Manifold Type: 30 (Top Ported Common EXH), Stations: 4 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

MY1

30 30 Data 20 20 20 1.

Compact Cylinder Series CQS

Cylinder model C Mounting bolt size M3 x 25L x 30L M3 x 25L x 30L M5 x 25L x 30L M5 x 30L x 35L D 25 30 25 30 25 30 30 35 CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S 6.5 6.5 Single acting, Spring return Single acting, Spring extend CUJ 6.5 Mounting bolt Mounting bolt CU 8.5 CQS Single Acting, Spring Extend Cylinder model Mounting bolt size C D 25 30 25 30 25 30 30 35 CQ2 CQSB12

VCL

66.5 68 99 VCB31 86 30 50 1/2 15 13.5 36.5 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 17 41 11 M5 36 22.5 23 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 M5 36 25 23 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 17.5 17 41 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 332 Direct Operated 2 Port Solenoid Valve For Steam Series VCS Series VC How to Order Valves

90

ZK2(Ejector System) 100 90 80 70 60 50 40 30 20 10 0 0 5 10 15 20 25 30 Suction flow [L/min (ANR)] 0.5 40 Release flow [L/min (ANR)] Vacuum pressure [kPa] Supply pressure [MPa] 0.4 0.35 0.3 30 20 0.2 10 0 0 1 2 3 4 5 6 7 8 9 10 Needle opening [Number of rotations] The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

: A10 Symbol: A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H

Air Cylinder

30 31 30 34 30 30 30 30 30 38 30 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 34 34 35 34 38 34 34 34 34 34 42 34 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 41 41 41.5 41 44 41 41 41 41 41 49 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 49.5 49 50 49 52.5 49 49.5 49 49.5 49 56 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 58.5 56 61 56 56.5

Free Mount Cylinder Series CU

S Z (mm) S Z T QA R Q A A1 P GB MM B C D E GA L J H GC Bore size 5 30 40 50 5 10 15 20 25 30 40 50 15 20 25 10 4.5 2 16 12 9 4 20 16 12 11 5.5 4.5 26 20 40 32 8 6 30 27 6 5 16 14 19 16 22 19 21.5 19 116 126 135 145 M6 x 1.0 M5 x 0.8 14 12.5 40 36.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 100 88.5 110 98.5 93.5 103.5 108.5 113.5 7.6 depth 6.5 105 115 120 125 9.5 depth 8 88 93

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H Symbol: A25 Symbol: A26 Symbol: A27 Symbol: A28 Symbol

Vacuum Module Series ZX

ZH Operation Solenoid valve/Air operated valve ZU Power supply voltage 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) ZL Vacuum pressure switch unit Series ZS Adsorption confirmation switch Vacuum switch Adsorption confirmation switch Vacuum switch Series ZY Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa ZF 3% or less 0.5 kPa Hysteresis 2 to 25 0.3 to 1.2 2

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Vacuum Pressure Switch ZQ1-ZS A Vacuum pressure switch specifications Check valve Note 3) EA EB EC EE FA FB FC FE 0 to 101 kPa/NPN open collector 2 outputs, with suction filter 0 to 101 kPa/PNP open collector 2 outputs, with suction filter 0 to 101 kPa/NPN open collector 1 output + analog voltage, with suction filter 0 to 101 kPa/PNP open collector 1 output + analog voltage, with suction

Multi-channel Digital Sensor Monitor ( compatible)

PSE202A-(M)# IO-Link/NPN open collector 1 output + NPN open collector 4 output specification When used as an IO-Link device Max. 30 V, 80 mA Residual voltage 1.5 V or less When used as a switch output device Max. 80 mA Residual voltage 1.5 V or less -18No.PS-OMW0012-C PSE203A-(M)# IO-Link/PNP open collector 1 output + PNP open collector 4 output specification Used as IO-Link device Max. 30

ZX

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

Cylinder with Lock Series MNB

14 102 73 64 45 86 30 111 12.5 11 10 65 359 14 22 + 0.084 0 22 MB-B08 80, 100 55 30 175 116 73 64 45 86 30 111 12.5 11 10 65 379 + 0.084 0 14 22 22 10 Series MNB Dimensions of Accessories Dimensions of Accessories Knuckle joint pin Clevis pin Rod end nut (standard equipment) 30 d Dd9 2d D C L l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature Valve size specifications 16 25 40 50 General use XLC16-30-1-2 XLC25-30-1-2 XLC40-30-1-2 XLC50-30-1-2 High temperature XLC16-30-1H-2 XLC25-30-1H-2 XLC40-30-1H-2 XLC50-30-1H-2 Temperature Valve size specifications 63 80 General use XLC63-30-1-2 XLC80-30-1-2 High temperature XLC63-30-1H-2 XLC80-30-1H-2 Note 1) Add the seal material symbol

CV/MVGQ

5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 10 10 45 30 14 9 22 13 5.5 9 19.5 17 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 12 10 45 30 14 9 22 13 5.5 9 19.5 17 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 14 15 50 39 18 10 24 16 7 11 22 8 76 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150

One-touch Fittings

Refer to the round type (from page 101).

3

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

For 30 type, common external pilot (on manifold side).)