C95

17 40 16 40 4.3 4 5 25 10 35 12 55 38 5.5 11 6.6 13 20 50 21 45 4.3 4 5 27 10 40 16 65 46.5 6.5 15 9 18 22 63 21 51 4.3 4 5 32 12 45 16 75 56.5 6.5 15 9 18 25 80 25 65 4.3 4 5 36 16 45 20 95 72 10 18 11 22 30 100 115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5.5 10 Bottom view of MXQ16-50 1322K 21 13 35 45 5.5 10 0.3 35.7 5.5 37 Z ZZ G (NN 1) x H H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 24 1 A B NN x M6 x 1 thread depth 12 6 HA 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 GA A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39

Profile Design ISO/VDMA Air Cylinder Series CP95

4 12 48 5 5.5 25 10 35 11 6.6 12 160 50 65 21 45 4.3 46.5 4 14 54 5 6.5 27 10 40 15 9 16 170 63 75 21 51 4.3 56.5 4 14 60 5 6.5 32 12 45 15 9 16 190 80 95 25 65 4.3 72 4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55 18 11 20 230 Mounting type ES Piston rod ball joint to DIN 648K Bore d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 6.6 38 51 8.5 21 18 31 14

Hygienic Design Cylinder Series HY

62 71 88 102 21 21 25 25 6 6 8 10 6.5 8.5 11 9 30 34 40 47 146 163 179 194 500 or less C M 600 or less 600 or less Note 1) Refer to pages 885 to 889 for details about the rod end nut, mounting bracket and accessory bracket.

MXS Series Air Slide Table

K KA 21 Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 6 12 3.5 (With stroke adjuster at retraction end) Stroke adjuster at extension end N-M5 X 0.8 thread 6 deep (Helisert) 6 4-M5 X 0.8 thread 7 deep 1 18 (With stroke adjuster at extension end) 26 35 62 48 F 20 5H9 4 deep +0.030 0 N -1 x F 2 2-M6 X 1 thread 10 deep 21 5H9 4 deep +0.030 0 10 M 0.5 36.5 40

4/5 Port Air Operated Valve Series SYJA3000 1

(Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting) 2-3.2 equivalent (18.5) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2-1 (Bleed port) 21 R2 P P1 P R R (11) (0.5) 13 10 5 2-1 (Bleed port) M5 x 0.8 (Piping port) 10 10 7 7 14 M3 x 0.5 28 (Piping port) 5-2-21 4 4/5 Port Air Operated Valve Series SYJA5000 How to Order

VZ100/300/500

Mounting Screw Tightening Torques M3: 0.8 Nm 4-6-34 35 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Manifold for Internal Pilot How to Order Applicable solenoid valve VZ512--01 VZ512M--01 VZ522--01 Z522M--01 Applicable blanking plate assembly DXT201-15-4A Type 20/21 VV3Z5 20 05 1 A port A port P/R port thread type Manifold P port Stations 20 21 Type 20 Type 21

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

21 21 21 44.5 44.5 44.5 44.5 Refer to the page 68 for dimensions with connector cable. 20 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations A port Porting specifications Valve

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

MU

For details, refer to page 7-9-36. 7-8-21

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Hv Auto Switch Proper Mounting Position Solid state auto switch Bore size (mm) 2-color indication solid state auto switch Reed auto switch B C A B Hv A B C A B Hv A B Hv A B C D-A9 D-A9V D-M9 D-M9V D-F8 D-M9W A B Hv D-M9WV A 36 25 16 36 25 15 32 21 20 32 21 17.5 18 7 25 32 21 20 32 21 17.5 8 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Electric Grippers

Make sure a workpiece mounted on the fingers does not interfere with the workpieces and facilities around the fingers. 1 21 1 1 21 1 8 x M3 x 0.5 x 4 15 20 +0.025 0 2 x 2.5H9 ( ) depth 2.5 10 0.05 4.5 4.5 12 12 LEHF20K2-48: Long Stroke 40 +0.030 0 4H9 ( ) depth 3 4 x M5 x 0.8 x 8 5 22 +0.030 0 4H9 ( ) depth 3 230 (Motor cable entry: Entry on the left side) 240 (Motor cable entry: Basic)

CP95

40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12

CP95

18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12 23 15 10.5 9 80 18 20 66 86 47 40 60 25 63 14 27 18 11 11.5 100 18 20 18 71 15 30 12.5 55 50 70 25

MU

For details, refer to page 7-9-36. 7-8-21

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGG MGC (mm) MGF Stroke range Bore size (mm) D1 J K M B D C E KA GA GB H MGZ 11 12 22 25 25 25 25 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 39 43 49 59 71 82 106 29 33 38 46 55 66 86 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 20 25 32 40 50 63 80 12.5 18 19.5

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber 40 161 EPR 39 160 40 50 63 80 100 125 1 0 89 158 2 0 56 156 3 0 55 396 6 0 155 347 12 1 121 345 22 3 120 580 118 531 116 529 How to Order ZPT 40 HB N A14 Mounting thread diameter (Vacuum entry) Pad diameter (mm) Pad diameter Thread dia.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

21 Series MGZR Construction y !

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

Plate Cylinder

Size NT-03 NT-MU03 NT-04 NT-05 25 32 40 50, 63 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 6 7 8 11 17 19 22 27 19.6 21.9 25.4 31.2 16.5 18 21 26 S + Stroke H + Stroke A nut is attached to the rod end male thread as standard.