Size Lead Order no. 16 Wear ring holder Stainless steel Stroke 101 mm or more 20 25 LE-D-2-2 20 63 A/B/C LE-D-2-5 17 Wear ring POM Stroke 101 mm or more 32 LE-D-2-4 L LE-D-2-6 18 Screw shaft pulley Aluminum alloy 740 Electric Actuator/Rod Type LEY Series AC Servo Motor 25, 32, 63 Size Dimensions: Motor Top/Parallel X Encoder Z-phase detecting position W ZZ F1 Rod operating range Note 1) (
Note 3) The following units can be selected with unit conversion function: For vacuum & compound pressure: kPakgf/cm2barpsimmHginHg For positive pressure & low pressure: MPakPakgf/cm2barpsi For low differential pressure: kPammH2O Analog Output 1 to 5VDC 4 to 20 mADC A B Rated pressure range Range 101 kPa 0 0 to 101 kPa For vacuum Analog output [mA] 5 20 For compound pressure Analog output
Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,
weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100
weight m (kg) Load weight m (kg) 20 25 20 25 20 1 10 30 31 100 101 200 300 1 10 30 31 100 101 200 300 Stroke (mm) Stroke (mm) MLGPL32 to 63 MLGPL32 to 63 30 30 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80, 100 MLGPL80, 100 40 40 100 100 100
20 20 20 20 20 CNG MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA 1 10 30 31 100 101 1 10 30 31 100 101 200 200 300 300 CNS Stroke (mm) Stroke (mm) CLS MLGPL32 to 63 MLGPL32 to 63 20 20 CLQ 63 MLGP 50 RLQ 50, 63 50, 63 Load weight m (kg) 50, 63 MLU 10 10
Lock Series MLGP Horizontal Mounting (Ball bushing bearing) (31) l2 = 50 mm V = 400 mm/s (32) l2 = 100 mm V = 400 mm/s MLGPL20/25 MLGPL20/25 4 4 25 25 25 25 25 CL 25 Load weight m (kg) Load weight m (kg) Load weight m (kg) CL1 MLGC 20 20 20 20 20 20 CNG MNB CNA 1 10 30 31 100 101 1 10 30 31 100 101 200 200 300 300 CNS Stroke (mm) Stroke (mm) CLS MLGPL32 to 63 MLGPL32 to 63 20 20 CLQ 63 MLGP
Note 3) Refer to pages 101 and 102 for further details on optional specifications. Note 4) Option H (Auto-drain bowl type: Metal bowl) is only applicable to the IDFA6E-20.
VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.
or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less
or less Rubber seal VQ1200 10 or less 0.72 0.70 0.25 0.15 0.18 13 or less 0.16 13 or less Metal seal Double VQ1201 15 or less 1.0 0.85 0.30 0.20 0.25 20 or less 0.21 20 or less Rubber seal VQ1300 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Closed center VQ1000 VQ1301 25 or less 0.65 0.70 0.42 0.20 0.18 47 or less 0.16 33 or less Rubber seal 77 VQ1400 20 or less
Passage: Top Ported Common EXH-Integrated, Stations: 3 Stations Top Ported/Valve, Port Size: None, Thread: G
Passage: Top Ported Common EXH-Integrated, Stations: 4 Stations Top Ported/Valve, Port Size: None, Thread: G
Passage: Top Ported Common EXH-Integrated, Stations: 3 Stations Top Ported/Valve, Port Size: None, Thread: NPT
Passage: Top Ported Common EXH-Integrated, Stations: 2 Stations Top Ported/Valve, Port Size: None, Thread: G
Passage: Top Ported Common EXH-Integrated, Stations: 7 Stations Top Ported/Valve, Port Size: None, Thread: G
Passage: Top Ported Common EXH-Integrated, Stations: 2 Stations Top Ported/Valve, Port Size: None, Thread: NPT
Passage: Top Ported Common EXH-Integrated, Stations: 4 Stations Top Ported/Valve, Port Size: None, Thread: NPT
Passage: Top Ported Common EXH-Integrated, Stations: 8 Stations Top Ported/Valve, Port Size: None, Thread: G
Passage: 20 (Top Ported Common EXH-Integrated), Stations: 3 Stations Top Ported/Valve, Port Size: None, Thread: 00F (G)