70astamb1

to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 750 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 36 23 12.5 25 37.5 50 125 86 98 111 75 136 100 161 73 186 230 256 280 306 356 406 456

MXW

Dimensions B A D C M (mm) Stopper bolt Stroke adjustable range (mm) 5 Applicable size B A C D M Model Lock nut MXW-A812 21 MXW8 8 M5 x 0.5 2.5 6 MXW-A812-X11 15 31 MXW-A1212 5 23.5 MXW12 8 M5 x 0.8 2.5 6 Avoid operating within 1 mm. The effectiveness of the shock absorber and urethane damper will not be brought into full play, and could be adversely affected.

Title not found

70 122 151 48 374 836 52 402 1000 Slide screw + Linear guide: 53dB (LJ1H) Low profile/non-coupling type with reduced height and length Low Profile Electric Actuator Series LG1 Series with coupling available Mounting of a non-standard motor is possible.

Modular F.R.L. Unit

Note 12) Consult P/A for detailed dimensions and available attachments and options. 21

39

4Small round flat washer 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 50 CKZ3N-S050T Note 1) 63 CKZ3N-S063T Note 1) eSwitch holder uProximity switch (P&F) iHelical torsion spring oHexagon nut type 3 !0Switch holder gasket !1Hexagon socket head cover cap screw qDetection plate !2Hexagon socket head cover cap screw !3Hexagon socket head cap screw !

CXS

9 from the chart above CXSM32-PS CXSL15APS CXSL20APS CXSL25APS CXSL32APS 8-28-21 21 Series CXSJ Construction: Axial Piping CXSJ6P, CXSJ10P e q t w r u y i o Component Parts No.

CXS

9 from the chart above CXSM32-PS CXSL15APS CXSL20APS CXSL25APS CXSL32APS 8-28-21 21 Series CXSJ Construction: Axial Piping CXSJ6P, CXSJ10P e q t w r Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u y i o Component Parts No.

Compact Cylinder Series CQS

JIS Symbol Theoretical Output (N) OUT IN Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) 0.3 0.5 0.7 Made to Order Specifications (For details, refer to pages 1373 to 1565.) 84.8 IN 25 42 59 12 6 113 OUT 34 57 79 Symbol Specifications 151 IN 45 75 106 16 8 XA Change of rod end shape 201 OUT 60 101 141 Heat-resistant cylinder (10 to 150 C) (without

53

Page 151 With Automatic Fluid Fill Function . Page 145 Applicable to Deionized Water Piping . Page 145 Conforming to CE/UL Standards .

Large Size Vacuum Module: Series ZR

Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5 217 236 6 Symbol L1 52 71 L2 966 Large Size Vacuum Module: Ejector System Series ZR Circuit diagram ZA ZX Individual spacer (ZR1-R1-4) ZR PV PD EXH PS Function plate (ZR1-RV1-4) ZM X X X X X PS PE ZMA SOL.C Silencer Pressure switch for vacuum SOL.A SOL.B ZQ X X X X X PD PV Ejector ZH Release valve Supply valve V ZU Suction filter ZL X

CC

70 122 151 48 374 836 52 402 1000 Slide screw + Slider guide: 47 dB (LJ1S) Slide screw + Linear guide: 53 dB (LJ1H) RZQ MI W S CEP1 Low profile, non-coupling type with reduced height and length CE1 Compact Electric Actuator Series LG1 CE2 Series with coupling available Mounting of a non-standard motor is possible.

CC

70 122 151 48 374 836 52 402 1000 Slide screw + Slider guide: 47 dB (LJ1S) Slide screw + Linear guide: 53 dB (LJ1H) RZQ MI W S CEP1 Low profile, non-coupling type with reduced height and length CE1 Compact Electric Actuator Series LG1 CE2 Series with coupling available Mounting of a non-standard motor is possible.

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

For MGQM20-21 st, MGQM20-30 st is provided with a 5 mm + 4 mm 9 mm width spacer. 2. For MGQM50-40 st, MGQM50-50 st is provided with a 10 mm width spacer.

Cylinder with Lock Series MNB

to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119

Air Cylinder Series MB

to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 801 to 900 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 73 37.5 50 75 100 125 86 98 111 136 161 186 36 23 12.5 25 81 37.5 50 75 100 125 94 106 119 144 169 194 41 23 12.5 25 89 37.5 50 75 100 125 102 114 127 152 177

Air Fittings & Tubing

7 17.9 25.0 31.5 22 21 3 8 Reference dimensions after NPT thread installation.

Hydraulic

M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

CA2

71 65.8 80.5 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 116 4 40 204 1/2 up to 750 16 40 37 116 41 92 30 20 52 14 21 72 72.8 87.5 M12 x 1.75 11 26 17 M26 x 1.5 23 40 21 126 4 40 215 1/2 For more information about the rod end nut and accessories, refer to page 6-8-13.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

9 D20 to 63 80, 100 -X @7 y w 20Data 40 to 100 80, 100 With rod end locking (Base cylinder only) Since the guide unit figure is the same as the standard type, refer to pages 8-21-19 to 8-21-21. Component Parts Zinc chromated For lock type Material Note Material No. Description No.

LEC-OM02704CN

RWwn+6 RYn+20 RYn+21 No. RXn+20 RXn+21 RWn+2 RYn1RYn2 16bit(RWwn4) 16bit(RWwn5) (RWwn6) ON (RY(n2)0) OFF ON (RY(n2)1) OFF () ON (RX(n2)0) OFF ON (RX(n2)1) OFF (RWrn2) 6ms ON (RYn1RYn2) OFF .