5 17.9 10 3/8" 21 100 NPT 1/2 23.8 25.4 28.6 50.1 57.6 25.4 24 57.6 49.6 50.1 49.6 42.1 42.1 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 34.6 48.9 20.9 21.7 12 1/2" 22 101 Reference dimensions of M5 x 0.8, R threads after installation.

VQC

0 (Terminal block) T Kit 21 Note) Drawing shows VQC1000 type. VQC Base-Mounted Type Manifold Exploded View Manifold Assembly Part No. Housing assembly and SI unit/Input block Description Note Applicable model Part no. No.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

47.9 21 100 17.9 24 28.6 49.2 49.6 42.1 1/2 24.5 56.7 (23.8) AS421F-04-10 AS421F-04-13 10 1/2" 18.5 21 47.9 33.6 35.2 100 49.5 22 101 21.7 24 56.7 49.2 49.6 42.1 24.5 28.6 1/2 (23.8) Note 1) ( ) are the dimensions of NPT thread.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

61 32.8 23 5/16" 3/8 AS321F-03-11 AS421F-04-10 31.8 47.9 10 17.9 18.5 43.3 21 59 21 100 33.6 3/8" 24 (23.8) 24 (23.8) 1/2 28.6 25.4 57.6 42.1 49.6 50.1 AS421F-04-11 AS421F-04-12 33.6 17.9 48.9 12 47.9 21 20.9 100 22 101 34.6 3/8" 28.6 50.1 42.1 25.4 57.6 49.6 1/2 AS421F-04-13 35.2 21.7 49.5 22 101 Note 1) ( ) are the dimensions of NPT thread.

JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e CD J l B BB C F GA GB M NA NB P R S LH LT LW LX X Y Z SS f Q B-rod C-rod B-rod C-rod 32 34.5 15 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 13 13 88 29 14 98 57 52 25 to 1400 40 23 15 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 52 52 25 to 1400 1/3.5 stroke 50 28 15 M10 x 1.25 76 145 52

Intrinsically Safe Valve

21 1.9 79.6 21 73 42 B B B B 11.1 31.5 6 x 1/4" {P(1), EA(5), EB(3) port} 55.2 M5 x 0.8 (External pilot port) 21 (Pitch) P = 19 Stations 1 n 2 81.5 56.2 52.8 A A 9.4 41 28.9 B B 7 2n x 1/4" {A(4), B(2) port} (Pitch) P = 19 24 L-type plug connector with cover (LL) 53-SS5Y7-42Terminal type (TT) 53-SS5Y7-42L (Lead wire length) 120.5 37.1 L (Lead wire length) 81.5 Stations Stations 81.5 53.5

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

15 14.5 21.5 17.5 22.5 24.5 11.5 13.5 16.5 17 23.5 19.5 63 13.5 14.5 17.5 24 20 25 26 18.5 25 21 80 14 17 13.5 16.5 17.5 24 20 25 28 17 20 20.5 27 23 100 17.5 20.5 17 21 21 27.5 23.5 28.5 32.5 21.5 24.5 25 31.5 27.5 Auto switch mounting heights (mm) Auto switch type D-F5, D-J5 D-F5W, D-J59W D-F5BA, D-F5F D-F5NT D-A3 D-G39 D-K39 D-A5, D-A6 D-A59W D-B5 D-B6 D-A44 Bore size (mm) Hs Hs Ht Hs

5 Port Solenoid Valve, Series VQC

Note) Drawing shows VQC1000 type. 21 Base-Mounted Type Manifold Exploded View Series VQC Manifold Assembly Part No.